12/4/2012	8:00:04 AM	Helium valve closed
12/4/2012	8:00:04 AM	H2 valve closed
12/4/2012	8:00:04 AM	BCl3 valve closed
12/4/2012	8:00:04 AM	PH3 valve closed
12/4/2012	8:00:04 AM	SiCl4 pre valve closed
12/4/2012	8:00:04 AM	SiCl4 post valve closed
12/4/2012	8:00:04 AM	Main Vac valve closed
12/4/2012	8:00:04 AM	Bypass valve closed
12/4/2012	8:00:04 AM	Bubbler valve closed
12/4/2012	8:00:04 AM	Helium MFC set to  0.000000
12/4/2012	8:00:04 AM	H2 MFC set to  0.000000
12/4/2012	8:00:04 AM	BCl3 MFC set to  0.000000
12/4/2012	8:00:04 AM	PH3 MFC set to  0.000000
12/4/2012	8:00:04 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:00:04 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:00:04 AM	Tube furnace set to 150
12/4/2012	8:00:08 AM	Helium valve closed
12/4/2012	8:00:08 AM	BCl3 valve closed
12/4/2012	8:00:08 AM	PH3 valve closed
12/4/2012	8:00:08 AM	SiCl4 pre valve closed
12/4/2012	8:00:08 AM	SiCl4 post valve closed
12/4/2012	8:00:08 AM	Main Vac valve closed
12/4/2012	8:00:08 AM	Bypass valve closed
12/4/2012	8:00:08 AM	Bubbler valve closed
12/4/2012	8:00:08 AM	H2 valve opened
12/4/2012	8:00:08 AM	Helium MFC set to  0.000000
12/4/2012	8:00:08 AM	H2 MFC set to  500.000000
12/4/2012	8:00:08 AM	BCl3 MFC set to  0.000000
12/4/2012	8:00:08 AM	PH3 MFC set to  0.000000
12/4/2012	8:00:08 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:00:08 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:00:08 AM	Tube furnace set to 150
12/4/2012	8:01:20 AM	Helium valve closed
12/4/2012	8:01:20 AM	BCl3 valve closed
12/4/2012	8:01:20 AM	PH3 valve closed
12/4/2012	8:01:20 AM	SiCl4 pre valve closed
12/4/2012	8:01:20 AM	SiCl4 post valve closed
12/4/2012	8:01:20 AM	Main Vac valve closed
12/4/2012	8:01:20 AM	Bypass valve closed
12/4/2012	8:01:20 AM	H2 valve opened
12/4/2012	8:01:20 AM	Bubbler valve opened
12/4/2012	8:01:20 AM	Helium MFC set to  0.000000
12/4/2012	8:01:20 AM	H2 MFC set to  500.000000
12/4/2012	8:01:20 AM	BCl3 MFC set to  0.000000
12/4/2012	8:01:20 AM	PH3 MFC set to  0.000000
12/4/2012	8:01:20 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:01:20 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:01:20 AM	Tube furnace set to 150
12/4/2012	8:01:21 AM	Helium valve closed
12/4/2012	8:01:21 AM	BCl3 valve closed
12/4/2012	8:01:21 AM	PH3 valve closed
12/4/2012	8:01:21 AM	SiCl4 pre valve closed
12/4/2012	8:01:21 AM	SiCl4 post valve closed
12/4/2012	8:01:21 AM	Main Vac valve closed
12/4/2012	8:01:21 AM	Bypass valve closed
12/4/2012	8:01:21 AM	H2 valve opened
12/4/2012	8:01:21 AM	Bubbler valve opened
12/4/2012	8:01:21 AM	Helium MFC set to  0.000000
12/4/2012	8:01:21 AM	H2 MFC set to  500.000000
12/4/2012	8:01:21 AM	BCl3 MFC set to  0.000000
12/4/2012	8:01:21 AM	PH3 MFC set to  0.000000
12/4/2012	8:01:21 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:01:21 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:01:21 AM	Tube furnace set to 1000
12/4/2012	8:21:21 AM	Helium valve closed
12/4/2012	8:21:21 AM	PH3 valve closed
12/4/2012	8:21:21 AM	Main Vac valve closed
12/4/2012	8:21:21 AM	Bypass valve closed
12/4/2012	8:21:21 AM	H2 valve opened
12/4/2012	8:21:21 AM	BCl3 valve opened
12/4/2012	8:21:21 AM	SiCl4 pre valve opened
12/4/2012	8:21:21 AM	SiCl4 post valve opened
12/4/2012	8:21:21 AM	Bubbler valve opened
12/4/2012	8:21:21 AM	Helium MFC set to  0.000000
12/4/2012	8:21:21 AM	H2 MFC set to  450.000000
12/4/2012	8:21:21 AM	BCl3 MFC set to  1.300000
12/4/2012	8:21:21 AM	PH3 MFC set to  0.000000
12/4/2012	8:21:21 AM	SiCl4 MFC set to  50.000000
12/4/2012	8:21:21 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:21:21 AM	Tube furnace set to 1000
12/4/2012	8:41:21 AM	Helium valve closed
12/4/2012	8:41:21 AM	BCl3 valve closed
12/4/2012	8:41:21 AM	PH3 valve closed
12/4/2012	8:41:21 AM	SiCl4 pre valve closed
12/4/2012	8:41:21 AM	SiCl4 post valve closed
12/4/2012	8:41:21 AM	Main Vac valve closed
12/4/2012	8:41:21 AM	Bypass valve closed
12/4/2012	8:41:21 AM	H2 valve opened
12/4/2012	8:41:21 AM	Bubbler valve opened
12/4/2012	8:41:21 AM	Helium MFC set to  0.000000
12/4/2012	8:41:21 AM	H2 MFC set to  500.000000
12/4/2012	8:41:21 AM	BCl3 MFC set to  0.000000
12/4/2012	8:41:21 AM	PH3 MFC set to  0.000000
12/4/2012	8:41:21 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:41:21 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:41:22 AM	Tube furnace set to 950
12/4/2012	8:44:21 AM	Helium valve closed
12/4/2012	8:44:21 AM	BCl3 valve closed
12/4/2012	8:44:21 AM	PH3 valve closed
12/4/2012	8:44:21 AM	SiCl4 pre valve closed
12/4/2012	8:44:22 AM	SiCl4 post valve closed
12/4/2012	8:44:22 AM	Main Vac valve closed
12/4/2012	8:44:22 AM	Bypass valve closed
12/4/2012	8:44:22 AM	H2 valve opened
12/4/2012	8:44:22 AM	Bubbler valve opened
12/4/2012	8:44:22 AM	Helium MFC set to  0.000000
12/4/2012	8:44:22 AM	H2 MFC set to  500.000000
12/4/2012	8:44:22 AM	BCl3 MFC set to  0.000000
12/4/2012	8:44:22 AM	PH3 MFC set to  0.000000
12/4/2012	8:44:22 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:44:22 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:44:22 AM	Tube furnace set to 900
12/4/2012	8:47:22 AM	Helium valve closed
12/4/2012	8:47:22 AM	BCl3 valve closed
12/4/2012	8:47:22 AM	PH3 valve closed
12/4/2012	8:47:22 AM	SiCl4 pre valve closed
12/4/2012	8:47:22 AM	SiCl4 post valve closed
12/4/2012	8:47:22 AM	Main Vac valve closed
12/4/2012	8:47:22 AM	Bypass valve closed
12/4/2012	8:47:22 AM	H2 valve opened
12/4/2012	8:47:22 AM	Bubbler valve opened
12/4/2012	8:47:22 AM	Helium MFC set to  0.000000
12/4/2012	8:47:22 AM	H2 MFC set to  500.000000
12/4/2012	8:47:22 AM	BCl3 MFC set to  0.000000
12/4/2012	8:47:22 AM	PH3 MFC set to  0.000000
12/4/2012	8:47:22 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:47:22 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:47:22 AM	Tube furnace set to 850
12/4/2012	8:50:22 AM	Helium valve closed
12/4/2012	8:50:22 AM	BCl3 valve closed
12/4/2012	8:50:22 AM	PH3 valve closed
12/4/2012	8:50:22 AM	SiCl4 pre valve closed
12/4/2012	8:50:22 AM	SiCl4 post valve closed
12/4/2012	8:50:22 AM	Main Vac valve closed
12/4/2012	8:50:22 AM	Bypass valve closed
12/4/2012	8:50:22 AM	H2 valve opened
12/4/2012	8:50:22 AM	Bubbler valve opened
12/4/2012	8:50:22 AM	Helium MFC set to  0.000000
12/4/2012	8:50:22 AM	H2 MFC set to  500.000000
12/4/2012	8:50:22 AM	BCl3 MFC set to  0.000000
12/4/2012	8:50:22 AM	PH3 MFC set to  0.000000
12/4/2012	8:50:22 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:50:22 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:50:22 AM	Tube furnace set to 800
12/4/2012	8:53:22 AM	Helium valve closed
12/4/2012	8:53:22 AM	BCl3 valve closed
12/4/2012	8:53:22 AM	PH3 valve closed
12/4/2012	8:53:22 AM	SiCl4 pre valve closed
12/4/2012	8:53:22 AM	SiCl4 post valve closed
12/4/2012	8:53:22 AM	Main Vac valve closed
12/4/2012	8:53:22 AM	Bypass valve closed
12/4/2012	8:53:22 AM	H2 valve opened
12/4/2012	8:53:22 AM	Bubbler valve opened
12/4/2012	8:53:22 AM	Helium MFC set to  0.000000
12/4/2012	8:53:22 AM	H2 MFC set to  500.000000
12/4/2012	8:53:22 AM	BCl3 MFC set to  0.000000
12/4/2012	8:53:22 AM	PH3 MFC set to  0.000000
12/4/2012	8:53:22 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:53:22 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:53:22 AM	Tube furnace set to 750
12/4/2012	8:56:22 AM	H2 valve closed
12/4/2012	8:56:22 AM	BCl3 valve closed
12/4/2012	8:56:22 AM	PH3 valve closed
12/4/2012	8:56:22 AM	SiCl4 pre valve closed
12/4/2012	8:56:22 AM	SiCl4 post valve closed
12/4/2012	8:56:22 AM	Main Vac valve closed
12/4/2012	8:56:22 AM	Bypass valve closed
12/4/2012	8:56:22 AM	Helium valve opened
12/4/2012	8:56:22 AM	Bubbler valve opened
12/4/2012	8:56:22 AM	Helium MFC set to  500.000000
12/4/2012	8:56:22 AM	H2 MFC set to  0.000000
12/4/2012	8:56:22 AM	BCl3 MFC set to  0.000000
12/4/2012	8:56:22 AM	PH3 MFC set to  0.000000
12/4/2012	8:56:22 AM	SiCl4 MFC set to  0.000000
12/4/2012	8:56:22 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:56:22 AM	Tube furnace set to 0
12/4/2012	9:09:02 AM	Run aborted at 9:09 AM
12/4/2012	9:09:02 AM	Helium valve closed
12/4/2012	9:09:02 AM	H2 valve closed
12/4/2012	9:09:02 AM	BCl3 valve closed
12/4/2012	9:09:03 AM	PH3 valve closed
12/4/2012	9:09:03 AM	SiCl4 pre valve closed
12/4/2012	9:09:03 AM	SiCl4 post valve closed
12/4/2012	9:09:03 AM	Bypass valve closed
12/4/2012	9:09:03 AM	Main Vac valve closed
12/4/2012	9:09:03 AM	Bubbler valve closed
12/4/2012	9:09:03 AM	Helium MFC set to  0.000000
12/4/2012	9:09:03 AM	H2 MFC set to  0.000000
12/4/2012	9:09:03 AM	BCl3 MFC set to  0.000000
12/4/2012	9:09:03 AM	PH3 MFC set to  0.000000
12/4/2012	9:09:03 AM	SiCl4 MFC set to  0.000000
12/4/2012	9:09:03 AM	Tube furnace set to 0
12/4/2012	9:11:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	9:11:31 AM	Recipe started at 9:11 AM
12/4/2012	9:11:31 AM	Helium valve closed
12/4/2012	9:11:31 AM	H2 valve closed
12/4/2012	9:11:31 AM	BCl3 valve closed
12/4/2012	9:11:31 AM	PH3 valve closed
12/4/2012	9:11:31 AM	SiCl4 pre valve closed
12/4/2012	9:11:31 AM	SiCl4 post valve closed
12/4/2012	9:11:31 AM	Main Vac valve closed
12/4/2012	9:11:31 AM	Bubbler valve closed
12/4/2012	9:11:31 AM	Bypass valve opened
12/4/2012	9:11:31 AM	Helium MFC set to  0.000000
12/4/2012	9:11:31 AM	H2 MFC set to  0.000000
12/4/2012	9:11:31 AM	BCl3 MFC set to  0.000000
12/4/2012	9:11:31 AM	PH3 MFC set to  0.000000
12/4/2012	9:11:31 AM	SiCl4 MFC set to  0.000000
12/4/2012	9:11:31 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:11:31 AM	Tube furnace set to 0
12/4/2012	9:12:41 AM	Helium valve closed
12/4/2012	9:12:41 AM	H2 valve closed
12/4/2012	9:12:41 AM	BCl3 valve closed
12/4/2012	9:12:41 AM	PH3 valve closed
12/4/2012	9:12:41 AM	SiCl4 pre valve closed
12/4/2012	9:12:41 AM	SiCl4 post valve closed
12/4/2012	9:12:41 AM	Main Vac valve closed
12/4/2012	9:12:41 AM	Bubbler valve closed
12/4/2012	9:12:41 AM	Bypass valve opened
12/4/2012	9:12:41 AM	Helium MFC set to  0.000000
12/4/2012	9:12:41 AM	H2 MFC set to  0.000000
12/4/2012	9:12:41 AM	BCl3 MFC set to  0.000000
12/4/2012	9:12:41 AM	PH3 MFC set to  0.000000
12/4/2012	9:12:41 AM	SiCl4 MFC set to  0.000000
12/4/2012	9:12:41 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:12:41 AM	Tube furnace set to 0
12/4/2012	9:13:41 AM	Helium valve closed
12/4/2012	9:13:41 AM	H2 valve closed
12/4/2012	9:13:41 AM	BCl3 valve closed
12/4/2012	9:13:41 AM	PH3 valve closed
12/4/2012	9:13:41 AM	SiCl4 pre valve closed
12/4/2012	9:13:41 AM	SiCl4 post valve closed
12/4/2012	9:13:41 AM	Bypass valve closed
12/4/2012	9:13:41 AM	Bubbler valve closed
12/4/2012	9:13:41 AM	Main Vac valve opened
12/4/2012	9:13:41 AM	Helium MFC set to  0.000000
12/4/2012	9:13:41 AM	H2 MFC set to  0.000000
12/4/2012	9:13:41 AM	BCl3 MFC set to  0.000000
12/4/2012	9:13:41 AM	PH3 MFC set to  0.000000
12/4/2012	9:13:41 AM	SiCl4 MFC set to  0.000000
12/4/2012	9:13:41 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:13:42 AM	Tube furnace set to 0
12/4/2012	9:13:43 AM	Run finished at 9:13 AM
12/4/2012	9:13:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	10:06:36 AM	Main Vac valve closed
12/4/2012	10:06:49 AM	Main Vac valve opened
12/4/2012	10:06:54 AM	Helium MFC set to  20.000000
12/4/2012	10:06:55 AM	Helium valve opened
12/4/2012	10:07:20 AM	Helium valve closed
12/4/2012	10:08:02 AM	Recipe started at 10:07 AM
12/4/2012	10:08:02 AM	Helium valve closed
12/4/2012	10:08:02 AM	H2 valve closed
12/4/2012	10:08:02 AM	BCl3 valve closed
12/4/2012	10:08:02 AM	PH3 valve closed
12/4/2012	10:08:02 AM	SiCl4 pre valve closed
12/4/2012	10:08:02 AM	SiCl4 post valve closed
12/4/2012	10:08:02 AM	Main Vac valve closed
12/4/2012	10:08:02 AM	Bypass valve closed
12/4/2012	10:08:02 AM	Bubbler valve closed
12/4/2012	10:08:02 AM	Helium MFC set to  0.000000
12/4/2012	10:08:02 AM	H2 MFC set to  0.000000
12/4/2012	10:08:02 AM	BCl3 MFC set to  0.000000
12/4/2012	10:08:02 AM	PH3 MFC set to  0.000000
12/4/2012	10:08:02 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:08:02 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:08:02 AM	Tube furnace set to 150
12/4/2012	10:08:05 AM	Helium valve closed
12/4/2012	10:08:05 AM	BCl3 valve closed
12/4/2012	10:08:05 AM	PH3 valve closed
12/4/2012	10:08:05 AM	SiCl4 pre valve closed
12/4/2012	10:08:05 AM	SiCl4 post valve closed
12/4/2012	10:08:05 AM	Main Vac valve closed
12/4/2012	10:08:05 AM	Bypass valve closed
12/4/2012	10:08:05 AM	Bubbler valve closed
12/4/2012	10:08:05 AM	H2 valve opened
12/4/2012	10:08:05 AM	Helium MFC set to  0.000000
12/4/2012	10:08:05 AM	H2 MFC set to  500.000000
12/4/2012	10:08:05 AM	BCl3 MFC set to  0.000000
12/4/2012	10:08:05 AM	PH3 MFC set to  0.000000
12/4/2012	10:08:05 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:08:05 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:08:05 AM	Tube furnace set to 150
12/4/2012	10:09:16 AM	Helium valve closed
12/4/2012	10:09:16 AM	BCl3 valve closed
12/4/2012	10:09:16 AM	PH3 valve closed
12/4/2012	10:09:16 AM	SiCl4 pre valve closed
12/4/2012	10:09:16 AM	SiCl4 post valve closed
12/4/2012	10:09:16 AM	Main Vac valve closed
12/4/2012	10:09:16 AM	Bypass valve closed
12/4/2012	10:09:16 AM	H2 valve opened
12/4/2012	10:09:16 AM	Bubbler valve opened
12/4/2012	10:09:16 AM	Helium MFC set to  0.000000
12/4/2012	10:09:16 AM	H2 MFC set to  500.000000
12/4/2012	10:09:16 AM	BCl3 MFC set to  0.000000
12/4/2012	10:09:16 AM	PH3 MFC set to  0.000000
12/4/2012	10:09:16 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:09:16 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:09:16 AM	Tube furnace set to 150
12/4/2012	10:09:17 AM	Helium valve closed
12/4/2012	10:09:17 AM	BCl3 valve closed
12/4/2012	10:09:17 AM	PH3 valve closed
12/4/2012	10:09:17 AM	SiCl4 pre valve closed
12/4/2012	10:09:17 AM	SiCl4 post valve closed
12/4/2012	10:09:17 AM	Main Vac valve closed
12/4/2012	10:09:17 AM	Bypass valve closed
12/4/2012	10:09:17 AM	H2 valve opened
12/4/2012	10:09:17 AM	Bubbler valve opened
12/4/2012	10:09:17 AM	Helium MFC set to  0.000000
12/4/2012	10:09:17 AM	H2 MFC set to  500.000000
12/4/2012	10:09:17 AM	BCl3 MFC set to  0.000000
12/4/2012	10:09:17 AM	PH3 MFC set to  0.000000
12/4/2012	10:09:17 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:09:17 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:09:18 AM	Tube furnace set to 1000
12/4/2012	10:29:17 AM	Helium valve closed
12/4/2012	10:29:17 AM	PH3 valve closed
12/4/2012	10:29:17 AM	Main Vac valve closed
12/4/2012	10:29:17 AM	Bypass valve closed
12/4/2012	10:29:17 AM	H2 valve opened
12/4/2012	10:29:17 AM	BCl3 valve opened
12/4/2012	10:29:18 AM	SiCl4 pre valve opened
12/4/2012	10:29:18 AM	SiCl4 post valve opened
12/4/2012	10:29:18 AM	Bubbler valve opened
12/4/2012	10:29:18 AM	Helium MFC set to  0.000000
12/4/2012	10:29:18 AM	H2 MFC set to  450.000000
12/4/2012	10:29:18 AM	BCl3 MFC set to  1.300000
12/4/2012	10:29:18 AM	PH3 MFC set to  0.000000
12/4/2012	10:29:18 AM	SiCl4 MFC set to  50.000000
12/4/2012	10:29:18 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:29:18 AM	Tube furnace set to 1000
12/4/2012	10:49:18 AM	Helium valve closed
12/4/2012	10:49:18 AM	BCl3 valve closed
12/4/2012	10:49:18 AM	PH3 valve closed
12/4/2012	10:49:18 AM	SiCl4 pre valve closed
12/4/2012	10:49:18 AM	SiCl4 post valve closed
12/4/2012	10:49:18 AM	Main Vac valve closed
12/4/2012	10:49:18 AM	Bypass valve closed
12/4/2012	10:49:18 AM	H2 valve opened
12/4/2012	10:49:18 AM	Bubbler valve opened
12/4/2012	10:49:18 AM	Helium MFC set to  0.000000
12/4/2012	10:49:18 AM	H2 MFC set to  500.000000
12/4/2012	10:49:18 AM	BCl3 MFC set to  0.000000
12/4/2012	10:49:18 AM	PH3 MFC set to  0.000000
12/4/2012	10:49:18 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:49:18 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:49:18 AM	Tube furnace set to 950
12/4/2012	10:52:18 AM	Helium valve closed
12/4/2012	10:52:18 AM	BCl3 valve closed
12/4/2012	10:52:18 AM	PH3 valve closed
12/4/2012	10:52:18 AM	SiCl4 pre valve closed
12/4/2012	10:52:18 AM	SiCl4 post valve closed
12/4/2012	10:52:18 AM	Main Vac valve closed
12/4/2012	10:52:18 AM	Bypass valve closed
12/4/2012	10:52:18 AM	H2 valve opened
12/4/2012	10:52:18 AM	Bubbler valve opened
12/4/2012	10:52:18 AM	Helium MFC set to  0.000000
12/4/2012	10:52:18 AM	H2 MFC set to  500.000000
12/4/2012	10:52:18 AM	BCl3 MFC set to  0.000000
12/4/2012	10:52:18 AM	PH3 MFC set to  0.000000
12/4/2012	10:52:18 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:52:18 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:52:18 AM	Tube furnace set to 900
12/4/2012	10:55:18 AM	Helium valve closed
12/4/2012	10:55:18 AM	BCl3 valve closed
12/4/2012	10:55:18 AM	PH3 valve closed
12/4/2012	10:55:18 AM	SiCl4 pre valve closed
12/4/2012	10:55:18 AM	SiCl4 post valve closed
12/4/2012	10:55:18 AM	Main Vac valve closed
12/4/2012	10:55:18 AM	Bypass valve closed
12/4/2012	10:55:18 AM	H2 valve opened
12/4/2012	10:55:18 AM	Bubbler valve opened
12/4/2012	10:55:18 AM	Helium MFC set to  0.000000
12/4/2012	10:55:18 AM	H2 MFC set to  500.000000
12/4/2012	10:55:18 AM	BCl3 MFC set to  0.000000
12/4/2012	10:55:18 AM	PH3 MFC set to  0.000000
12/4/2012	10:55:18 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:55:18 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:55:18 AM	Tube furnace set to 850
12/4/2012	10:58:18 AM	Helium valve closed
12/4/2012	10:58:18 AM	BCl3 valve closed
12/4/2012	10:58:18 AM	PH3 valve closed
12/4/2012	10:58:18 AM	SiCl4 pre valve closed
12/4/2012	10:58:18 AM	SiCl4 post valve closed
12/4/2012	10:58:19 AM	Main Vac valve closed
12/4/2012	10:58:19 AM	Bypass valve closed
12/4/2012	10:58:19 AM	H2 valve opened
12/4/2012	10:58:19 AM	Bubbler valve opened
12/4/2012	10:58:19 AM	Helium MFC set to  0.000000
12/4/2012	10:58:19 AM	H2 MFC set to  500.000000
12/4/2012	10:58:19 AM	BCl3 MFC set to  0.000000
12/4/2012	10:58:19 AM	PH3 MFC set to  0.000000
12/4/2012	10:58:19 AM	SiCl4 MFC set to  0.000000
12/4/2012	10:58:19 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	10:58:19 AM	Tube furnace set to 800
12/4/2012	11:01:19 AM	Helium valve closed
12/4/2012	11:01:19 AM	BCl3 valve closed
12/4/2012	11:01:19 AM	PH3 valve closed
12/4/2012	11:01:19 AM	SiCl4 pre valve closed
12/4/2012	11:01:19 AM	SiCl4 post valve closed
12/4/2012	11:01:19 AM	Main Vac valve closed
12/4/2012	11:01:19 AM	Bypass valve closed
12/4/2012	11:01:19 AM	H2 valve opened
12/4/2012	11:01:19 AM	Bubbler valve opened
12/4/2012	11:01:19 AM	Helium MFC set to  0.000000
12/4/2012	11:01:19 AM	H2 MFC set to  500.000000
12/4/2012	11:01:19 AM	BCl3 MFC set to  0.000000
12/4/2012	11:01:19 AM	PH3 MFC set to  0.000000
12/4/2012	11:01:19 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:01:19 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:01:19 AM	Tube furnace set to 750
12/4/2012	11:04:19 AM	H2 valve closed
12/4/2012	11:04:19 AM	BCl3 valve closed
12/4/2012	11:04:19 AM	PH3 valve closed
12/4/2012	11:04:19 AM	SiCl4 pre valve closed
12/4/2012	11:04:19 AM	SiCl4 post valve closed
12/4/2012	11:04:19 AM	Main Vac valve closed
12/4/2012	11:04:19 AM	Bypass valve closed
12/4/2012	11:04:19 AM	Helium valve opened
12/4/2012	11:04:19 AM	Bubbler valve opened
12/4/2012	11:04:19 AM	Helium MFC set to  500.000000
12/4/2012	11:04:19 AM	H2 MFC set to  0.000000
12/4/2012	11:04:19 AM	BCl3 MFC set to  0.000000
12/4/2012	11:04:19 AM	PH3 MFC set to  0.000000
12/4/2012	11:04:19 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:04:19 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:04:19 AM	Tube furnace set to 0
12/4/2012	11:24:19 AM	Helium valve closed
12/4/2012	11:24:19 AM	H2 valve closed
12/4/2012	11:24:19 AM	BCl3 valve closed
12/4/2012	11:24:19 AM	PH3 valve closed
12/4/2012	11:24:19 AM	SiCl4 pre valve closed
12/4/2012	11:24:19 AM	SiCl4 post valve closed
12/4/2012	11:24:19 AM	Main Vac valve closed
12/4/2012	11:24:19 AM	Bypass valve closed
12/4/2012	11:24:19 AM	Bubbler valve closed
12/4/2012	11:24:19 AM	Helium MFC set to  0.000000
12/4/2012	11:24:19 AM	H2 MFC set to  0.000000
12/4/2012	11:24:19 AM	BCl3 MFC set to  0.000000
12/4/2012	11:24:19 AM	PH3 MFC set to  0.000000
12/4/2012	11:24:19 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:24:19 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:24:19 AM	Tube furnace set to 0
12/4/2012	11:28:54 AM	Run aborted at 11:28 AM
12/4/2012	11:28:54 AM	Helium valve closed
12/4/2012	11:28:54 AM	H2 valve closed
12/4/2012	11:28:54 AM	BCl3 valve closed
12/4/2012	11:28:54 AM	PH3 valve closed
12/4/2012	11:28:54 AM	SiCl4 pre valve closed
12/4/2012	11:28:54 AM	SiCl4 post valve closed
12/4/2012	11:28:54 AM	Bypass valve closed
12/4/2012	11:28:54 AM	Main Vac valve closed
12/4/2012	11:28:54 AM	Bubbler valve closed
12/4/2012	11:28:54 AM	Helium MFC set to  0.000000
12/4/2012	11:28:54 AM	H2 MFC set to  0.000000
12/4/2012	11:28:54 AM	BCl3 MFC set to  0.000000
12/4/2012	11:28:54 AM	PH3 MFC set to  0.000000
12/4/2012	11:28:54 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:28:54 AM	Tube furnace set to 0
12/4/2012	11:53:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	11:53:10 AM	Recipe started at 11:53 AM
12/4/2012	11:53:10 AM	Helium valve closed
12/4/2012	11:53:10 AM	H2 valve closed
12/4/2012	11:53:10 AM	BCl3 valve closed
12/4/2012	11:53:10 AM	PH3 valve closed
12/4/2012	11:53:10 AM	SiCl4 pre valve closed
12/4/2012	11:53:10 AM	SiCl4 post valve closed
12/4/2012	11:53:10 AM	Main Vac valve closed
12/4/2012	11:53:10 AM	Bypass valve closed
12/4/2012	11:53:10 AM	Bubbler valve closed
12/4/2012	11:53:10 AM	Helium MFC set to  0.000000
12/4/2012	11:53:10 AM	H2 MFC set to  0.000000
12/4/2012	11:53:10 AM	BCl3 MFC set to  0.000000
12/4/2012	11:53:10 AM	PH3 MFC set to  0.000000
12/4/2012	11:53:10 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:53:10 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:53:10 AM	Tube furnace set to 0
12/4/2012	11:53:13 AM	H2 valve closed
12/4/2012	11:53:13 AM	BCl3 valve closed
12/4/2012	11:53:13 AM	PH3 valve closed
12/4/2012	11:53:13 AM	SiCl4 pre valve closed
12/4/2012	11:53:13 AM	SiCl4 post valve closed
12/4/2012	11:53:13 AM	Main Vac valve closed
12/4/2012	11:53:13 AM	Bypass valve closed
12/4/2012	11:53:13 AM	Bubbler valve closed
12/4/2012	11:53:13 AM	Helium valve opened
12/4/2012	11:53:13 AM	Helium MFC set to  500.000000
12/4/2012	11:53:13 AM	H2 MFC set to  0.000000
12/4/2012	11:53:13 AM	BCl3 MFC set to  0.000000
12/4/2012	11:53:13 AM	PH3 MFC set to  0.000000
12/4/2012	11:53:13 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:53:13 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:53:14 AM	Tube furnace set to 0
12/4/2012	11:53:19 AM	Helium valve closed
12/4/2012	11:53:19 AM	H2 valve closed
12/4/2012	11:53:19 AM	BCl3 valve closed
12/4/2012	11:53:19 AM	PH3 valve closed
12/4/2012	11:53:19 AM	SiCl4 pre valve closed
12/4/2012	11:53:19 AM	SiCl4 post valve closed
12/4/2012	11:53:19 AM	Main Vac valve closed
12/4/2012	11:53:19 AM	Bypass valve closed
12/4/2012	11:53:19 AM	Bubbler valve closed
12/4/2012	11:53:19 AM	Helium MFC set to  0.000000
12/4/2012	11:53:19 AM	H2 MFC set to  0.000000
12/4/2012	11:53:19 AM	BCl3 MFC set to  0.000000
12/4/2012	11:53:19 AM	PH3 MFC set to  0.000000
12/4/2012	11:53:19 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:53:19 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:53:20 AM	Tube furnace set to 0
12/4/2012	11:53:21 AM	Run finished at 11:53 AM
12/4/2012	11:53:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	11:57:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	11:57:42 AM	Recipe started at 11:57 AM
12/4/2012	11:57:42 AM	Helium valve closed
12/4/2012	11:57:42 AM	H2 valve closed
12/4/2012	11:57:42 AM	BCl3 valve closed
12/4/2012	11:57:42 AM	PH3 valve closed
12/4/2012	11:57:42 AM	SiCl4 pre valve closed
12/4/2012	11:57:42 AM	SiCl4 post valve closed
12/4/2012	11:57:42 AM	Main Vac valve closed
12/4/2012	11:57:42 AM	Bubbler valve closed
12/4/2012	11:57:42 AM	Bypass valve opened
12/4/2012	11:57:42 AM	Helium MFC set to  0.000000
12/4/2012	11:57:42 AM	H2 MFC set to  0.000000
12/4/2012	11:57:42 AM	BCl3 MFC set to  0.000000
12/4/2012	11:57:42 AM	PH3 MFC set to  0.000000
12/4/2012	11:57:42 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:57:42 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:57:42 AM	Tube furnace set to 0
12/4/2012	11:59:02 AM	Helium valve closed
12/4/2012	11:59:02 AM	H2 valve closed
12/4/2012	11:59:02 AM	BCl3 valve closed
12/4/2012	11:59:02 AM	PH3 valve closed
12/4/2012	11:59:02 AM	SiCl4 pre valve closed
12/4/2012	11:59:02 AM	SiCl4 post valve closed
12/4/2012	11:59:02 AM	Main Vac valve closed
12/4/2012	11:59:02 AM	Bubbler valve closed
12/4/2012	11:59:02 AM	Bypass valve opened
12/4/2012	11:59:02 AM	Helium MFC set to  0.000000
12/4/2012	11:59:02 AM	H2 MFC set to  0.000000
12/4/2012	11:59:02 AM	BCl3 MFC set to  0.000000
12/4/2012	11:59:02 AM	PH3 MFC set to  0.000000
12/4/2012	11:59:02 AM	SiCl4 MFC set to  0.000000
12/4/2012	11:59:02 AM	Bypass solenoid MFC set to  0.000000
12/4/2012	11:59:02 AM	Tube furnace set to 0
12/4/2012	12:00:02 PM	Helium valve closed
12/4/2012	12:00:02 PM	H2 valve closed
12/4/2012	12:00:02 PM	BCl3 valve closed
12/4/2012	12:00:02 PM	PH3 valve closed
12/4/2012	12:00:02 PM	SiCl4 pre valve closed
12/4/2012	12:00:02 PM	SiCl4 post valve closed
12/4/2012	12:00:02 PM	Bypass valve closed
12/4/2012	12:00:02 PM	Bubbler valve closed
12/4/2012	12:00:02 PM	Main Vac valve opened
12/4/2012	12:00:02 PM	Helium MFC set to  0.000000
12/4/2012	12:00:02 PM	H2 MFC set to  0.000000
12/4/2012	12:00:02 PM	BCl3 MFC set to  0.000000
12/4/2012	12:00:02 PM	PH3 MFC set to  0.000000
12/4/2012	12:00:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	12:00:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	12:00:02 PM	Tube furnace set to 0
12/4/2012	12:00:03 PM	Run finished at 12:00 PM
12/4/2012	12:00:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	1:19:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	1:19:21 PM	Recipe started at 1:19 PM
12/4/2012	1:19:21 PM	Helium valve closed
12/4/2012	1:19:21 PM	H2 valve closed
12/4/2012	1:19:21 PM	BCl3 valve closed
12/4/2012	1:19:21 PM	PH3 valve closed
12/4/2012	1:19:21 PM	SiCl4 pre valve closed
12/4/2012	1:19:21 PM	SiCl4 post valve closed
12/4/2012	1:19:21 PM	Main Vac valve closed
12/4/2012	1:19:21 PM	Bypass valve closed
12/4/2012	1:19:21 PM	Bubbler valve closed
12/4/2012	1:19:21 PM	Helium MFC set to  0.000000
12/4/2012	1:19:21 PM	H2 MFC set to  0.000000
12/4/2012	1:19:21 PM	BCl3 MFC set to  0.000000
12/4/2012	1:19:21 PM	PH3 MFC set to  0.000000
12/4/2012	1:19:21 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:19:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:19:22 PM	Tube furnace set to 0
12/4/2012	1:19:25 PM	H2 valve closed
12/4/2012	1:19:25 PM	BCl3 valve closed
12/4/2012	1:19:25 PM	PH3 valve closed
12/4/2012	1:19:25 PM	SiCl4 pre valve closed
12/4/2012	1:19:25 PM	SiCl4 post valve closed
12/4/2012	1:19:25 PM	Main Vac valve closed
12/4/2012	1:19:25 PM	Bypass valve closed
12/4/2012	1:19:25 PM	Bubbler valve closed
12/4/2012	1:19:25 PM	Helium valve opened
12/4/2012	1:19:25 PM	Helium MFC set to  500.000000
12/4/2012	1:19:25 PM	H2 MFC set to  0.000000
12/4/2012	1:19:25 PM	BCl3 MFC set to  0.000000
12/4/2012	1:19:25 PM	PH3 MFC set to  0.000000
12/4/2012	1:19:25 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:19:25 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:19:25 PM	Tube furnace set to 0
12/4/2012	1:20:37 PM	Helium valve closed
12/4/2012	1:20:37 PM	H2 valve closed
12/4/2012	1:20:37 PM	BCl3 valve closed
12/4/2012	1:20:37 PM	PH3 valve closed
12/4/2012	1:20:37 PM	SiCl4 pre valve closed
12/4/2012	1:20:37 PM	SiCl4 post valve closed
12/4/2012	1:20:37 PM	Main Vac valve closed
12/4/2012	1:20:37 PM	Bypass valve closed
12/4/2012	1:20:37 PM	Bubbler valve closed
12/4/2012	1:20:37 PM	Helium MFC set to  0.000000
12/4/2012	1:20:37 PM	H2 MFC set to  0.000000
12/4/2012	1:20:37 PM	BCl3 MFC set to  0.000000
12/4/2012	1:20:37 PM	PH3 MFC set to  0.000000
12/4/2012	1:20:37 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:20:37 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:20:37 PM	Tube furnace set to 0
12/4/2012	1:20:38 PM	Run finished at 1:20 PM
12/4/2012	1:20:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	1:24:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	1:24:02 PM	Recipe started at 1:24 PM
12/4/2012	1:24:02 PM	Helium valve closed
12/4/2012	1:24:02 PM	H2 valve closed
12/4/2012	1:24:02 PM	BCl3 valve closed
12/4/2012	1:24:02 PM	PH3 valve closed
12/4/2012	1:24:02 PM	SiCl4 pre valve closed
12/4/2012	1:24:02 PM	SiCl4 post valve closed
12/4/2012	1:24:02 PM	Main Vac valve closed
12/4/2012	1:24:02 PM	Bubbler valve closed
12/4/2012	1:24:02 PM	Bypass valve opened
12/4/2012	1:24:02 PM	Helium MFC set to  0.000000
12/4/2012	1:24:02 PM	H2 MFC set to  0.000000
12/4/2012	1:24:02 PM	BCl3 MFC set to  0.000000
12/4/2012	1:24:02 PM	PH3 MFC set to  0.000000
12/4/2012	1:24:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:24:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:24:02 PM	Tube furnace set to 0
12/4/2012	1:25:30 PM	Helium valve closed
12/4/2012	1:25:30 PM	H2 valve closed
12/4/2012	1:25:30 PM	BCl3 valve closed
12/4/2012	1:25:30 PM	PH3 valve closed
12/4/2012	1:25:30 PM	SiCl4 pre valve closed
12/4/2012	1:25:30 PM	SiCl4 post valve closed
12/4/2012	1:25:30 PM	Main Vac valve closed
12/4/2012	1:25:30 PM	Bubbler valve closed
12/4/2012	1:25:30 PM	Bypass valve opened
12/4/2012	1:25:30 PM	Helium MFC set to  0.000000
12/4/2012	1:25:30 PM	H2 MFC set to  0.000000
12/4/2012	1:25:30 PM	BCl3 MFC set to  0.000000
12/4/2012	1:25:30 PM	PH3 MFC set to  0.000000
12/4/2012	1:25:30 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:25:30 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:25:30 PM	Tube furnace set to 0
12/4/2012	1:26:30 PM	Helium valve closed
12/4/2012	1:26:30 PM	H2 valve closed
12/4/2012	1:26:30 PM	BCl3 valve closed
12/4/2012	1:26:30 PM	PH3 valve closed
12/4/2012	1:26:30 PM	SiCl4 pre valve closed
12/4/2012	1:26:30 PM	SiCl4 post valve closed
12/4/2012	1:26:30 PM	Bypass valve closed
12/4/2012	1:26:30 PM	Bubbler valve closed
12/4/2012	1:26:30 PM	Main Vac valve opened
12/4/2012	1:26:30 PM	Helium MFC set to  0.000000
12/4/2012	1:26:30 PM	H2 MFC set to  0.000000
12/4/2012	1:26:30 PM	BCl3 MFC set to  0.000000
12/4/2012	1:26:30 PM	PH3 MFC set to  0.000000
12/4/2012	1:26:30 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:26:30 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:26:30 PM	Tube furnace set to 0
12/4/2012	1:26:31 PM	Run finished at 1:26 PM
12/4/2012	1:26:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	1:58:26 PM	Recipe started at 1:58 PM
12/4/2012	1:58:26 PM	Helium valve closed
12/4/2012	1:58:26 PM	H2 valve closed
12/4/2012	1:58:26 PM	BCl3 valve closed
12/4/2012	1:58:26 PM	PH3 valve closed
12/4/2012	1:58:26 PM	SiCl4 pre valve closed
12/4/2012	1:58:26 PM	SiCl4 post valve closed
12/4/2012	1:58:26 PM	Bypass valve closed
12/4/2012	1:58:26 PM	Bubbler valve closed
12/4/2012	1:58:26 PM	Main Vac valve opened
12/4/2012	1:58:26 PM	Helium MFC set to  0.000000
12/4/2012	1:58:26 PM	H2 MFC set to  0.000000
12/4/2012	1:58:26 PM	BCl3 MFC set to  0.000000
12/4/2012	1:58:26 PM	PH3 MFC set to  0.000000
12/4/2012	1:58:26 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:58:26 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:58:26 PM	Tube furnace set to 150
12/4/2012	1:58:28 PM	H2 valve closed
12/4/2012	1:58:28 PM	BCl3 valve closed
12/4/2012	1:58:28 PM	PH3 valve closed
12/4/2012	1:58:28 PM	SiCl4 pre valve closed
12/4/2012	1:58:28 PM	SiCl4 post valve closed
12/4/2012	1:58:28 PM	Bypass valve closed
12/4/2012	1:58:28 PM	Bubbler valve closed
12/4/2012	1:58:28 PM	Helium valve opened
12/4/2012	1:58:28 PM	Main Vac valve opened
12/4/2012	1:58:28 PM	Helium MFC set to  20.000000
12/4/2012	1:58:28 PM	H2 MFC set to  0.000000
12/4/2012	1:58:28 PM	BCl3 MFC set to  0.000000
12/4/2012	1:58:28 PM	PH3 MFC set to  0.000000
12/4/2012	1:58:28 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:58:28 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:58:28 PM	Tube furnace set to 150
12/4/2012	1:58:58 PM	Helium valve closed
12/4/2012	1:58:58 PM	H2 valve closed
12/4/2012	1:58:58 PM	BCl3 valve closed
12/4/2012	1:58:58 PM	PH3 valve closed
12/4/2012	1:58:58 PM	SiCl4 pre valve closed
12/4/2012	1:58:58 PM	SiCl4 post valve closed
12/4/2012	1:58:58 PM	Bypass valve closed
12/4/2012	1:58:58 PM	Bubbler valve closed
12/4/2012	1:58:58 PM	Main Vac valve opened
12/4/2012	1:58:58 PM	Helium MFC set to  0.000000
12/4/2012	1:58:58 PM	H2 MFC set to  0.000000
12/4/2012	1:58:58 PM	BCl3 MFC set to  0.000000
12/4/2012	1:58:58 PM	PH3 MFC set to  0.000000
12/4/2012	1:58:58 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:58:58 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:58:58 PM	Tube furnace set to 150
12/4/2012	1:59:28 PM	H2 valve closed
12/4/2012	1:59:28 PM	BCl3 valve closed
12/4/2012	1:59:28 PM	PH3 valve closed
12/4/2012	1:59:28 PM	SiCl4 pre valve closed
12/4/2012	1:59:28 PM	SiCl4 post valve closed
12/4/2012	1:59:28 PM	Bypass valve closed
12/4/2012	1:59:28 PM	Bubbler valve closed
12/4/2012	1:59:28 PM	Helium valve opened
12/4/2012	1:59:28 PM	Main Vac valve opened
12/4/2012	1:59:28 PM	Helium MFC set to  20.000000
12/4/2012	1:59:28 PM	H2 MFC set to  0.000000
12/4/2012	1:59:28 PM	BCl3 MFC set to  0.000000
12/4/2012	1:59:28 PM	PH3 MFC set to  0.000000
12/4/2012	1:59:28 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:59:28 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:59:29 PM	Tube furnace set to 150
12/4/2012	1:59:59 PM	Helium valve closed
12/4/2012	1:59:59 PM	H2 valve closed
12/4/2012	1:59:59 PM	BCl3 valve closed
12/4/2012	1:59:59 PM	PH3 valve closed
12/4/2012	1:59:59 PM	SiCl4 pre valve closed
12/4/2012	1:59:59 PM	SiCl4 post valve closed
12/4/2012	1:59:59 PM	Bypass valve closed
12/4/2012	1:59:59 PM	Bubbler valve closed
12/4/2012	1:59:59 PM	Main Vac valve opened
12/4/2012	1:59:59 PM	Helium MFC set to  0.000000
12/4/2012	1:59:59 PM	H2 MFC set to  0.000000
12/4/2012	1:59:59 PM	BCl3 MFC set to  0.000000
12/4/2012	1:59:59 PM	PH3 MFC set to  0.000000
12/4/2012	1:59:59 PM	SiCl4 MFC set to  0.000000
12/4/2012	1:59:59 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	1:59:59 PM	Tube furnace set to 150
12/4/2012	2:00:29 PM	H2 valve closed
12/4/2012	2:00:29 PM	BCl3 valve closed
12/4/2012	2:00:29 PM	PH3 valve closed
12/4/2012	2:00:29 PM	SiCl4 pre valve closed
12/4/2012	2:00:29 PM	SiCl4 post valve closed
12/4/2012	2:00:29 PM	Bypass valve closed
12/4/2012	2:00:29 PM	Bubbler valve closed
12/4/2012	2:00:29 PM	Helium valve opened
12/4/2012	2:00:29 PM	Main Vac valve opened
12/4/2012	2:00:29 PM	Helium MFC set to  20.000000
12/4/2012	2:00:29 PM	H2 MFC set to  0.000000
12/4/2012	2:00:29 PM	BCl3 MFC set to  0.000000
12/4/2012	2:00:29 PM	PH3 MFC set to  0.000000
12/4/2012	2:00:29 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:00:29 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:00:29 PM	Tube furnace set to 150
12/4/2012	2:00:59 PM	Helium valve closed
12/4/2012	2:00:59 PM	H2 valve closed
12/4/2012	2:00:59 PM	BCl3 valve closed
12/4/2012	2:00:59 PM	PH3 valve closed
12/4/2012	2:00:59 PM	SiCl4 pre valve closed
12/4/2012	2:00:59 PM	SiCl4 post valve closed
12/4/2012	2:00:59 PM	Bypass valve closed
12/4/2012	2:00:59 PM	Bubbler valve closed
12/4/2012	2:00:59 PM	Main Vac valve opened
12/4/2012	2:00:59 PM	Helium MFC set to  0.000000
12/4/2012	2:00:59 PM	H2 MFC set to  0.000000
12/4/2012	2:00:59 PM	BCl3 MFC set to  0.000000
12/4/2012	2:00:59 PM	PH3 MFC set to  0.000000
12/4/2012	2:00:59 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:00:59 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:00:59 PM	Tube furnace set to 150
12/4/2012	2:01:29 PM	H2 valve closed
12/4/2012	2:01:29 PM	BCl3 valve closed
12/4/2012	2:01:29 PM	PH3 valve closed
12/4/2012	2:01:29 PM	SiCl4 pre valve closed
12/4/2012	2:01:29 PM	SiCl4 post valve closed
12/4/2012	2:01:29 PM	Bypass valve closed
12/4/2012	2:01:29 PM	Bubbler valve closed
12/4/2012	2:01:29 PM	Helium valve opened
12/4/2012	2:01:29 PM	Main Vac valve opened
12/4/2012	2:01:29 PM	Helium MFC set to  20.000000
12/4/2012	2:01:29 PM	H2 MFC set to  0.000000
12/4/2012	2:01:29 PM	BCl3 MFC set to  0.000000
12/4/2012	2:01:29 PM	PH3 MFC set to  0.000000
12/4/2012	2:01:29 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:01:29 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:01:30 PM	Tube furnace set to 150
12/4/2012	2:02:00 PM	Helium valve closed
12/4/2012	2:02:00 PM	H2 valve closed
12/4/2012	2:02:00 PM	BCl3 valve closed
12/4/2012	2:02:00 PM	PH3 valve closed
12/4/2012	2:02:00 PM	SiCl4 pre valve closed
12/4/2012	2:02:00 PM	SiCl4 post valve closed
12/4/2012	2:02:00 PM	Bypass valve closed
12/4/2012	2:02:00 PM	Bubbler valve closed
12/4/2012	2:02:00 PM	Main Vac valve opened
12/4/2012	2:02:00 PM	Helium MFC set to  0.000000
12/4/2012	2:02:00 PM	H2 MFC set to  0.000000
12/4/2012	2:02:00 PM	BCl3 MFC set to  0.000000
12/4/2012	2:02:00 PM	PH3 MFC set to  0.000000
12/4/2012	2:02:00 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:02:00 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:02:00 PM	Tube furnace set to 150
12/4/2012	2:02:30 PM	H2 valve closed
12/4/2012	2:02:30 PM	BCl3 valve closed
12/4/2012	2:02:30 PM	PH3 valve closed
12/4/2012	2:02:30 PM	SiCl4 pre valve closed
12/4/2012	2:02:30 PM	SiCl4 post valve closed
12/4/2012	2:02:30 PM	Bypass valve closed
12/4/2012	2:02:30 PM	Bubbler valve closed
12/4/2012	2:02:30 PM	Helium valve opened
12/4/2012	2:02:30 PM	Main Vac valve opened
12/4/2012	2:02:30 PM	Helium MFC set to  20.000000
12/4/2012	2:02:30 PM	H2 MFC set to  0.000000
12/4/2012	2:02:30 PM	BCl3 MFC set to  0.000000
12/4/2012	2:02:30 PM	PH3 MFC set to  0.000000
12/4/2012	2:02:30 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:02:30 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:02:30 PM	Tube furnace set to 150
12/4/2012	2:03:00 PM	Helium valve closed
12/4/2012	2:03:00 PM	H2 valve closed
12/4/2012	2:03:00 PM	BCl3 valve closed
12/4/2012	2:03:00 PM	PH3 valve closed
12/4/2012	2:03:00 PM	SiCl4 pre valve closed
12/4/2012	2:03:00 PM	SiCl4 post valve closed
12/4/2012	2:03:00 PM	Bypass valve closed
12/4/2012	2:03:00 PM	Bubbler valve closed
12/4/2012	2:03:00 PM	Main Vac valve opened
12/4/2012	2:03:00 PM	Helium MFC set to  0.000000
12/4/2012	2:03:00 PM	H2 MFC set to  0.000000
12/4/2012	2:03:00 PM	BCl3 MFC set to  0.000000
12/4/2012	2:03:00 PM	PH3 MFC set to  0.000000
12/4/2012	2:03:00 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:03:00 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:03:00 PM	Tube furnace set to 150
12/4/2012	2:03:30 PM	H2 valve closed
12/4/2012	2:03:30 PM	BCl3 valve closed
12/4/2012	2:03:30 PM	PH3 valve closed
12/4/2012	2:03:30 PM	SiCl4 pre valve closed
12/4/2012	2:03:30 PM	SiCl4 post valve closed
12/4/2012	2:03:30 PM	Bypass valve closed
12/4/2012	2:03:30 PM	Bubbler valve closed
12/4/2012	2:03:30 PM	Helium valve opened
12/4/2012	2:03:30 PM	Main Vac valve opened
12/4/2012	2:03:30 PM	Helium MFC set to  20.000000
12/4/2012	2:03:30 PM	H2 MFC set to  0.000000
12/4/2012	2:03:30 PM	BCl3 MFC set to  0.000000
12/4/2012	2:03:30 PM	PH3 MFC set to  0.000000
12/4/2012	2:03:30 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:03:30 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:03:31 PM	Tube furnace set to 150
12/4/2012	2:04:01 PM	Helium valve closed
12/4/2012	2:04:01 PM	H2 valve closed
12/4/2012	2:04:01 PM	BCl3 valve closed
12/4/2012	2:04:01 PM	PH3 valve closed
12/4/2012	2:04:01 PM	SiCl4 pre valve closed
12/4/2012	2:04:01 PM	SiCl4 post valve closed
12/4/2012	2:04:01 PM	Bypass valve closed
12/4/2012	2:04:01 PM	Bubbler valve closed
12/4/2012	2:04:01 PM	Main Vac valve opened
12/4/2012	2:04:01 PM	Helium MFC set to  0.000000
12/4/2012	2:04:01 PM	H2 MFC set to  0.000000
12/4/2012	2:04:01 PM	BCl3 MFC set to  0.000000
12/4/2012	2:04:01 PM	PH3 MFC set to  0.000000
12/4/2012	2:04:01 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:04:01 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:04:01 PM	Tube furnace set to 150
12/4/2012	2:04:31 PM	H2 valve closed
12/4/2012	2:04:31 PM	BCl3 valve closed
12/4/2012	2:04:31 PM	PH3 valve closed
12/4/2012	2:04:31 PM	SiCl4 pre valve closed
12/4/2012	2:04:31 PM	SiCl4 post valve closed
12/4/2012	2:04:31 PM	Bypass valve closed
12/4/2012	2:04:31 PM	Bubbler valve closed
12/4/2012	2:04:31 PM	Helium valve opened
12/4/2012	2:04:31 PM	Main Vac valve opened
12/4/2012	2:04:31 PM	Helium MFC set to  20.000000
12/4/2012	2:04:31 PM	H2 MFC set to  0.000000
12/4/2012	2:04:31 PM	BCl3 MFC set to  0.000000
12/4/2012	2:04:31 PM	PH3 MFC set to  0.000000
12/4/2012	2:04:31 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:04:31 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:04:31 PM	Tube furnace set to 150
12/4/2012	2:05:01 PM	Helium valve closed
12/4/2012	2:05:01 PM	H2 valve closed
12/4/2012	2:05:01 PM	BCl3 valve closed
12/4/2012	2:05:01 PM	PH3 valve closed
12/4/2012	2:05:01 PM	SiCl4 pre valve closed
12/4/2012	2:05:01 PM	SiCl4 post valve closed
12/4/2012	2:05:01 PM	Bypass valve closed
12/4/2012	2:05:01 PM	Bubbler valve closed
12/4/2012	2:05:01 PM	Main Vac valve opened
12/4/2012	2:05:01 PM	Helium MFC set to  0.000000
12/4/2012	2:05:01 PM	H2 MFC set to  0.000000
12/4/2012	2:05:01 PM	BCl3 MFC set to  0.000000
12/4/2012	2:05:01 PM	PH3 MFC set to  0.000000
12/4/2012	2:05:01 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:05:01 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:05:01 PM	Tube furnace set to 150
12/4/2012	2:05:32 PM	H2 valve closed
12/4/2012	2:05:32 PM	BCl3 valve closed
12/4/2012	2:05:32 PM	PH3 valve closed
12/4/2012	2:05:32 PM	SiCl4 pre valve closed
12/4/2012	2:05:32 PM	SiCl4 post valve closed
12/4/2012	2:05:32 PM	Bypass valve closed
12/4/2012	2:05:32 PM	Bubbler valve closed
12/4/2012	2:05:32 PM	Helium valve opened
12/4/2012	2:05:32 PM	Main Vac valve opened
12/4/2012	2:05:32 PM	Helium MFC set to  20.000000
12/4/2012	2:05:32 PM	H2 MFC set to  0.000000
12/4/2012	2:05:32 PM	BCl3 MFC set to  0.000000
12/4/2012	2:05:32 PM	PH3 MFC set to  0.000000
12/4/2012	2:05:32 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:05:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:05:32 PM	Tube furnace set to 150
12/4/2012	2:06:02 PM	Helium valve closed
12/4/2012	2:06:02 PM	H2 valve closed
12/4/2012	2:06:02 PM	BCl3 valve closed
12/4/2012	2:06:02 PM	PH3 valve closed
12/4/2012	2:06:02 PM	SiCl4 pre valve closed
12/4/2012	2:06:02 PM	SiCl4 post valve closed
12/4/2012	2:06:02 PM	Bypass valve closed
12/4/2012	2:06:02 PM	Bubbler valve closed
12/4/2012	2:06:02 PM	Main Vac valve opened
12/4/2012	2:06:02 PM	Helium MFC set to  0.000000
12/4/2012	2:06:02 PM	H2 MFC set to  0.000000
12/4/2012	2:06:02 PM	BCl3 MFC set to  0.000000
12/4/2012	2:06:02 PM	PH3 MFC set to  0.000000
12/4/2012	2:06:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:06:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:06:02 PM	Tube furnace set to 150
12/4/2012	2:06:32 PM	H2 valve closed
12/4/2012	2:06:32 PM	BCl3 valve closed
12/4/2012	2:06:32 PM	PH3 valve closed
12/4/2012	2:06:32 PM	SiCl4 pre valve closed
12/4/2012	2:06:32 PM	SiCl4 post valve closed
12/4/2012	2:06:32 PM	Bypass valve closed
12/4/2012	2:06:32 PM	Bubbler valve closed
12/4/2012	2:06:32 PM	Helium valve opened
12/4/2012	2:06:32 PM	Main Vac valve opened
12/4/2012	2:06:32 PM	Helium MFC set to  20.000000
12/4/2012	2:06:32 PM	H2 MFC set to  0.000000
12/4/2012	2:06:32 PM	BCl3 MFC set to  0.000000
12/4/2012	2:06:32 PM	PH3 MFC set to  0.000000
12/4/2012	2:06:32 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:06:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:06:32 PM	Tube furnace set to 150
12/4/2012	2:07:02 PM	Helium valve closed
12/4/2012	2:07:02 PM	H2 valve closed
12/4/2012	2:07:02 PM	BCl3 valve closed
12/4/2012	2:07:02 PM	PH3 valve closed
12/4/2012	2:07:02 PM	SiCl4 pre valve closed
12/4/2012	2:07:02 PM	SiCl4 post valve closed
12/4/2012	2:07:02 PM	Bypass valve closed
12/4/2012	2:07:02 PM	Bubbler valve closed
12/4/2012	2:07:02 PM	Main Vac valve opened
12/4/2012	2:07:02 PM	Helium MFC set to  0.000000
12/4/2012	2:07:02 PM	H2 MFC set to  0.000000
12/4/2012	2:07:02 PM	BCl3 MFC set to  0.000000
12/4/2012	2:07:02 PM	PH3 MFC set to  0.000000
12/4/2012	2:07:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:07:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:07:03 PM	Tube furnace set to 150
12/4/2012	2:07:33 PM	H2 valve closed
12/4/2012	2:07:33 PM	BCl3 valve closed
12/4/2012	2:07:33 PM	PH3 valve closed
12/4/2012	2:07:33 PM	SiCl4 pre valve closed
12/4/2012	2:07:33 PM	SiCl4 post valve closed
12/4/2012	2:07:33 PM	Bypass valve closed
12/4/2012	2:07:33 PM	Bubbler valve closed
12/4/2012	2:07:33 PM	Helium valve opened
12/4/2012	2:07:33 PM	Main Vac valve opened
12/4/2012	2:07:33 PM	Helium MFC set to  20.000000
12/4/2012	2:07:33 PM	H2 MFC set to  0.000000
12/4/2012	2:07:33 PM	BCl3 MFC set to  0.000000
12/4/2012	2:07:33 PM	PH3 MFC set to  0.000000
12/4/2012	2:07:33 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:07:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:07:33 PM	Tube furnace set to 150
12/4/2012	2:08:03 PM	Helium valve closed
12/4/2012	2:08:03 PM	H2 valve closed
12/4/2012	2:08:03 PM	BCl3 valve closed
12/4/2012	2:08:03 PM	PH3 valve closed
12/4/2012	2:08:03 PM	SiCl4 pre valve closed
12/4/2012	2:08:03 PM	SiCl4 post valve closed
12/4/2012	2:08:03 PM	Bypass valve closed
12/4/2012	2:08:03 PM	Bubbler valve closed
12/4/2012	2:08:03 PM	Main Vac valve opened
12/4/2012	2:08:03 PM	Helium MFC set to  0.000000
12/4/2012	2:08:03 PM	H2 MFC set to  0.000000
12/4/2012	2:08:03 PM	BCl3 MFC set to  0.000000
12/4/2012	2:08:03 PM	PH3 MFC set to  0.000000
12/4/2012	2:08:03 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:08:03 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:08:03 PM	Tube furnace set to 150
12/4/2012	2:08:04 PM	Run finished at 2:08 PM
12/4/2012	2:10:51 PM	Main Vac valve closed
12/4/2012	2:11:04 PM	Main Vac valve opened
12/4/2012	2:14:37 PM	Recipe started at 2:14 PM
12/4/2012	2:14:37 PM	Helium valve closed
12/4/2012	2:14:37 PM	H2 valve closed
12/4/2012	2:14:37 PM	BCl3 valve closed
12/4/2012	2:14:37 PM	PH3 valve closed
12/4/2012	2:14:37 PM	SiCl4 pre valve closed
12/4/2012	2:14:37 PM	SiCl4 post valve closed
12/4/2012	2:14:37 PM	Main Vac valve closed
12/4/2012	2:14:37 PM	Bypass valve closed
12/4/2012	2:14:37 PM	Bubbler valve closed
12/4/2012	2:14:37 PM	Helium MFC set to  0.000000
12/4/2012	2:14:37 PM	H2 MFC set to  0.000000
12/4/2012	2:14:37 PM	BCl3 MFC set to  0.000000
12/4/2012	2:14:37 PM	PH3 MFC set to  0.000000
12/4/2012	2:14:37 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:14:37 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:14:37 PM	Tube furnace set to 0
12/4/2012	2:14:40 PM	Helium valve closed
12/4/2012	2:14:40 PM	BCl3 valve closed
12/4/2012	2:14:40 PM	PH3 valve closed
12/4/2012	2:14:40 PM	SiCl4 pre valve closed
12/4/2012	2:14:40 PM	SiCl4 post valve closed
12/4/2012	2:14:40 PM	Main Vac valve closed
12/4/2012	2:14:40 PM	Bypass valve closed
12/4/2012	2:14:40 PM	Bubbler valve closed
12/4/2012	2:14:40 PM	H2 valve opened
12/4/2012	2:14:40 PM	Helium MFC set to  0.000000
12/4/2012	2:14:40 PM	H2 MFC set to  500.000000
12/4/2012	2:14:40 PM	BCl3 MFC set to  0.000000
12/4/2012	2:14:40 PM	PH3 MFC set to  0.000000
12/4/2012	2:14:40 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:14:40 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:14:41 PM	Tube furnace set to 0
12/4/2012	2:15:53 PM	Helium valve closed
12/4/2012	2:15:53 PM	BCl3 valve closed
12/4/2012	2:15:53 PM	PH3 valve closed
12/4/2012	2:15:53 PM	SiCl4 pre valve closed
12/4/2012	2:15:53 PM	SiCl4 post valve closed
12/4/2012	2:15:53 PM	Main Vac valve closed
12/4/2012	2:15:53 PM	Bypass valve closed
12/4/2012	2:15:53 PM	H2 valve opened
12/4/2012	2:15:53 PM	Bubbler valve opened
12/4/2012	2:15:53 PM	Helium MFC set to  0.000000
12/4/2012	2:15:53 PM	H2 MFC set to  500.000000
12/4/2012	2:15:53 PM	BCl3 MFC set to  0.000000
12/4/2012	2:15:53 PM	PH3 MFC set to  0.000000
12/4/2012	2:15:53 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:15:53 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:15:54 PM	Tube furnace set to 0
12/4/2012	2:15:55 PM	Helium valve closed
12/4/2012	2:15:55 PM	BCl3 valve closed
12/4/2012	2:15:55 PM	PH3 valve closed
12/4/2012	2:15:55 PM	SiCl4 pre valve closed
12/4/2012	2:15:55 PM	SiCl4 post valve closed
12/4/2012	2:15:55 PM	Main Vac valve closed
12/4/2012	2:15:55 PM	Bypass valve closed
12/4/2012	2:15:55 PM	H2 valve opened
12/4/2012	2:15:55 PM	Bubbler valve opened
12/4/2012	2:15:55 PM	Helium MFC set to  0.000000
12/4/2012	2:15:55 PM	H2 MFC set to  500.000000
12/4/2012	2:15:55 PM	BCl3 MFC set to  0.000000
12/4/2012	2:15:55 PM	PH3 MFC set to  0.000000
12/4/2012	2:15:55 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:15:55 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:15:55 PM	Tube furnace set to 1000
12/4/2012	2:45:55 PM	Helium valve closed
12/4/2012	2:45:55 PM	PH3 valve closed
12/4/2012	2:45:55 PM	Main Vac valve closed
12/4/2012	2:45:55 PM	Bypass valve closed
12/4/2012	2:45:55 PM	H2 valve opened
12/4/2012	2:45:55 PM	BCl3 valve opened
12/4/2012	2:45:55 PM	SiCl4 pre valve opened
12/4/2012	2:45:55 PM	SiCl4 post valve opened
12/4/2012	2:45:55 PM	Bubbler valve opened
12/4/2012	2:45:55 PM	Helium MFC set to  0.000000
12/4/2012	2:45:55 PM	H2 MFC set to  500.000000
12/4/2012	2:45:55 PM	BCl3 MFC set to  1.000000
12/4/2012	2:45:55 PM	PH3 MFC set to  0.000000
12/4/2012	2:45:55 PM	SiCl4 MFC set to  50.000000
12/4/2012	2:45:55 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:45:55 PM	Tube furnace set to 1000
12/4/2012	2:53:55 PM	Helium valve closed
12/4/2012	2:53:55 PM	BCl3 valve closed
12/4/2012	2:53:55 PM	PH3 valve closed
12/4/2012	2:53:55 PM	SiCl4 pre valve closed
12/4/2012	2:53:55 PM	SiCl4 post valve closed
12/4/2012	2:53:55 PM	Main Vac valve closed
12/4/2012	2:53:55 PM	Bypass valve closed
12/4/2012	2:53:55 PM	H2 valve opened
12/4/2012	2:53:55 PM	Bubbler valve opened
12/4/2012	2:53:55 PM	Helium MFC set to  0.000000
12/4/2012	2:53:55 PM	H2 MFC set to  500.000000
12/4/2012	2:53:55 PM	BCl3 MFC set to  0.000000
12/4/2012	2:53:55 PM	PH3 MFC set to  0.000000
12/4/2012	2:53:55 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:53:55 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:53:55 PM	Tube furnace set to 750
12/4/2012	2:58:55 PM	H2 valve closed
12/4/2012	2:58:55 PM	BCl3 valve closed
12/4/2012	2:58:55 PM	PH3 valve closed
12/4/2012	2:58:55 PM	SiCl4 pre valve closed
12/4/2012	2:58:55 PM	SiCl4 post valve closed
12/4/2012	2:58:55 PM	Main Vac valve closed
12/4/2012	2:58:55 PM	Bypass valve closed
12/4/2012	2:58:55 PM	Helium valve opened
12/4/2012	2:58:55 PM	Bubbler valve opened
12/4/2012	2:58:55 PM	Helium MFC set to  500.000000
12/4/2012	2:58:55 PM	H2 MFC set to  0.000000
12/4/2012	2:58:55 PM	BCl3 MFC set to  0.000000
12/4/2012	2:58:55 PM	PH3 MFC set to  0.000000
12/4/2012	2:58:55 PM	SiCl4 MFC set to  0.000000
12/4/2012	2:58:55 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	2:58:56 PM	Tube furnace set to 0
12/4/2012	3:18:56 PM	Helium valve closed
12/4/2012	3:18:56 PM	H2 valve closed
12/4/2012	3:18:56 PM	BCl3 valve closed
12/4/2012	3:18:56 PM	PH3 valve closed
12/4/2012	3:18:56 PM	SiCl4 pre valve closed
12/4/2012	3:18:56 PM	SiCl4 post valve closed
12/4/2012	3:18:56 PM	Main Vac valve closed
12/4/2012	3:18:56 PM	Bypass valve closed
12/4/2012	3:18:56 PM	Bubbler valve closed
12/4/2012	3:18:56 PM	Helium MFC set to  0.000000
12/4/2012	3:18:56 PM	H2 MFC set to  0.000000
12/4/2012	3:18:56 PM	BCl3 MFC set to  0.000000
12/4/2012	3:18:56 PM	PH3 MFC set to  0.000000
12/4/2012	3:18:56 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:18:56 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:18:56 PM	Tube furnace set to 0
12/4/2012	3:18:57 PM	Run finished at 3:18 PM
12/4/2012	3:25:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	3:25:15 PM	Recipe started at 3:25 PM
12/4/2012	3:25:15 PM	Helium valve closed
12/4/2012	3:25:15 PM	H2 valve closed
12/4/2012	3:25:15 PM	BCl3 valve closed
12/4/2012	3:25:15 PM	PH3 valve closed
12/4/2012	3:25:15 PM	SiCl4 pre valve closed
12/4/2012	3:25:15 PM	SiCl4 post valve closed
12/4/2012	3:25:15 PM	Main Vac valve closed
12/4/2012	3:25:15 PM	Bypass valve closed
12/4/2012	3:25:15 PM	Bubbler valve closed
12/4/2012	3:25:15 PM	Helium MFC set to  0.000000
12/4/2012	3:25:15 PM	H2 MFC set to  0.000000
12/4/2012	3:25:15 PM	BCl3 MFC set to  0.000000
12/4/2012	3:25:15 PM	PH3 MFC set to  0.000000
12/4/2012	3:25:15 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:25:15 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:25:15 PM	Tube furnace set to 0
12/4/2012	3:25:18 PM	H2 valve closed
12/4/2012	3:25:18 PM	BCl3 valve closed
12/4/2012	3:25:18 PM	PH3 valve closed
12/4/2012	3:25:18 PM	SiCl4 pre valve closed
12/4/2012	3:25:18 PM	SiCl4 post valve closed
12/4/2012	3:25:18 PM	Main Vac valve closed
12/4/2012	3:25:18 PM	Bypass valve closed
12/4/2012	3:25:18 PM	Bubbler valve closed
12/4/2012	3:25:18 PM	Helium valve opened
12/4/2012	3:25:18 PM	Helium MFC set to  500.000000
12/4/2012	3:25:18 PM	H2 MFC set to  0.000000
12/4/2012	3:25:18 PM	BCl3 MFC set to  0.000000
12/4/2012	3:25:18 PM	PH3 MFC set to  0.000000
12/4/2012	3:25:18 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:25:18 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:25:18 PM	Tube furnace set to 0
12/4/2012	3:25:21 PM	Helium valve closed
12/4/2012	3:25:21 PM	H2 valve closed
12/4/2012	3:25:21 PM	BCl3 valve closed
12/4/2012	3:25:21 PM	PH3 valve closed
12/4/2012	3:25:21 PM	SiCl4 pre valve closed
12/4/2012	3:25:21 PM	SiCl4 post valve closed
12/4/2012	3:25:21 PM	Main Vac valve closed
12/4/2012	3:25:21 PM	Bypass valve closed
12/4/2012	3:25:21 PM	Bubbler valve closed
12/4/2012	3:25:21 PM	Helium MFC set to  0.000000
12/4/2012	3:25:21 PM	H2 MFC set to  0.000000
12/4/2012	3:25:21 PM	BCl3 MFC set to  0.000000
12/4/2012	3:25:21 PM	PH3 MFC set to  0.000000
12/4/2012	3:25:21 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:25:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:25:21 PM	Tube furnace set to 0
12/4/2012	3:25:22 PM	Run finished at 3:25 PM
12/4/2012	3:25:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	3:28:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	3:28:57 PM	Recipe started at 3:28 PM
12/4/2012	3:28:57 PM	Helium valve closed
12/4/2012	3:28:57 PM	H2 valve closed
12/4/2012	3:28:57 PM	BCl3 valve closed
12/4/2012	3:28:57 PM	PH3 valve closed
12/4/2012	3:28:57 PM	SiCl4 pre valve closed
12/4/2012	3:28:57 PM	SiCl4 post valve closed
12/4/2012	3:28:57 PM	Main Vac valve closed
12/4/2012	3:28:57 PM	Bubbler valve closed
12/4/2012	3:28:57 PM	Bypass valve opened
12/4/2012	3:28:57 PM	Helium MFC set to  0.000000
12/4/2012	3:28:57 PM	H2 MFC set to  0.000000
12/4/2012	3:28:58 PM	BCl3 MFC set to  0.000000
12/4/2012	3:28:58 PM	PH3 MFC set to  0.000000
12/4/2012	3:28:58 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:28:58 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:28:58 PM	Tube furnace set to 0
12/4/2012	3:30:18 PM	Helium valve closed
12/4/2012	3:30:18 PM	H2 valve closed
12/4/2012	3:30:18 PM	BCl3 valve closed
12/4/2012	3:30:18 PM	PH3 valve closed
12/4/2012	3:30:18 PM	SiCl4 pre valve closed
12/4/2012	3:30:18 PM	SiCl4 post valve closed
12/4/2012	3:30:18 PM	Main Vac valve closed
12/4/2012	3:30:18 PM	Bubbler valve closed
12/4/2012	3:30:18 PM	Bypass valve opened
12/4/2012	3:30:18 PM	Helium MFC set to  0.000000
12/4/2012	3:30:18 PM	H2 MFC set to  0.000000
12/4/2012	3:30:18 PM	BCl3 MFC set to  0.000000
12/4/2012	3:30:18 PM	PH3 MFC set to  0.000000
12/4/2012	3:30:18 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:30:18 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:30:18 PM	Tube furnace set to 0
12/4/2012	3:31:18 PM	Helium valve closed
12/4/2012	3:31:18 PM	H2 valve closed
12/4/2012	3:31:18 PM	BCl3 valve closed
12/4/2012	3:31:18 PM	PH3 valve closed
12/4/2012	3:31:18 PM	SiCl4 pre valve closed
12/4/2012	3:31:18 PM	SiCl4 post valve closed
12/4/2012	3:31:18 PM	Bypass valve closed
12/4/2012	3:31:19 PM	Bubbler valve closed
12/4/2012	3:31:19 PM	Main Vac valve opened
12/4/2012	3:31:19 PM	Helium MFC set to  0.000000
12/4/2012	3:31:19 PM	H2 MFC set to  0.000000
12/4/2012	3:31:19 PM	BCl3 MFC set to  0.000000
12/4/2012	3:31:19 PM	PH3 MFC set to  0.000000
12/4/2012	3:31:19 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:31:19 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:31:19 PM	Tube furnace set to 0
12/4/2012	3:31:20 PM	Run finished at 3:31 PM
12/4/2012	3:31:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	3:38:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	3:38:15 PM	Recipe started at 3:38 PM
12/4/2012	3:38:15 PM	Helium valve closed
12/4/2012	3:38:15 PM	H2 valve closed
12/4/2012	3:38:15 PM	BCl3 valve closed
12/4/2012	3:38:16 PM	PH3 valve closed
12/4/2012	3:38:16 PM	SiCl4 pre valve closed
12/4/2012	3:38:16 PM	SiCl4 post valve closed
12/4/2012	3:38:16 PM	Main Vac valve closed
12/4/2012	3:38:16 PM	Bubbler valve closed
12/4/2012	3:38:16 PM	Bypass valve opened
12/4/2012	3:38:16 PM	Helium MFC set to  0.000000
12/4/2012	3:38:16 PM	H2 MFC set to  0.000000
12/4/2012	3:38:16 PM	BCl3 MFC set to  0.000000
12/4/2012	3:38:16 PM	PH3 MFC set to  0.000000
12/4/2012	3:38:16 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:38:16 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:38:16 PM	Tube furnace set to 0
12/4/2012	3:38:16 PM	Helium valve closed
12/4/2012	3:38:16 PM	H2 valve closed
12/4/2012	3:38:16 PM	BCl3 valve closed
12/4/2012	3:38:16 PM	PH3 valve closed
12/4/2012	3:38:16 PM	SiCl4 pre valve closed
12/4/2012	3:38:16 PM	SiCl4 post valve closed
12/4/2012	3:38:16 PM	Main Vac valve closed
12/4/2012	3:38:16 PM	Bubbler valve closed
12/4/2012	3:38:16 PM	Bypass valve opened
12/4/2012	3:38:16 PM	Helium MFC set to  0.000000
12/4/2012	3:38:16 PM	H2 MFC set to  0.000000
12/4/2012	3:38:16 PM	BCl3 MFC set to  0.000000
12/4/2012	3:38:16 PM	PH3 MFC set to  0.000000
12/4/2012	3:38:16 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:38:16 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:38:16 PM	Tube furnace set to 0
12/4/2012	3:38:17 PM	Helium valve closed
12/4/2012	3:38:17 PM	H2 valve closed
12/4/2012	3:38:17 PM	BCl3 valve closed
12/4/2012	3:38:17 PM	PH3 valve closed
12/4/2012	3:38:17 PM	SiCl4 pre valve closed
12/4/2012	3:38:17 PM	SiCl4 post valve closed
12/4/2012	3:38:17 PM	Bypass valve closed
12/4/2012	3:38:17 PM	Bubbler valve closed
12/4/2012	3:38:17 PM	Main Vac valve opened
12/4/2012	3:38:17 PM	Helium MFC set to  0.000000
12/4/2012	3:38:17 PM	H2 MFC set to  0.000000
12/4/2012	3:38:17 PM	BCl3 MFC set to  0.000000
12/4/2012	3:38:17 PM	PH3 MFC set to  0.000000
12/4/2012	3:38:17 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:38:17 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:38:17 PM	Tube furnace set to 0
12/4/2012	3:38:47 PM	H2 valve closed
12/4/2012	3:38:47 PM	BCl3 valve closed
12/4/2012	3:38:47 PM	PH3 valve closed
12/4/2012	3:38:47 PM	SiCl4 pre valve closed
12/4/2012	3:38:47 PM	SiCl4 post valve closed
12/4/2012	3:38:47 PM	Bypass valve closed
12/4/2012	3:38:47 PM	Bubbler valve closed
12/4/2012	3:38:47 PM	Helium valve opened
12/4/2012	3:38:47 PM	Main Vac valve opened
12/4/2012	3:38:47 PM	Helium MFC set to  20.000000
12/4/2012	3:38:47 PM	H2 MFC set to  0.000000
12/4/2012	3:38:47 PM	BCl3 MFC set to  0.000000
12/4/2012	3:38:47 PM	PH3 MFC set to  0.000000
12/4/2012	3:38:47 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:38:47 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:38:47 PM	Tube furnace set to 0
12/4/2012	3:39:17 PM	Helium valve closed
12/4/2012	3:39:17 PM	H2 valve closed
12/4/2012	3:39:17 PM	BCl3 valve closed
12/4/2012	3:39:17 PM	PH3 valve closed
12/4/2012	3:39:17 PM	SiCl4 pre valve closed
12/4/2012	3:39:17 PM	SiCl4 post valve closed
12/4/2012	3:39:17 PM	Bypass valve closed
12/4/2012	3:39:17 PM	Bubbler valve closed
12/4/2012	3:39:17 PM	Main Vac valve opened
12/4/2012	3:39:17 PM	Helium MFC set to  0.000000
12/4/2012	3:39:17 PM	H2 MFC set to  0.000000
12/4/2012	3:39:17 PM	BCl3 MFC set to  0.000000
12/4/2012	3:39:17 PM	PH3 MFC set to  0.000000
12/4/2012	3:39:17 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:39:17 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:39:17 PM	Tube furnace set to 0
12/4/2012	3:39:47 PM	H2 valve closed
12/4/2012	3:39:47 PM	BCl3 valve closed
12/4/2012	3:39:47 PM	PH3 valve closed
12/4/2012	3:39:47 PM	SiCl4 pre valve closed
12/4/2012	3:39:47 PM	SiCl4 post valve closed
12/4/2012	3:39:47 PM	Bypass valve closed
12/4/2012	3:39:47 PM	Bubbler valve closed
12/4/2012	3:39:47 PM	Helium valve opened
12/4/2012	3:39:47 PM	Main Vac valve opened
12/4/2012	3:39:47 PM	Helium MFC set to  20.000000
12/4/2012	3:39:47 PM	H2 MFC set to  0.000000
12/4/2012	3:39:47 PM	BCl3 MFC set to  0.000000
12/4/2012	3:39:47 PM	PH3 MFC set to  0.000000
12/4/2012	3:39:47 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:39:47 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:39:48 PM	Tube furnace set to 0
12/4/2012	3:40:18 PM	Helium valve closed
12/4/2012	3:40:18 PM	H2 valve closed
12/4/2012	3:40:18 PM	BCl3 valve closed
12/4/2012	3:40:18 PM	PH3 valve closed
12/4/2012	3:40:18 PM	SiCl4 pre valve closed
12/4/2012	3:40:18 PM	SiCl4 post valve closed
12/4/2012	3:40:18 PM	Bypass valve closed
12/4/2012	3:40:18 PM	Bubbler valve closed
12/4/2012	3:40:18 PM	Main Vac valve opened
12/4/2012	3:40:18 PM	Helium MFC set to  0.000000
12/4/2012	3:40:18 PM	H2 MFC set to  0.000000
12/4/2012	3:40:18 PM	BCl3 MFC set to  0.000000
12/4/2012	3:40:18 PM	PH3 MFC set to  0.000000
12/4/2012	3:40:18 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:40:18 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:40:18 PM	Tube furnace set to 0
12/4/2012	3:40:48 PM	H2 valve closed
12/4/2012	3:40:48 PM	BCl3 valve closed
12/4/2012	3:40:48 PM	PH3 valve closed
12/4/2012	3:40:48 PM	SiCl4 pre valve closed
12/4/2012	3:40:48 PM	SiCl4 post valve closed
12/4/2012	3:40:48 PM	Bypass valve closed
12/4/2012	3:40:48 PM	Bubbler valve closed
12/4/2012	3:40:48 PM	Helium valve opened
12/4/2012	3:40:48 PM	Main Vac valve opened
12/4/2012	3:40:48 PM	Helium MFC set to  20.000000
12/4/2012	3:40:48 PM	H2 MFC set to  0.000000
12/4/2012	3:40:48 PM	BCl3 MFC set to  0.000000
12/4/2012	3:40:48 PM	PH3 MFC set to  0.000000
12/4/2012	3:40:48 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:40:48 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:40:48 PM	Tube furnace set to 0
12/4/2012	3:41:18 PM	Helium valve closed
12/4/2012	3:41:18 PM	H2 valve closed
12/4/2012	3:41:18 PM	BCl3 valve closed
12/4/2012	3:41:18 PM	PH3 valve closed
12/4/2012	3:41:18 PM	SiCl4 pre valve closed
12/4/2012	3:41:18 PM	SiCl4 post valve closed
12/4/2012	3:41:18 PM	Bypass valve closed
12/4/2012	3:41:18 PM	Bubbler valve closed
12/4/2012	3:41:18 PM	Main Vac valve opened
12/4/2012	3:41:18 PM	Helium MFC set to  0.000000
12/4/2012	3:41:18 PM	H2 MFC set to  0.000000
12/4/2012	3:41:18 PM	BCl3 MFC set to  0.000000
12/4/2012	3:41:18 PM	PH3 MFC set to  0.000000
12/4/2012	3:41:18 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:41:18 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:41:18 PM	Tube furnace set to 0
12/4/2012	3:41:48 PM	H2 valve closed
12/4/2012	3:41:48 PM	BCl3 valve closed
12/4/2012	3:41:48 PM	PH3 valve closed
12/4/2012	3:41:48 PM	SiCl4 pre valve closed
12/4/2012	3:41:48 PM	SiCl4 post valve closed
12/4/2012	3:41:48 PM	Bypass valve closed
12/4/2012	3:41:48 PM	Bubbler valve closed
12/4/2012	3:41:48 PM	Helium valve opened
12/4/2012	3:41:48 PM	Main Vac valve opened
12/4/2012	3:41:48 PM	Helium MFC set to  20.000000
12/4/2012	3:41:48 PM	H2 MFC set to  0.000000
12/4/2012	3:41:48 PM	BCl3 MFC set to  0.000000
12/4/2012	3:41:48 PM	PH3 MFC set to  0.000000
12/4/2012	3:41:48 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:41:48 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:41:49 PM	Tube furnace set to 0
12/4/2012	3:42:19 PM	Helium valve closed
12/4/2012	3:42:19 PM	H2 valve closed
12/4/2012	3:42:19 PM	BCl3 valve closed
12/4/2012	3:42:19 PM	PH3 valve closed
12/4/2012	3:42:19 PM	SiCl4 pre valve closed
12/4/2012	3:42:19 PM	SiCl4 post valve closed
12/4/2012	3:42:19 PM	Bypass valve closed
12/4/2012	3:42:19 PM	Bubbler valve closed
12/4/2012	3:42:19 PM	Main Vac valve opened
12/4/2012	3:42:19 PM	Helium MFC set to  0.000000
12/4/2012	3:42:19 PM	H2 MFC set to  0.000000
12/4/2012	3:42:19 PM	BCl3 MFC set to  0.000000
12/4/2012	3:42:19 PM	PH3 MFC set to  0.000000
12/4/2012	3:42:19 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:42:19 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:42:19 PM	Tube furnace set to 0
12/4/2012	3:42:49 PM	H2 valve closed
12/4/2012	3:42:49 PM	BCl3 valve closed
12/4/2012	3:42:49 PM	PH3 valve closed
12/4/2012	3:42:49 PM	SiCl4 pre valve closed
12/4/2012	3:42:49 PM	SiCl4 post valve closed
12/4/2012	3:42:49 PM	Bypass valve closed
12/4/2012	3:42:49 PM	Bubbler valve closed
12/4/2012	3:42:49 PM	Helium valve opened
12/4/2012	3:42:49 PM	Main Vac valve opened
12/4/2012	3:42:49 PM	Helium MFC set to  20.000000
12/4/2012	3:42:49 PM	H2 MFC set to  0.000000
12/4/2012	3:42:49 PM	BCl3 MFC set to  0.000000
12/4/2012	3:42:49 PM	PH3 MFC set to  0.000000
12/4/2012	3:42:49 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:42:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:42:49 PM	Tube furnace set to 0
12/4/2012	3:43:19 PM	Helium valve closed
12/4/2012	3:43:19 PM	H2 valve closed
12/4/2012	3:43:19 PM	BCl3 valve closed
12/4/2012	3:43:19 PM	PH3 valve closed
12/4/2012	3:43:19 PM	SiCl4 pre valve closed
12/4/2012	3:43:19 PM	SiCl4 post valve closed
12/4/2012	3:43:19 PM	Bypass valve closed
12/4/2012	3:43:19 PM	Bubbler valve closed
12/4/2012	3:43:19 PM	Main Vac valve opened
12/4/2012	3:43:19 PM	Helium MFC set to  0.000000
12/4/2012	3:43:19 PM	H2 MFC set to  0.000000
12/4/2012	3:43:19 PM	BCl3 MFC set to  0.000000
12/4/2012	3:43:19 PM	PH3 MFC set to  0.000000
12/4/2012	3:43:19 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:43:19 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:43:19 PM	Tube furnace set to 0
12/4/2012	3:43:49 PM	H2 valve closed
12/4/2012	3:43:49 PM	BCl3 valve closed
12/4/2012	3:43:49 PM	PH3 valve closed
12/4/2012	3:43:49 PM	SiCl4 pre valve closed
12/4/2012	3:43:49 PM	SiCl4 post valve closed
12/4/2012	3:43:49 PM	Bypass valve closed
12/4/2012	3:43:49 PM	Bubbler valve closed
12/4/2012	3:43:49 PM	Helium valve opened
12/4/2012	3:43:49 PM	Main Vac valve opened
12/4/2012	3:43:49 PM	Helium MFC set to  20.000000
12/4/2012	3:43:49 PM	H2 MFC set to  0.000000
12/4/2012	3:43:49 PM	BCl3 MFC set to  0.000000
12/4/2012	3:43:49 PM	PH3 MFC set to  0.000000
12/4/2012	3:43:49 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:43:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:43:50 PM	Tube furnace set to 0
12/4/2012	3:44:20 PM	Helium valve closed
12/4/2012	3:44:20 PM	H2 valve closed
12/4/2012	3:44:20 PM	BCl3 valve closed
12/4/2012	3:44:20 PM	PH3 valve closed
12/4/2012	3:44:20 PM	SiCl4 pre valve closed
12/4/2012	3:44:20 PM	SiCl4 post valve closed
12/4/2012	3:44:20 PM	Bypass valve closed
12/4/2012	3:44:20 PM	Bubbler valve closed
12/4/2012	3:44:20 PM	Main Vac valve opened
12/4/2012	3:44:20 PM	Helium MFC set to  0.000000
12/4/2012	3:44:20 PM	H2 MFC set to  0.000000
12/4/2012	3:44:20 PM	BCl3 MFC set to  0.000000
12/4/2012	3:44:20 PM	PH3 MFC set to  0.000000
12/4/2012	3:44:20 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:44:20 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:44:20 PM	Tube furnace set to 0
12/4/2012	3:44:50 PM	H2 valve closed
12/4/2012	3:44:50 PM	BCl3 valve closed
12/4/2012	3:44:50 PM	PH3 valve closed
12/4/2012	3:44:50 PM	SiCl4 pre valve closed
12/4/2012	3:44:50 PM	SiCl4 post valve closed
12/4/2012	3:44:50 PM	Bypass valve closed
12/4/2012	3:44:50 PM	Bubbler valve closed
12/4/2012	3:44:50 PM	Helium valve opened
12/4/2012	3:44:50 PM	Main Vac valve opened
12/4/2012	3:44:50 PM	Helium MFC set to  20.000000
12/4/2012	3:44:50 PM	H2 MFC set to  0.000000
12/4/2012	3:44:50 PM	BCl3 MFC set to  0.000000
12/4/2012	3:44:50 PM	PH3 MFC set to  0.000000
12/4/2012	3:44:50 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:44:50 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:44:50 PM	Tube furnace set to 0
12/4/2012	3:45:20 PM	Helium valve closed
12/4/2012	3:45:20 PM	H2 valve closed
12/4/2012	3:45:20 PM	BCl3 valve closed
12/4/2012	3:45:20 PM	PH3 valve closed
12/4/2012	3:45:20 PM	SiCl4 pre valve closed
12/4/2012	3:45:20 PM	SiCl4 post valve closed
12/4/2012	3:45:20 PM	Bypass valve closed
12/4/2012	3:45:20 PM	Bubbler valve closed
12/4/2012	3:45:20 PM	Main Vac valve opened
12/4/2012	3:45:20 PM	Helium MFC set to  0.000000
12/4/2012	3:45:20 PM	H2 MFC set to  0.000000
12/4/2012	3:45:20 PM	BCl3 MFC set to  0.000000
12/4/2012	3:45:20 PM	PH3 MFC set to  0.000000
12/4/2012	3:45:20 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:45:20 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:45:20 PM	Tube furnace set to 0
12/4/2012	3:45:50 PM	H2 valve closed
12/4/2012	3:45:50 PM	BCl3 valve closed
12/4/2012	3:45:50 PM	PH3 valve closed
12/4/2012	3:45:50 PM	SiCl4 pre valve closed
12/4/2012	3:45:50 PM	SiCl4 post valve closed
12/4/2012	3:45:50 PM	Bypass valve closed
12/4/2012	3:45:50 PM	Bubbler valve closed
12/4/2012	3:45:50 PM	Helium valve opened
12/4/2012	3:45:50 PM	Main Vac valve opened
12/4/2012	3:45:50 PM	Helium MFC set to  20.000000
12/4/2012	3:45:50 PM	H2 MFC set to  0.000000
12/4/2012	3:45:50 PM	BCl3 MFC set to  0.000000
12/4/2012	3:45:50 PM	PH3 MFC set to  0.000000
12/4/2012	3:45:51 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:45:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:45:51 PM	Tube furnace set to 0
12/4/2012	3:46:21 PM	Helium valve closed
12/4/2012	3:46:21 PM	H2 valve closed
12/4/2012	3:46:21 PM	BCl3 valve closed
12/4/2012	3:46:21 PM	PH3 valve closed
12/4/2012	3:46:21 PM	SiCl4 pre valve closed
12/4/2012	3:46:21 PM	SiCl4 post valve closed
12/4/2012	3:46:21 PM	Bypass valve closed
12/4/2012	3:46:21 PM	Bubbler valve closed
12/4/2012	3:46:21 PM	Main Vac valve opened
12/4/2012	3:46:21 PM	Helium MFC set to  0.000000
12/4/2012	3:46:21 PM	H2 MFC set to  0.000000
12/4/2012	3:46:21 PM	BCl3 MFC set to  0.000000
12/4/2012	3:46:21 PM	PH3 MFC set to  0.000000
12/4/2012	3:46:21 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:46:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:46:21 PM	Tube furnace set to 0
12/4/2012	3:46:51 PM	H2 valve closed
12/4/2012	3:46:51 PM	BCl3 valve closed
12/4/2012	3:46:51 PM	PH3 valve closed
12/4/2012	3:46:51 PM	SiCl4 pre valve closed
12/4/2012	3:46:51 PM	SiCl4 post valve closed
12/4/2012	3:46:51 PM	Bypass valve closed
12/4/2012	3:46:51 PM	Bubbler valve closed
12/4/2012	3:46:51 PM	Helium valve opened
12/4/2012	3:46:51 PM	Main Vac valve opened
12/4/2012	3:46:51 PM	Helium MFC set to  20.000000
12/4/2012	3:46:51 PM	H2 MFC set to  0.000000
12/4/2012	3:46:51 PM	BCl3 MFC set to  0.000000
12/4/2012	3:46:51 PM	PH3 MFC set to  0.000000
12/4/2012	3:46:51 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:46:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:46:51 PM	Tube furnace set to 0
12/4/2012	3:47:21 PM	Helium valve closed
12/4/2012	3:47:21 PM	H2 valve closed
12/4/2012	3:47:21 PM	BCl3 valve closed
12/4/2012	3:47:21 PM	PH3 valve closed
12/4/2012	3:47:21 PM	SiCl4 pre valve closed
12/4/2012	3:47:21 PM	SiCl4 post valve closed
12/4/2012	3:47:21 PM	Bypass valve closed
12/4/2012	3:47:21 PM	Bubbler valve closed
12/4/2012	3:47:21 PM	Main Vac valve opened
12/4/2012	3:47:21 PM	Helium MFC set to  0.000000
12/4/2012	3:47:21 PM	H2 MFC set to  0.000000
12/4/2012	3:47:21 PM	BCl3 MFC set to  0.000000
12/4/2012	3:47:21 PM	PH3 MFC set to  0.000000
12/4/2012	3:47:21 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:47:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:47:21 PM	Tube furnace set to 0
12/4/2012	3:47:51 PM	H2 valve closed
12/4/2012	3:47:51 PM	BCl3 valve closed
12/4/2012	3:47:51 PM	PH3 valve closed
12/4/2012	3:47:51 PM	SiCl4 pre valve closed
12/4/2012	3:47:51 PM	SiCl4 post valve closed
12/4/2012	3:47:51 PM	Bypass valve closed
12/4/2012	3:47:51 PM	Bubbler valve closed
12/4/2012	3:47:51 PM	Helium valve opened
12/4/2012	3:47:51 PM	Main Vac valve opened
12/4/2012	3:47:51 PM	Helium MFC set to  20.000000
12/4/2012	3:47:51 PM	H2 MFC set to  0.000000
12/4/2012	3:47:51 PM	BCl3 MFC set to  0.000000
12/4/2012	3:47:52 PM	PH3 MFC set to  0.000000
12/4/2012	3:47:52 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:47:52 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:47:52 PM	Tube furnace set to 0
12/4/2012	3:48:22 PM	Helium valve closed
12/4/2012	3:48:22 PM	H2 valve closed
12/4/2012	3:48:22 PM	BCl3 valve closed
12/4/2012	3:48:22 PM	PH3 valve closed
12/4/2012	3:48:22 PM	SiCl4 pre valve closed
12/4/2012	3:48:22 PM	SiCl4 post valve closed
12/4/2012	3:48:22 PM	Bypass valve closed
12/4/2012	3:48:22 PM	Bubbler valve closed
12/4/2012	3:48:22 PM	Main Vac valve opened
12/4/2012	3:48:22 PM	Helium MFC set to  0.000000
12/4/2012	3:48:22 PM	H2 MFC set to  0.000000
12/4/2012	3:48:22 PM	BCl3 MFC set to  0.000000
12/4/2012	3:48:22 PM	PH3 MFC set to  0.000000
12/4/2012	3:48:22 PM	SiCl4 MFC set to  0.000000
12/4/2012	3:48:22 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	3:48:22 PM	Tube furnace set to 0
12/4/2012	3:48:23 PM	Run finished at 3:48 PM
12/4/2012	3:48:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	4:03:00 PM	Main Vac valve closed
12/4/2012	4:03:14 PM	Main Vac valve opened
12/4/2012	4:19:11 PM	Main Vac valve closed
12/4/2012	4:19:24 PM	Main Vac valve opened
12/4/2012	4:20:04 PM	Recipe started at 4:20 PM
12/4/2012	4:20:04 PM	Helium valve closed
12/4/2012	4:20:04 PM	H2 valve closed
12/4/2012	4:20:04 PM	BCl3 valve closed
12/4/2012	4:20:04 PM	PH3 valve closed
12/4/2012	4:20:04 PM	SiCl4 pre valve closed
12/4/2012	4:20:04 PM	SiCl4 post valve closed
12/4/2012	4:20:04 PM	Main Vac valve closed
12/4/2012	4:20:04 PM	Bypass valve closed
12/4/2012	4:20:04 PM	Bubbler valve closed
12/4/2012	4:20:04 PM	Helium MFC set to  0.000000
12/4/2012	4:20:04 PM	H2 MFC set to  0.000000
12/4/2012	4:20:04 PM	BCl3 MFC set to  0.000000
12/4/2012	4:20:04 PM	PH3 MFC set to  0.000000
12/4/2012	4:20:04 PM	SiCl4 MFC set to  0.000000
12/4/2012	4:20:04 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	4:20:04 PM	Tube furnace set to 0
12/4/2012	4:20:07 PM	Helium valve closed
12/4/2012	4:20:07 PM	BCl3 valve closed
12/4/2012	4:20:07 PM	PH3 valve closed
12/4/2012	4:20:07 PM	SiCl4 pre valve closed
12/4/2012	4:20:07 PM	SiCl4 post valve closed
12/4/2012	4:20:07 PM	Main Vac valve closed
12/4/2012	4:20:07 PM	Bypass valve closed
12/4/2012	4:20:07 PM	Bubbler valve closed
12/4/2012	4:20:07 PM	H2 valve opened
12/4/2012	4:20:07 PM	Helium MFC set to  0.000000
12/4/2012	4:20:07 PM	H2 MFC set to  500.000000
12/4/2012	4:20:07 PM	BCl3 MFC set to  0.000000
12/4/2012	4:20:07 PM	PH3 MFC set to  0.000000
12/4/2012	4:20:07 PM	SiCl4 MFC set to  0.000000
12/4/2012	4:20:07 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	4:20:07 PM	Tube furnace set to 0
12/4/2012	4:21:20 PM	Helium valve closed
12/4/2012	4:21:20 PM	BCl3 valve closed
12/4/2012	4:21:20 PM	PH3 valve closed
12/4/2012	4:21:20 PM	SiCl4 pre valve closed
12/4/2012	4:21:20 PM	SiCl4 post valve closed
12/4/2012	4:21:20 PM	Main Vac valve closed
12/4/2012	4:21:20 PM	Bypass valve closed
12/4/2012	4:21:20 PM	H2 valve opened
12/4/2012	4:21:20 PM	Bubbler valve opened
12/4/2012	4:21:20 PM	Helium MFC set to  0.000000
12/4/2012	4:21:20 PM	H2 MFC set to  500.000000
12/4/2012	4:21:20 PM	BCl3 MFC set to  0.000000
12/4/2012	4:21:20 PM	PH3 MFC set to  0.000000
12/4/2012	4:21:20 PM	SiCl4 MFC set to  0.000000
12/4/2012	4:21:20 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	4:21:20 PM	Tube furnace set to 0
12/4/2012	4:21:21 PM	Helium valve closed
12/4/2012	4:21:21 PM	BCl3 valve closed
12/4/2012	4:21:21 PM	PH3 valve closed
12/4/2012	4:21:21 PM	SiCl4 pre valve closed
12/4/2012	4:21:21 PM	SiCl4 post valve closed
12/4/2012	4:21:21 PM	Main Vac valve closed
12/4/2012	4:21:21 PM	Bypass valve closed
12/4/2012	4:21:21 PM	H2 valve opened
12/4/2012	4:21:21 PM	Bubbler valve opened
12/4/2012	4:21:21 PM	Helium MFC set to  0.000000
12/4/2012	4:21:21 PM	H2 MFC set to  500.000000
12/4/2012	4:21:21 PM	BCl3 MFC set to  0.000000
12/4/2012	4:21:21 PM	PH3 MFC set to  0.000000
12/4/2012	4:21:21 PM	SiCl4 MFC set to  0.000000
12/4/2012	4:21:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	4:21:21 PM	Tube furnace set to 1000
12/4/2012	4:51:21 PM	Helium valve closed
12/4/2012	4:51:21 PM	PH3 valve closed
12/4/2012	4:51:21 PM	Main Vac valve closed
12/4/2012	4:51:21 PM	Bypass valve closed
12/4/2012	4:51:21 PM	H2 valve opened
12/4/2012	4:51:21 PM	BCl3 valve opened
12/4/2012	4:51:21 PM	SiCl4 pre valve opened
12/4/2012	4:51:21 PM	SiCl4 post valve opened
12/4/2012	4:51:21 PM	Bubbler valve opened
12/4/2012	4:51:21 PM	Helium MFC set to  0.000000
12/4/2012	4:51:21 PM	H2 MFC set to  500.000000
12/4/2012	4:51:21 PM	BCl3 MFC set to  1.000000
12/4/2012	4:51:21 PM	PH3 MFC set to  0.000000
12/4/2012	4:51:21 PM	SiCl4 MFC set to  50.000000
12/4/2012	4:51:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	4:51:21 PM	Tube furnace set to 1000
12/4/2012	5:00:21 PM	Helium valve closed
12/4/2012	5:00:21 PM	BCl3 valve closed
12/4/2012	5:00:21 PM	PH3 valve closed
12/4/2012	5:00:21 PM	SiCl4 pre valve closed
12/4/2012	5:00:21 PM	SiCl4 post valve closed
12/4/2012	5:00:21 PM	Main Vac valve closed
12/4/2012	5:00:22 PM	Bypass valve closed
12/4/2012	5:00:22 PM	H2 valve opened
12/4/2012	5:00:22 PM	Bubbler valve opened
12/4/2012	5:00:22 PM	Helium MFC set to  0.000000
12/4/2012	5:00:22 PM	H2 MFC set to  500.000000
12/4/2012	5:00:22 PM	BCl3 MFC set to  0.000000
12/4/2012	5:00:22 PM	PH3 MFC set to  0.000000
12/4/2012	5:00:22 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:00:22 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:00:22 PM	Tube furnace set to 750
12/4/2012	5:05:22 PM	H2 valve closed
12/4/2012	5:05:22 PM	BCl3 valve closed
12/4/2012	5:05:22 PM	PH3 valve closed
12/4/2012	5:05:22 PM	SiCl4 pre valve closed
12/4/2012	5:05:22 PM	SiCl4 post valve closed
12/4/2012	5:05:22 PM	Main Vac valve closed
12/4/2012	5:05:22 PM	Bypass valve closed
12/4/2012	5:05:22 PM	Helium valve opened
12/4/2012	5:05:22 PM	Bubbler valve opened
12/4/2012	5:05:22 PM	Helium MFC set to  500.000000
12/4/2012	5:05:22 PM	H2 MFC set to  0.000000
12/4/2012	5:05:22 PM	BCl3 MFC set to  0.000000
12/4/2012	5:05:22 PM	PH3 MFC set to  0.000000
12/4/2012	5:05:22 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:05:22 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:05:22 PM	Tube furnace set to 0
12/4/2012	5:14:09 PM	Helium valve closed
12/4/2012	5:14:09 PM	H2 valve closed
12/4/2012	5:14:09 PM	BCl3 valve closed
12/4/2012	5:14:09 PM	PH3 valve closed
12/4/2012	5:14:09 PM	SiCl4 pre valve closed
12/4/2012	5:14:09 PM	SiCl4 post valve closed
12/4/2012	5:14:09 PM	Main Vac valve closed
12/4/2012	5:14:09 PM	Bypass valve closed
12/4/2012	5:14:09 PM	Bubbler valve closed
12/4/2012	5:14:09 PM	Helium MFC set to  0.000000
12/4/2012	5:14:09 PM	H2 MFC set to  0.000000
12/4/2012	5:14:09 PM	BCl3 MFC set to  0.000000
12/4/2012	5:14:09 PM	PH3 MFC set to  0.000000
12/4/2012	5:14:09 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:14:09 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:14:09 PM	Tube furnace set to 0
12/4/2012	5:14:10 PM	Run finished at 5:14 PM
12/4/2012	5:18:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	5:18:30 PM	Recipe started at 5:18 PM
12/4/2012	5:18:30 PM	Helium valve closed
12/4/2012	5:18:30 PM	H2 valve closed
12/4/2012	5:18:30 PM	BCl3 valve closed
12/4/2012	5:18:30 PM	PH3 valve closed
12/4/2012	5:18:30 PM	SiCl4 pre valve closed
12/4/2012	5:18:30 PM	SiCl4 post valve closed
12/4/2012	5:18:30 PM	Main Vac valve closed
12/4/2012	5:18:30 PM	Bubbler valve closed
12/4/2012	5:18:30 PM	Bypass valve opened
12/4/2012	5:18:30 PM	Helium MFC set to  0.000000
12/4/2012	5:18:30 PM	H2 MFC set to  0.000000
12/4/2012	5:18:30 PM	BCl3 MFC set to  0.000000
12/4/2012	5:18:30 PM	PH3 MFC set to  0.000000
12/4/2012	5:18:30 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:18:30 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:18:30 PM	Tube furnace set to 0
12/4/2012	5:19:15 PM	Run aborted at 5:19 PM
12/4/2012	5:19:15 PM	Helium valve closed
12/4/2012	5:19:15 PM	H2 valve closed
12/4/2012	5:19:15 PM	BCl3 valve closed
12/4/2012	5:19:15 PM	PH3 valve closed
12/4/2012	5:19:15 PM	SiCl4 pre valve closed
12/4/2012	5:19:15 PM	SiCl4 post valve closed
12/4/2012	5:19:15 PM	Bypass valve closed
12/4/2012	5:19:15 PM	Main Vac valve closed
12/4/2012	5:19:15 PM	Bubbler valve closed
12/4/2012	5:19:15 PM	Helium MFC set to  0.000000
12/4/2012	5:19:15 PM	H2 MFC set to  0.000000
12/4/2012	5:19:15 PM	BCl3 MFC set to  0.000000
12/4/2012	5:19:16 PM	PH3 MFC set to  0.000000
12/4/2012	5:19:16 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:19:16 PM	Tube furnace set to 0
12/4/2012	5:19:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	5:19:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	5:19:43 PM	Recipe started at 5:19 PM
12/4/2012	5:19:43 PM	Helium valve closed
12/4/2012	5:19:43 PM	H2 valve closed
12/4/2012	5:19:43 PM	BCl3 valve closed
12/4/2012	5:19:43 PM	PH3 valve closed
12/4/2012	5:19:43 PM	SiCl4 pre valve closed
12/4/2012	5:19:43 PM	SiCl4 post valve closed
12/4/2012	5:19:43 PM	Main Vac valve closed
12/4/2012	5:19:43 PM	Bubbler valve closed
12/4/2012	5:19:43 PM	Bypass valve opened
12/4/2012	5:19:43 PM	Helium MFC set to  0.000000
12/4/2012	5:19:43 PM	H2 MFC set to  0.000000
12/4/2012	5:19:43 PM	BCl3 MFC set to  0.000000
12/4/2012	5:19:43 PM	PH3 MFC set to  0.000000
12/4/2012	5:19:43 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:19:43 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:19:43 PM	Tube furnace set to 0
12/4/2012	5:21:46 PM	Helium valve closed
12/4/2012	5:21:46 PM	H2 valve closed
12/4/2012	5:21:46 PM	BCl3 valve closed
12/4/2012	5:21:46 PM	PH3 valve closed
12/4/2012	5:21:46 PM	SiCl4 pre valve closed
12/4/2012	5:21:46 PM	SiCl4 post valve closed
12/4/2012	5:21:46 PM	Main Vac valve closed
12/4/2012	5:21:46 PM	Bubbler valve closed
12/4/2012	5:21:46 PM	Bypass valve opened
12/4/2012	5:21:46 PM	Helium MFC set to  0.000000
12/4/2012	5:21:46 PM	H2 MFC set to  0.000000
12/4/2012	5:21:46 PM	BCl3 MFC set to  0.000000
12/4/2012	5:21:46 PM	PH3 MFC set to  0.000000
12/4/2012	5:21:46 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:21:46 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:21:46 PM	Tube furnace set to 0
12/4/2012	5:21:51 PM	Helium valve closed
12/4/2012	5:21:51 PM	H2 valve closed
12/4/2012	5:21:51 PM	BCl3 valve closed
12/4/2012	5:21:51 PM	PH3 valve closed
12/4/2012	5:21:51 PM	SiCl4 pre valve closed
12/4/2012	5:21:51 PM	SiCl4 post valve closed
12/4/2012	5:21:51 PM	Bypass valve closed
12/4/2012	5:21:51 PM	Bubbler valve closed
12/4/2012	5:21:51 PM	Main Vac valve opened
12/4/2012	5:21:51 PM	Helium MFC set to  0.000000
12/4/2012	5:21:51 PM	H2 MFC set to  0.000000
12/4/2012	5:21:51 PM	BCl3 MFC set to  0.000000
12/4/2012	5:21:51 PM	PH3 MFC set to  0.000000
12/4/2012	5:21:51 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:21:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:21:51 PM	Tube furnace set to 0
12/4/2012	5:21:52 PM	Run finished at 5:21 PM
12/4/2012	5:21:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	5:22:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	5:22:31 PM	Recipe started at 5:22 PM
12/4/2012	5:22:31 PM	Helium valve closed
12/4/2012	5:22:31 PM	H2 valve closed
12/4/2012	5:22:31 PM	BCl3 valve closed
12/4/2012	5:22:31 PM	PH3 valve closed
12/4/2012	5:22:31 PM	SiCl4 pre valve closed
12/4/2012	5:22:31 PM	SiCl4 post valve closed
12/4/2012	5:22:31 PM	Main Vac valve closed
12/4/2012	5:22:31 PM	Bubbler valve closed
12/4/2012	5:22:31 PM	Bypass valve opened
12/4/2012	5:22:31 PM	Helium MFC set to  0.000000
12/4/2012	5:22:31 PM	H2 MFC set to  0.000000
12/4/2012	5:22:31 PM	BCl3 MFC set to  0.000000
12/4/2012	5:22:31 PM	PH3 MFC set to  0.000000
12/4/2012	5:22:31 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:22:31 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:22:31 PM	Tube furnace set to 0
12/4/2012	5:22:31 PM	Helium valve closed
12/4/2012	5:22:31 PM	H2 valve closed
12/4/2012	5:22:31 PM	BCl3 valve closed
12/4/2012	5:22:31 PM	PH3 valve closed
12/4/2012	5:22:31 PM	SiCl4 pre valve closed
12/4/2012	5:22:31 PM	SiCl4 post valve closed
12/4/2012	5:22:31 PM	Main Vac valve closed
12/4/2012	5:22:31 PM	Bubbler valve closed
12/4/2012	5:22:32 PM	Bypass valve opened
12/4/2012	5:22:32 PM	Helium MFC set to  0.000000
12/4/2012	5:22:32 PM	H2 MFC set to  0.000000
12/4/2012	5:22:32 PM	BCl3 MFC set to  0.000000
12/4/2012	5:22:32 PM	PH3 MFC set to  0.000000
12/4/2012	5:22:32 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:22:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:22:32 PM	Tube furnace set to 0
12/4/2012	5:22:32 PM	Helium valve closed
12/4/2012	5:22:32 PM	H2 valve closed
12/4/2012	5:22:32 PM	BCl3 valve closed
12/4/2012	5:22:32 PM	PH3 valve closed
12/4/2012	5:22:32 PM	SiCl4 pre valve closed
12/4/2012	5:22:32 PM	SiCl4 post valve closed
12/4/2012	5:22:32 PM	Bypass valve closed
12/4/2012	5:22:32 PM	Bubbler valve closed
12/4/2012	5:22:32 PM	Main Vac valve opened
12/4/2012	5:22:32 PM	Helium MFC set to  0.000000
12/4/2012	5:22:32 PM	H2 MFC set to  0.000000
12/4/2012	5:22:32 PM	BCl3 MFC set to  0.000000
12/4/2012	5:22:32 PM	PH3 MFC set to  0.000000
12/4/2012	5:22:32 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:22:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:22:32 PM	Tube furnace set to 0
12/4/2012	5:23:02 PM	H2 valve closed
12/4/2012	5:23:02 PM	BCl3 valve closed
12/4/2012	5:23:02 PM	PH3 valve closed
12/4/2012	5:23:02 PM	SiCl4 pre valve closed
12/4/2012	5:23:02 PM	SiCl4 post valve closed
12/4/2012	5:23:02 PM	Bypass valve closed
12/4/2012	5:23:02 PM	Bubbler valve closed
12/4/2012	5:23:02 PM	Helium valve opened
12/4/2012	5:23:02 PM	Main Vac valve opened
12/4/2012	5:23:02 PM	Helium MFC set to  20.000000
12/4/2012	5:23:02 PM	H2 MFC set to  0.000000
12/4/2012	5:23:02 PM	BCl3 MFC set to  0.000000
12/4/2012	5:23:02 PM	PH3 MFC set to  0.000000
12/4/2012	5:23:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:23:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:23:02 PM	Tube furnace set to 0
12/4/2012	5:23:32 PM	Helium valve closed
12/4/2012	5:23:32 PM	H2 valve closed
12/4/2012	5:23:32 PM	BCl3 valve closed
12/4/2012	5:23:32 PM	PH3 valve closed
12/4/2012	5:23:32 PM	SiCl4 pre valve closed
12/4/2012	5:23:32 PM	SiCl4 post valve closed
12/4/2012	5:23:33 PM	Bypass valve closed
12/4/2012	5:23:33 PM	Bubbler valve closed
12/4/2012	5:23:33 PM	Main Vac valve opened
12/4/2012	5:23:33 PM	Helium MFC set to  0.000000
12/4/2012	5:23:33 PM	H2 MFC set to  0.000000
12/4/2012	5:23:33 PM	BCl3 MFC set to  0.000000
12/4/2012	5:23:33 PM	PH3 MFC set to  0.000000
12/4/2012	5:23:33 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:23:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:23:33 PM	Tube furnace set to 0
12/4/2012	5:24:03 PM	H2 valve closed
12/4/2012	5:24:03 PM	BCl3 valve closed
12/4/2012	5:24:03 PM	PH3 valve closed
12/4/2012	5:24:03 PM	SiCl4 pre valve closed
12/4/2012	5:24:03 PM	SiCl4 post valve closed
12/4/2012	5:24:03 PM	Bypass valve closed
12/4/2012	5:24:03 PM	Bubbler valve closed
12/4/2012	5:24:03 PM	Helium valve opened
12/4/2012	5:24:03 PM	Main Vac valve opened
12/4/2012	5:24:03 PM	Helium MFC set to  20.000000
12/4/2012	5:24:03 PM	H2 MFC set to  0.000000
12/4/2012	5:24:03 PM	BCl3 MFC set to  0.000000
12/4/2012	5:24:03 PM	PH3 MFC set to  0.000000
12/4/2012	5:24:03 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:24:03 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:24:03 PM	Tube furnace set to 0
12/4/2012	5:24:33 PM	Helium valve closed
12/4/2012	5:24:33 PM	H2 valve closed
12/4/2012	5:24:33 PM	BCl3 valve closed
12/4/2012	5:24:33 PM	PH3 valve closed
12/4/2012	5:24:33 PM	SiCl4 pre valve closed
12/4/2012	5:24:33 PM	SiCl4 post valve closed
12/4/2012	5:24:33 PM	Bypass valve closed
12/4/2012	5:24:33 PM	Bubbler valve closed
12/4/2012	5:24:33 PM	Main Vac valve opened
12/4/2012	5:24:33 PM	Helium MFC set to  0.000000
12/4/2012	5:24:33 PM	H2 MFC set to  0.000000
12/4/2012	5:24:33 PM	BCl3 MFC set to  0.000000
12/4/2012	5:24:33 PM	PH3 MFC set to  0.000000
12/4/2012	5:24:33 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:24:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:24:33 PM	Tube furnace set to 0
12/4/2012	5:25:03 PM	H2 valve closed
12/4/2012	5:25:03 PM	BCl3 valve closed
12/4/2012	5:25:03 PM	PH3 valve closed
12/4/2012	5:25:03 PM	SiCl4 pre valve closed
12/4/2012	5:25:03 PM	SiCl4 post valve closed
12/4/2012	5:25:03 PM	Bypass valve closed
12/4/2012	5:25:03 PM	Bubbler valve closed
12/4/2012	5:25:03 PM	Helium valve opened
12/4/2012	5:25:03 PM	Main Vac valve opened
12/4/2012	5:25:03 PM	Helium MFC set to  20.000000
12/4/2012	5:25:03 PM	H2 MFC set to  0.000000
12/4/2012	5:25:03 PM	BCl3 MFC set to  0.000000
12/4/2012	5:25:03 PM	PH3 MFC set to  0.000000
12/4/2012	5:25:03 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:25:03 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:25:03 PM	Tube furnace set to 0
12/4/2012	5:25:33 PM	Helium valve closed
12/4/2012	5:25:33 PM	H2 valve closed
12/4/2012	5:25:33 PM	BCl3 valve closed
12/4/2012	5:25:33 PM	PH3 valve closed
12/4/2012	5:25:33 PM	SiCl4 pre valve closed
12/4/2012	5:25:34 PM	SiCl4 post valve closed
12/4/2012	5:25:34 PM	Bypass valve closed
12/4/2012	5:25:34 PM	Bubbler valve closed
12/4/2012	5:25:34 PM	Main Vac valve opened
12/4/2012	5:25:34 PM	Helium MFC set to  0.000000
12/4/2012	5:25:34 PM	H2 MFC set to  0.000000
12/4/2012	5:25:34 PM	BCl3 MFC set to  0.000000
12/4/2012	5:25:34 PM	PH3 MFC set to  0.000000
12/4/2012	5:25:34 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:25:34 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:25:34 PM	Tube furnace set to 0
12/4/2012	5:26:04 PM	H2 valve closed
12/4/2012	5:26:04 PM	BCl3 valve closed
12/4/2012	5:26:04 PM	PH3 valve closed
12/4/2012	5:26:04 PM	SiCl4 pre valve closed
12/4/2012	5:26:04 PM	SiCl4 post valve closed
12/4/2012	5:26:04 PM	Bypass valve closed
12/4/2012	5:26:04 PM	Bubbler valve closed
12/4/2012	5:26:04 PM	Helium valve opened
12/4/2012	5:26:04 PM	Main Vac valve opened
12/4/2012	5:26:04 PM	Helium MFC set to  20.000000
12/4/2012	5:26:04 PM	H2 MFC set to  0.000000
12/4/2012	5:26:04 PM	BCl3 MFC set to  0.000000
12/4/2012	5:26:04 PM	PH3 MFC set to  0.000000
12/4/2012	5:26:04 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:26:04 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:26:04 PM	Tube furnace set to 0
12/4/2012	5:26:34 PM	Helium valve closed
12/4/2012	5:26:34 PM	H2 valve closed
12/4/2012	5:26:34 PM	BCl3 valve closed
12/4/2012	5:26:34 PM	PH3 valve closed
12/4/2012	5:26:34 PM	SiCl4 pre valve closed
12/4/2012	5:26:34 PM	SiCl4 post valve closed
12/4/2012	5:26:34 PM	Bypass valve closed
12/4/2012	5:26:34 PM	Bubbler valve closed
12/4/2012	5:26:34 PM	Main Vac valve opened
12/4/2012	5:26:34 PM	Helium MFC set to  0.000000
12/4/2012	5:26:34 PM	H2 MFC set to  0.000000
12/4/2012	5:26:34 PM	BCl3 MFC set to  0.000000
12/4/2012	5:26:34 PM	PH3 MFC set to  0.000000
12/4/2012	5:26:34 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:26:34 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:26:34 PM	Tube furnace set to 0
12/4/2012	5:27:04 PM	H2 valve closed
12/4/2012	5:27:04 PM	BCl3 valve closed
12/4/2012	5:27:04 PM	PH3 valve closed
12/4/2012	5:27:04 PM	SiCl4 pre valve closed
12/4/2012	5:27:04 PM	SiCl4 post valve closed
12/4/2012	5:27:04 PM	Bypass valve closed
12/4/2012	5:27:04 PM	Bubbler valve closed
12/4/2012	5:27:04 PM	Helium valve opened
12/4/2012	5:27:04 PM	Main Vac valve opened
12/4/2012	5:27:04 PM	Helium MFC set to  20.000000
12/4/2012	5:27:04 PM	H2 MFC set to  0.000000
12/4/2012	5:27:04 PM	BCl3 MFC set to  0.000000
12/4/2012	5:27:04 PM	PH3 MFC set to  0.000000
12/4/2012	5:27:04 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:27:04 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:27:04 PM	Tube furnace set to 0
12/4/2012	5:27:34 PM	Helium valve closed
12/4/2012	5:27:35 PM	H2 valve closed
12/4/2012	5:27:35 PM	BCl3 valve closed
12/4/2012	5:27:35 PM	PH3 valve closed
12/4/2012	5:27:35 PM	SiCl4 pre valve closed
12/4/2012	5:27:35 PM	SiCl4 post valve closed
12/4/2012	5:27:35 PM	Bypass valve closed
12/4/2012	5:27:35 PM	Bubbler valve closed
12/4/2012	5:27:35 PM	Main Vac valve opened
12/4/2012	5:27:35 PM	Helium MFC set to  0.000000
12/4/2012	5:27:35 PM	H2 MFC set to  0.000000
12/4/2012	5:27:35 PM	BCl3 MFC set to  0.000000
12/4/2012	5:27:35 PM	PH3 MFC set to  0.000000
12/4/2012	5:27:35 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:27:35 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:27:35 PM	Tube furnace set to 0
12/4/2012	5:28:05 PM	H2 valve closed
12/4/2012	5:28:05 PM	BCl3 valve closed
12/4/2012	5:28:05 PM	PH3 valve closed
12/4/2012	5:28:05 PM	SiCl4 pre valve closed
12/4/2012	5:28:05 PM	SiCl4 post valve closed
12/4/2012	5:28:05 PM	Bypass valve closed
12/4/2012	5:28:05 PM	Bubbler valve closed
12/4/2012	5:28:05 PM	Helium valve opened
12/4/2012	5:28:05 PM	Main Vac valve opened
12/4/2012	5:28:05 PM	Helium MFC set to  20.000000
12/4/2012	5:28:05 PM	H2 MFC set to  0.000000
12/4/2012	5:28:05 PM	BCl3 MFC set to  0.000000
12/4/2012	5:28:05 PM	PH3 MFC set to  0.000000
12/4/2012	5:28:05 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:28:05 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:28:05 PM	Tube furnace set to 0
12/4/2012	5:28:35 PM	Helium valve closed
12/4/2012	5:28:35 PM	H2 valve closed
12/4/2012	5:28:35 PM	BCl3 valve closed
12/4/2012	5:28:35 PM	PH3 valve closed
12/4/2012	5:28:35 PM	SiCl4 pre valve closed
12/4/2012	5:28:35 PM	SiCl4 post valve closed
12/4/2012	5:28:35 PM	Bypass valve closed
12/4/2012	5:28:35 PM	Bubbler valve closed
12/4/2012	5:28:35 PM	Main Vac valve opened
12/4/2012	5:28:35 PM	Helium MFC set to  0.000000
12/4/2012	5:28:35 PM	H2 MFC set to  0.000000
12/4/2012	5:28:35 PM	BCl3 MFC set to  0.000000
12/4/2012	5:28:35 PM	PH3 MFC set to  0.000000
12/4/2012	5:28:35 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:28:35 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:28:35 PM	Tube furnace set to 0
12/4/2012	5:29:05 PM	H2 valve closed
12/4/2012	5:29:05 PM	BCl3 valve closed
12/4/2012	5:29:05 PM	PH3 valve closed
12/4/2012	5:29:05 PM	SiCl4 pre valve closed
12/4/2012	5:29:05 PM	SiCl4 post valve closed
12/4/2012	5:29:05 PM	Bypass valve closed
12/4/2012	5:29:05 PM	Bubbler valve closed
12/4/2012	5:29:05 PM	Helium valve opened
12/4/2012	5:29:05 PM	Main Vac valve opened
12/4/2012	5:29:05 PM	Helium MFC set to  20.000000
12/4/2012	5:29:05 PM	H2 MFC set to  0.000000
12/4/2012	5:29:05 PM	BCl3 MFC set to  0.000000
12/4/2012	5:29:05 PM	PH3 MFC set to  0.000000
12/4/2012	5:29:05 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:29:05 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:29:05 PM	Tube furnace set to 0
12/4/2012	5:29:36 PM	Helium valve closed
12/4/2012	5:29:36 PM	H2 valve closed
12/4/2012	5:29:36 PM	BCl3 valve closed
12/4/2012	5:29:36 PM	PH3 valve closed
12/4/2012	5:29:36 PM	SiCl4 pre valve closed
12/4/2012	5:29:36 PM	SiCl4 post valve closed
12/4/2012	5:29:36 PM	Bypass valve closed
12/4/2012	5:29:36 PM	Bubbler valve closed
12/4/2012	5:29:36 PM	Main Vac valve opened
12/4/2012	5:29:36 PM	Helium MFC set to  0.000000
12/4/2012	5:29:36 PM	H2 MFC set to  0.000000
12/4/2012	5:29:36 PM	BCl3 MFC set to  0.000000
12/4/2012	5:29:36 PM	PH3 MFC set to  0.000000
12/4/2012	5:29:36 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:29:36 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:29:36 PM	Tube furnace set to 0
12/4/2012	5:30:06 PM	H2 valve closed
12/4/2012	5:30:06 PM	BCl3 valve closed
12/4/2012	5:30:06 PM	PH3 valve closed
12/4/2012	5:30:06 PM	SiCl4 pre valve closed
12/4/2012	5:30:06 PM	SiCl4 post valve closed
12/4/2012	5:30:06 PM	Bypass valve closed
12/4/2012	5:30:06 PM	Bubbler valve closed
12/4/2012	5:30:06 PM	Helium valve opened
12/4/2012	5:30:06 PM	Main Vac valve opened
12/4/2012	5:30:06 PM	Helium MFC set to  20.000000
12/4/2012	5:30:06 PM	H2 MFC set to  0.000000
12/4/2012	5:30:06 PM	BCl3 MFC set to  0.000000
12/4/2012	5:30:06 PM	PH3 MFC set to  0.000000
12/4/2012	5:30:06 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:30:06 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:30:06 PM	Tube furnace set to 0
12/4/2012	5:30:36 PM	Helium valve closed
12/4/2012	5:30:36 PM	H2 valve closed
12/4/2012	5:30:36 PM	BCl3 valve closed
12/4/2012	5:30:36 PM	PH3 valve closed
12/4/2012	5:30:36 PM	SiCl4 pre valve closed
12/4/2012	5:30:36 PM	SiCl4 post valve closed
12/4/2012	5:30:36 PM	Bypass valve closed
12/4/2012	5:30:36 PM	Bubbler valve closed
12/4/2012	5:30:36 PM	Main Vac valve opened
12/4/2012	5:30:36 PM	Helium MFC set to  0.000000
12/4/2012	5:30:36 PM	H2 MFC set to  0.000000
12/4/2012	5:30:36 PM	BCl3 MFC set to  0.000000
12/4/2012	5:30:36 PM	PH3 MFC set to  0.000000
12/4/2012	5:30:36 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:30:36 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:30:36 PM	Tube furnace set to 0
12/4/2012	5:31:06 PM	H2 valve closed
12/4/2012	5:31:06 PM	BCl3 valve closed
12/4/2012	5:31:06 PM	PH3 valve closed
12/4/2012	5:31:06 PM	SiCl4 pre valve closed
12/4/2012	5:31:06 PM	SiCl4 post valve closed
12/4/2012	5:31:06 PM	Bypass valve closed
12/4/2012	5:31:06 PM	Bubbler valve closed
12/4/2012	5:31:06 PM	Helium valve opened
12/4/2012	5:31:06 PM	Main Vac valve opened
12/4/2012	5:31:06 PM	Helium MFC set to  20.000000
12/4/2012	5:31:06 PM	H2 MFC set to  0.000000
12/4/2012	5:31:06 PM	BCl3 MFC set to  0.000000
12/4/2012	5:31:06 PM	PH3 MFC set to  0.000000
12/4/2012	5:31:06 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:31:06 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:31:07 PM	Tube furnace set to 0
12/4/2012	5:31:37 PM	Helium valve closed
12/4/2012	5:31:37 PM	H2 valve closed
12/4/2012	5:31:37 PM	BCl3 valve closed
12/4/2012	5:31:37 PM	PH3 valve closed
12/4/2012	5:31:37 PM	SiCl4 pre valve closed
12/4/2012	5:31:37 PM	SiCl4 post valve closed
12/4/2012	5:31:37 PM	Bypass valve closed
12/4/2012	5:31:37 PM	Bubbler valve closed
12/4/2012	5:31:37 PM	Main Vac valve opened
12/4/2012	5:31:37 PM	Helium MFC set to  0.000000
12/4/2012	5:31:37 PM	H2 MFC set to  0.000000
12/4/2012	5:31:37 PM	BCl3 MFC set to  0.000000
12/4/2012	5:31:37 PM	PH3 MFC set to  0.000000
12/4/2012	5:31:37 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:31:37 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:31:37 PM	Tube furnace set to 0
12/4/2012	5:32:07 PM	H2 valve closed
12/4/2012	5:32:07 PM	BCl3 valve closed
12/4/2012	5:32:07 PM	PH3 valve closed
12/4/2012	5:32:07 PM	SiCl4 pre valve closed
12/4/2012	5:32:07 PM	SiCl4 post valve closed
12/4/2012	5:32:07 PM	Bypass valve closed
12/4/2012	5:32:07 PM	Bubbler valve closed
12/4/2012	5:32:07 PM	Helium valve opened
12/4/2012	5:32:07 PM	Main Vac valve opened
12/4/2012	5:32:07 PM	Helium MFC set to  20.000000
12/4/2012	5:32:07 PM	H2 MFC set to  0.000000
12/4/2012	5:32:07 PM	BCl3 MFC set to  0.000000
12/4/2012	5:32:07 PM	PH3 MFC set to  0.000000
12/4/2012	5:32:07 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:32:07 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:32:07 PM	Tube furnace set to 0
12/4/2012	5:32:37 PM	Helium valve closed
12/4/2012	5:32:37 PM	H2 valve closed
12/4/2012	5:32:37 PM	BCl3 valve closed
12/4/2012	5:32:37 PM	PH3 valve closed
12/4/2012	5:32:37 PM	SiCl4 pre valve closed
12/4/2012	5:32:37 PM	SiCl4 post valve closed
12/4/2012	5:32:37 PM	Bypass valve closed
12/4/2012	5:32:37 PM	Bubbler valve closed
12/4/2012	5:32:37 PM	Main Vac valve opened
12/4/2012	5:32:37 PM	Helium MFC set to  0.000000
12/4/2012	5:32:37 PM	H2 MFC set to  0.000000
12/4/2012	5:32:37 PM	BCl3 MFC set to  0.000000
12/4/2012	5:32:37 PM	PH3 MFC set to  0.000000
12/4/2012	5:32:37 PM	SiCl4 MFC set to  0.000000
12/4/2012	5:32:37 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	5:32:37 PM	Tube furnace set to 0
12/4/2012	5:32:38 PM	Run finished at 5:32 PM
12/4/2012	5:32:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	6:15:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	6:15:49 PM	Recipe started at 6:15 PM
12/4/2012	6:15:49 PM	Helium valve closed
12/4/2012	6:15:49 PM	H2 valve closed
12/4/2012	6:15:49 PM	BCl3 valve closed
12/4/2012	6:15:49 PM	PH3 valve closed
12/4/2012	6:15:49 PM	SiCl4 pre valve closed
12/4/2012	6:15:49 PM	SiCl4 post valve closed
12/4/2012	6:15:49 PM	Main Vac valve closed
12/4/2012	6:15:49 PM	Bubbler valve closed
12/4/2012	6:15:49 PM	Bypass valve opened
12/4/2012	6:15:49 PM	Helium MFC set to  0.000000
12/4/2012	6:15:49 PM	H2 MFC set to  0.000000
12/4/2012	6:15:49 PM	BCl3 MFC set to  0.000000
12/4/2012	6:15:49 PM	PH3 MFC set to  0.000000
12/4/2012	6:15:49 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:15:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:15:49 PM	Tube furnace set to 0
12/4/2012	6:15:49 PM	Helium valve closed
12/4/2012	6:15:49 PM	H2 valve closed
12/4/2012	6:15:49 PM	BCl3 valve closed
12/4/2012	6:15:49 PM	PH3 valve closed
12/4/2012	6:15:49 PM	SiCl4 pre valve closed
12/4/2012	6:15:49 PM	SiCl4 post valve closed
12/4/2012	6:15:49 PM	Main Vac valve closed
12/4/2012	6:15:49 PM	Bubbler valve closed
12/4/2012	6:15:49 PM	Bypass valve opened
12/4/2012	6:15:49 PM	Helium MFC set to  0.000000
12/4/2012	6:15:49 PM	H2 MFC set to  0.000000
12/4/2012	6:15:49 PM	BCl3 MFC set to  0.000000
12/4/2012	6:15:49 PM	PH3 MFC set to  0.000000
12/4/2012	6:15:49 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:15:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:15:49 PM	Tube furnace set to 0
12/4/2012	6:15:51 PM	Helium valve closed
12/4/2012	6:15:51 PM	H2 valve closed
12/4/2012	6:15:51 PM	BCl3 valve closed
12/4/2012	6:15:51 PM	PH3 valve closed
12/4/2012	6:15:51 PM	SiCl4 pre valve closed
12/4/2012	6:15:51 PM	SiCl4 post valve closed
12/4/2012	6:15:51 PM	Bypass valve closed
12/4/2012	6:15:51 PM	Bubbler valve closed
12/4/2012	6:15:51 PM	Main Vac valve opened
12/4/2012	6:15:51 PM	Helium MFC set to  0.000000
12/4/2012	6:15:51 PM	H2 MFC set to  0.000000
12/4/2012	6:15:51 PM	BCl3 MFC set to  0.000000
12/4/2012	6:15:51 PM	PH3 MFC set to  0.000000
12/4/2012	6:15:51 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:15:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:15:52 PM	Tube furnace set to 0
12/4/2012	6:15:53 PM	Run finished at 6:15 PM
12/4/2012	6:15:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	6:16:02 PM	Main Vac valve closed
12/4/2012	6:16:14 PM	Main Vac valve opened
12/4/2012	6:16:49 PM	Recipe started at 6:16 PM
12/4/2012	6:16:49 PM	Helium valve closed
12/4/2012	6:16:49 PM	H2 valve closed
12/4/2012	6:16:49 PM	BCl3 valve closed
12/4/2012	6:16:49 PM	PH3 valve closed
12/4/2012	6:16:49 PM	SiCl4 pre valve closed
12/4/2012	6:16:49 PM	SiCl4 post valve closed
12/4/2012	6:16:49 PM	Main Vac valve closed
12/4/2012	6:16:49 PM	Bypass valve closed
12/4/2012	6:16:49 PM	Bubbler valve closed
12/4/2012	6:16:49 PM	Helium MFC set to  0.000000
12/4/2012	6:16:49 PM	H2 MFC set to  0.000000
12/4/2012	6:16:49 PM	BCl3 MFC set to  0.000000
12/4/2012	6:16:49 PM	PH3 MFC set to  0.000000
12/4/2012	6:16:49 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:16:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:16:49 PM	Tube furnace set to 0
12/4/2012	6:16:52 PM	Helium valve closed
12/4/2012	6:16:52 PM	BCl3 valve closed
12/4/2012	6:16:52 PM	PH3 valve closed
12/4/2012	6:16:52 PM	SiCl4 pre valve closed
12/4/2012	6:16:52 PM	SiCl4 post valve closed
12/4/2012	6:16:52 PM	Main Vac valve closed
12/4/2012	6:16:52 PM	Bypass valve closed
12/4/2012	6:16:52 PM	Bubbler valve closed
12/4/2012	6:16:52 PM	H2 valve opened
12/4/2012	6:16:52 PM	Helium MFC set to  0.000000
12/4/2012	6:16:52 PM	H2 MFC set to  500.000000
12/4/2012	6:16:52 PM	BCl3 MFC set to  0.000000
12/4/2012	6:16:52 PM	PH3 MFC set to  0.000000
12/4/2012	6:16:52 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:16:52 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:16:53 PM	Tube furnace set to 0
12/4/2012	6:18:05 PM	Helium valve closed
12/4/2012	6:18:05 PM	BCl3 valve closed
12/4/2012	6:18:05 PM	PH3 valve closed
12/4/2012	6:18:05 PM	SiCl4 pre valve closed
12/4/2012	6:18:05 PM	SiCl4 post valve closed
12/4/2012	6:18:05 PM	Main Vac valve closed
12/4/2012	6:18:05 PM	Bypass valve closed
12/4/2012	6:18:05 PM	H2 valve opened
12/4/2012	6:18:05 PM	Bubbler valve opened
12/4/2012	6:18:05 PM	Helium MFC set to  0.000000
12/4/2012	6:18:05 PM	H2 MFC set to  500.000000
12/4/2012	6:18:05 PM	BCl3 MFC set to  0.000000
12/4/2012	6:18:05 PM	PH3 MFC set to  0.000000
12/4/2012	6:18:05 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:18:05 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:18:05 PM	Tube furnace set to 0
12/4/2012	6:18:06 PM	Helium valve closed
12/4/2012	6:18:06 PM	BCl3 valve closed
12/4/2012	6:18:06 PM	PH3 valve closed
12/4/2012	6:18:06 PM	SiCl4 pre valve closed
12/4/2012	6:18:06 PM	SiCl4 post valve closed
12/4/2012	6:18:06 PM	Main Vac valve closed
12/4/2012	6:18:06 PM	Bypass valve closed
12/4/2012	6:18:06 PM	H2 valve opened
12/4/2012	6:18:06 PM	Bubbler valve opened
12/4/2012	6:18:06 PM	Helium MFC set to  0.000000
12/4/2012	6:18:06 PM	H2 MFC set to  500.000000
12/4/2012	6:18:06 PM	BCl3 MFC set to  0.000000
12/4/2012	6:18:06 PM	PH3 MFC set to  0.000000
12/4/2012	6:18:06 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:18:06 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:18:06 PM	Tube furnace set to 1000
12/4/2012	6:48:06 PM	Helium valve closed
12/4/2012	6:48:06 PM	PH3 valve closed
12/4/2012	6:48:06 PM	Main Vac valve closed
12/4/2012	6:48:06 PM	Bypass valve closed
12/4/2012	6:48:06 PM	H2 valve opened
12/4/2012	6:48:06 PM	BCl3 valve opened
12/4/2012	6:48:06 PM	SiCl4 pre valve opened
12/4/2012	6:48:06 PM	SiCl4 post valve opened
12/4/2012	6:48:06 PM	Bubbler valve opened
12/4/2012	6:48:06 PM	Helium MFC set to  0.000000
12/4/2012	6:48:06 PM	H2 MFC set to  500.000000
12/4/2012	6:48:06 PM	BCl3 MFC set to  1.000000
12/4/2012	6:48:06 PM	PH3 MFC set to  0.000000
12/4/2012	6:48:06 PM	SiCl4 MFC set to  50.000000
12/4/2012	6:48:06 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:48:06 PM	Tube furnace set to 1000
12/4/2012	6:57:06 PM	Helium valve closed
12/4/2012	6:57:06 PM	BCl3 valve closed
12/4/2012	6:57:06 PM	PH3 valve closed
12/4/2012	6:57:06 PM	SiCl4 pre valve closed
12/4/2012	6:57:06 PM	SiCl4 post valve closed
12/4/2012	6:57:06 PM	Main Vac valve closed
12/4/2012	6:57:06 PM	Bypass valve closed
12/4/2012	6:57:06 PM	H2 valve opened
12/4/2012	6:57:06 PM	Bubbler valve opened
12/4/2012	6:57:06 PM	Helium MFC set to  0.000000
12/4/2012	6:57:06 PM	H2 MFC set to  500.000000
12/4/2012	6:57:06 PM	BCl3 MFC set to  0.000000
12/4/2012	6:57:06 PM	PH3 MFC set to  0.000000
12/4/2012	6:57:06 PM	SiCl4 MFC set to  0.000000
12/4/2012	6:57:06 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	6:57:07 PM	Tube furnace set to 750
12/4/2012	7:02:07 PM	H2 valve closed
12/4/2012	7:02:07 PM	BCl3 valve closed
12/4/2012	7:02:07 PM	PH3 valve closed
12/4/2012	7:02:07 PM	SiCl4 pre valve closed
12/4/2012	7:02:07 PM	SiCl4 post valve closed
12/4/2012	7:02:07 PM	Main Vac valve closed
12/4/2012	7:02:07 PM	Bypass valve closed
12/4/2012	7:02:07 PM	Helium valve opened
12/4/2012	7:02:07 PM	Bubbler valve opened
12/4/2012	7:02:07 PM	Helium MFC set to  500.000000
12/4/2012	7:02:07 PM	H2 MFC set to  0.000000
12/4/2012	7:02:07 PM	BCl3 MFC set to  0.000000
12/4/2012	7:02:07 PM	PH3 MFC set to  0.000000
12/4/2012	7:02:07 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:02:07 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:02:07 PM	Tube furnace set to 0
12/4/2012	7:22:07 PM	Helium valve closed
12/4/2012	7:22:07 PM	H2 valve closed
12/4/2012	7:22:07 PM	BCl3 valve closed
12/4/2012	7:22:07 PM	PH3 valve closed
12/4/2012	7:22:07 PM	SiCl4 pre valve closed
12/4/2012	7:22:07 PM	SiCl4 post valve closed
12/4/2012	7:22:07 PM	Main Vac valve closed
12/4/2012	7:22:07 PM	Bypass valve closed
12/4/2012	7:22:07 PM	Bubbler valve closed
12/4/2012	7:22:07 PM	Helium MFC set to  0.000000
12/4/2012	7:22:07 PM	H2 MFC set to  0.000000
12/4/2012	7:22:07 PM	BCl3 MFC set to  0.000000
12/4/2012	7:22:07 PM	PH3 MFC set to  0.000000
12/4/2012	7:22:07 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:22:07 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:22:07 PM	Tube furnace set to 0
12/4/2012	7:22:08 PM	Run finished at 7:22 PM
12/4/2012	7:26:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	7:26:07 PM	Recipe started at 7:26 PM
12/4/2012	7:26:07 PM	Helium valve closed
12/4/2012	7:26:07 PM	H2 valve closed
12/4/2012	7:26:07 PM	BCl3 valve closed
12/4/2012	7:26:07 PM	PH3 valve closed
12/4/2012	7:26:07 PM	SiCl4 pre valve closed
12/4/2012	7:26:07 PM	SiCl4 post valve closed
12/4/2012	7:26:07 PM	Main Vac valve closed
12/4/2012	7:26:07 PM	Bypass valve closed
12/4/2012	7:26:07 PM	Bubbler valve closed
12/4/2012	7:26:07 PM	Helium MFC set to  0.000000
12/4/2012	7:26:07 PM	H2 MFC set to  0.000000
12/4/2012	7:26:07 PM	BCl3 MFC set to  0.000000
12/4/2012	7:26:07 PM	PH3 MFC set to  0.000000
12/4/2012	7:26:07 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:26:07 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:26:07 PM	Tube furnace set to 0
12/4/2012	7:26:10 PM	H2 valve closed
12/4/2012	7:26:10 PM	BCl3 valve closed
12/4/2012	7:26:11 PM	PH3 valve closed
12/4/2012	7:26:11 PM	SiCl4 pre valve closed
12/4/2012	7:26:11 PM	SiCl4 post valve closed
12/4/2012	7:26:11 PM	Main Vac valve closed
12/4/2012	7:26:11 PM	Bypass valve closed
12/4/2012	7:26:11 PM	Bubbler valve closed
12/4/2012	7:26:11 PM	Helium valve opened
12/4/2012	7:26:11 PM	Helium MFC set to  500.000000
12/4/2012	7:26:11 PM	H2 MFC set to  0.000000
12/4/2012	7:26:11 PM	BCl3 MFC set to  0.000000
12/4/2012	7:26:11 PM	PH3 MFC set to  0.000000
12/4/2012	7:26:11 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:26:11 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:26:11 PM	Tube furnace set to 0
12/4/2012	7:26:11 PM	Helium valve closed
12/4/2012	7:26:11 PM	H2 valve closed
12/4/2012	7:26:11 PM	BCl3 valve closed
12/4/2012	7:26:11 PM	PH3 valve closed
12/4/2012	7:26:11 PM	SiCl4 pre valve closed
12/4/2012	7:26:11 PM	SiCl4 post valve closed
12/4/2012	7:26:11 PM	Main Vac valve closed
12/4/2012	7:26:11 PM	Bypass valve closed
12/4/2012	7:26:11 PM	Bubbler valve closed
12/4/2012	7:26:11 PM	Helium MFC set to  0.000000
12/4/2012	7:26:11 PM	H2 MFC set to  0.000000
12/4/2012	7:26:11 PM	BCl3 MFC set to  0.000000
12/4/2012	7:26:11 PM	PH3 MFC set to  0.000000
12/4/2012	7:26:11 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:26:11 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:26:11 PM	Tube furnace set to 0
12/4/2012	7:26:12 PM	Run finished at 7:26 PM
12/4/2012	7:26:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/4/2012	7:29:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	7:29:17 PM	Recipe started at 7:29 PM
12/4/2012	7:29:17 PM	Helium valve closed
12/4/2012	7:29:17 PM	H2 valve closed
12/4/2012	7:29:17 PM	BCl3 valve closed
12/4/2012	7:29:17 PM	PH3 valve closed
12/4/2012	7:29:17 PM	SiCl4 pre valve closed
12/4/2012	7:29:17 PM	SiCl4 post valve closed
12/4/2012	7:29:17 PM	Main Vac valve closed
12/4/2012	7:29:17 PM	Bubbler valve closed
12/4/2012	7:29:17 PM	Bypass valve opened
12/4/2012	7:29:17 PM	Helium MFC set to  0.000000
12/4/2012	7:29:17 PM	H2 MFC set to  0.000000
12/4/2012	7:29:17 PM	BCl3 MFC set to  0.000000
12/4/2012	7:29:17 PM	PH3 MFC set to  0.000000
12/4/2012	7:29:17 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:29:17 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:29:17 PM	Tube furnace set to 0
12/4/2012	7:30:36 PM	Helium valve closed
12/4/2012	7:30:36 PM	H2 valve closed
12/4/2012	7:30:36 PM	BCl3 valve closed
12/4/2012	7:30:36 PM	PH3 valve closed
12/4/2012	7:30:36 PM	SiCl4 pre valve closed
12/4/2012	7:30:36 PM	SiCl4 post valve closed
12/4/2012	7:30:36 PM	Main Vac valve closed
12/4/2012	7:30:36 PM	Bubbler valve closed
12/4/2012	7:30:36 PM	Bypass valve opened
12/4/2012	7:30:36 PM	Helium MFC set to  0.000000
12/4/2012	7:30:36 PM	H2 MFC set to  0.000000
12/4/2012	7:30:36 PM	BCl3 MFC set to  0.000000
12/4/2012	7:30:36 PM	PH3 MFC set to  0.000000
12/4/2012	7:30:36 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:30:36 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:30:36 PM	Tube furnace set to 0
12/4/2012	7:31:36 PM	Helium valve closed
12/4/2012	7:31:36 PM	H2 valve closed
12/4/2012	7:31:36 PM	BCl3 valve closed
12/4/2012	7:31:36 PM	PH3 valve closed
12/4/2012	7:31:36 PM	SiCl4 pre valve closed
12/4/2012	7:31:36 PM	SiCl4 post valve closed
12/4/2012	7:31:36 PM	Bypass valve closed
12/4/2012	7:31:36 PM	Bubbler valve closed
12/4/2012	7:31:36 PM	Main Vac valve opened
12/4/2012	7:31:36 PM	Helium MFC set to  0.000000
12/4/2012	7:31:36 PM	H2 MFC set to  0.000000
12/4/2012	7:31:36 PM	BCl3 MFC set to  0.000000
12/4/2012	7:31:36 PM	PH3 MFC set to  0.000000
12/4/2012	7:31:36 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:31:36 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:31:36 PM	Tube furnace set to 0
12/4/2012	7:31:37 PM	Run finished at 7:31 PM
12/4/2012	7:31:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	7:36:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	7:36:28 PM	Recipe started at 7:36 PM
12/4/2012	7:36:28 PM	Helium valve closed
12/4/2012	7:36:28 PM	H2 valve closed
12/4/2012	7:36:28 PM	BCl3 valve closed
12/4/2012	7:36:28 PM	PH3 valve closed
12/4/2012	7:36:28 PM	SiCl4 pre valve closed
12/4/2012	7:36:28 PM	SiCl4 post valve closed
12/4/2012	7:36:28 PM	Main Vac valve closed
12/4/2012	7:36:28 PM	Bubbler valve closed
12/4/2012	7:36:28 PM	Bypass valve opened
12/4/2012	7:36:28 PM	Helium MFC set to  0.000000
12/4/2012	7:36:28 PM	H2 MFC set to  0.000000
12/4/2012	7:36:28 PM	BCl3 MFC set to  0.000000
12/4/2012	7:36:28 PM	PH3 MFC set to  0.000000
12/4/2012	7:36:28 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:36:28 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:36:28 PM	Tube furnace set to 0
12/4/2012	7:36:29 PM	Helium valve closed
12/4/2012	7:36:29 PM	H2 valve closed
12/4/2012	7:36:29 PM	BCl3 valve closed
12/4/2012	7:36:29 PM	PH3 valve closed
12/4/2012	7:36:29 PM	SiCl4 pre valve closed
12/4/2012	7:36:29 PM	SiCl4 post valve closed
12/4/2012	7:36:29 PM	Main Vac valve closed
12/4/2012	7:36:29 PM	Bubbler valve closed
12/4/2012	7:36:29 PM	Bypass valve opened
12/4/2012	7:36:29 PM	Helium MFC set to  0.000000
12/4/2012	7:36:29 PM	H2 MFC set to  0.000000
12/4/2012	7:36:29 PM	BCl3 MFC set to  0.000000
12/4/2012	7:36:29 PM	PH3 MFC set to  0.000000
12/4/2012	7:36:29 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:36:29 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:36:29 PM	Tube furnace set to 0
12/4/2012	7:36:30 PM	Helium valve closed
12/4/2012	7:36:30 PM	H2 valve closed
12/4/2012	7:36:30 PM	BCl3 valve closed
12/4/2012	7:36:30 PM	PH3 valve closed
12/4/2012	7:36:30 PM	SiCl4 pre valve closed
12/4/2012	7:36:30 PM	SiCl4 post valve closed
12/4/2012	7:36:30 PM	Bypass valve closed
12/4/2012	7:36:30 PM	Bubbler valve closed
12/4/2012	7:36:30 PM	Main Vac valve opened
12/4/2012	7:36:30 PM	Helium MFC set to  0.000000
12/4/2012	7:36:30 PM	H2 MFC set to  0.000000
12/4/2012	7:36:30 PM	BCl3 MFC set to  0.000000
12/4/2012	7:36:30 PM	PH3 MFC set to  0.000000
12/4/2012	7:36:30 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:36:30 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:36:30 PM	Tube furnace set to 0
12/4/2012	7:37:00 PM	H2 valve closed
12/4/2012	7:37:00 PM	BCl3 valve closed
12/4/2012	7:37:00 PM	PH3 valve closed
12/4/2012	7:37:00 PM	SiCl4 pre valve closed
12/4/2012	7:37:00 PM	SiCl4 post valve closed
12/4/2012	7:37:00 PM	Bypass valve closed
12/4/2012	7:37:00 PM	Bubbler valve closed
12/4/2012	7:37:00 PM	Helium valve opened
12/4/2012	7:37:00 PM	Main Vac valve opened
12/4/2012	7:37:00 PM	Helium MFC set to  20.000000
12/4/2012	7:37:00 PM	H2 MFC set to  0.000000
12/4/2012	7:37:00 PM	BCl3 MFC set to  0.000000
12/4/2012	7:37:00 PM	PH3 MFC set to  0.000000
12/4/2012	7:37:00 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:37:00 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:37:00 PM	Tube furnace set to 0
12/4/2012	7:37:30 PM	Helium valve closed
12/4/2012	7:37:30 PM	H2 valve closed
12/4/2012	7:37:30 PM	BCl3 valve closed
12/4/2012	7:37:30 PM	PH3 valve closed
12/4/2012	7:37:30 PM	SiCl4 pre valve closed
12/4/2012	7:37:30 PM	SiCl4 post valve closed
12/4/2012	7:37:30 PM	Bypass valve closed
12/4/2012	7:37:30 PM	Bubbler valve closed
12/4/2012	7:37:30 PM	Main Vac valve opened
12/4/2012	7:37:30 PM	Helium MFC set to  0.000000
12/4/2012	7:37:30 PM	H2 MFC set to  0.000000
12/4/2012	7:37:30 PM	BCl3 MFC set to  0.000000
12/4/2012	7:37:30 PM	PH3 MFC set to  0.000000
12/4/2012	7:37:30 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:37:30 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:37:30 PM	Tube furnace set to 0
12/4/2012	7:38:00 PM	H2 valve closed
12/4/2012	7:38:00 PM	BCl3 valve closed
12/4/2012	7:38:00 PM	PH3 valve closed
12/4/2012	7:38:00 PM	SiCl4 pre valve closed
12/4/2012	7:38:00 PM	SiCl4 post valve closed
12/4/2012	7:38:00 PM	Bypass valve closed
12/4/2012	7:38:00 PM	Bubbler valve closed
12/4/2012	7:38:00 PM	Helium valve opened
12/4/2012	7:38:00 PM	Main Vac valve opened
12/4/2012	7:38:00 PM	Helium MFC set to  20.000000
12/4/2012	7:38:00 PM	H2 MFC set to  0.000000
12/4/2012	7:38:00 PM	BCl3 MFC set to  0.000000
12/4/2012	7:38:01 PM	PH3 MFC set to  0.000000
12/4/2012	7:38:01 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:38:01 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:38:01 PM	Tube furnace set to 0
12/4/2012	7:38:31 PM	Helium valve closed
12/4/2012	7:38:31 PM	H2 valve closed
12/4/2012	7:38:31 PM	BCl3 valve closed
12/4/2012	7:38:31 PM	PH3 valve closed
12/4/2012	7:38:31 PM	SiCl4 pre valve closed
12/4/2012	7:38:31 PM	SiCl4 post valve closed
12/4/2012	7:38:31 PM	Bypass valve closed
12/4/2012	7:38:31 PM	Bubbler valve closed
12/4/2012	7:38:31 PM	Main Vac valve opened
12/4/2012	7:38:31 PM	Helium MFC set to  0.000000
12/4/2012	7:38:31 PM	H2 MFC set to  0.000000
12/4/2012	7:38:31 PM	BCl3 MFC set to  0.000000
12/4/2012	7:38:31 PM	PH3 MFC set to  0.000000
12/4/2012	7:38:31 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:38:31 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:38:31 PM	Tube furnace set to 0
12/4/2012	7:39:01 PM	H2 valve closed
12/4/2012	7:39:01 PM	BCl3 valve closed
12/4/2012	7:39:01 PM	PH3 valve closed
12/4/2012	7:39:01 PM	SiCl4 pre valve closed
12/4/2012	7:39:01 PM	SiCl4 post valve closed
12/4/2012	7:39:01 PM	Bypass valve closed
12/4/2012	7:39:01 PM	Bubbler valve closed
12/4/2012	7:39:01 PM	Helium valve opened
12/4/2012	7:39:01 PM	Main Vac valve opened
12/4/2012	7:39:01 PM	Helium MFC set to  20.000000
12/4/2012	7:39:01 PM	H2 MFC set to  0.000000
12/4/2012	7:39:01 PM	BCl3 MFC set to  0.000000
12/4/2012	7:39:01 PM	PH3 MFC set to  0.000000
12/4/2012	7:39:01 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:39:01 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:39:01 PM	Tube furnace set to 0
12/4/2012	7:39:31 PM	Helium valve closed
12/4/2012	7:39:31 PM	H2 valve closed
12/4/2012	7:39:31 PM	BCl3 valve closed
12/4/2012	7:39:31 PM	PH3 valve closed
12/4/2012	7:39:31 PM	SiCl4 pre valve closed
12/4/2012	7:39:31 PM	SiCl4 post valve closed
12/4/2012	7:39:31 PM	Bypass valve closed
12/4/2012	7:39:31 PM	Bubbler valve closed
12/4/2012	7:39:31 PM	Main Vac valve opened
12/4/2012	7:39:31 PM	Helium MFC set to  0.000000
12/4/2012	7:39:31 PM	H2 MFC set to  0.000000
12/4/2012	7:39:31 PM	BCl3 MFC set to  0.000000
12/4/2012	7:39:31 PM	PH3 MFC set to  0.000000
12/4/2012	7:39:31 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:39:31 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:39:31 PM	Tube furnace set to 0
12/4/2012	7:40:01 PM	H2 valve closed
12/4/2012	7:40:01 PM	BCl3 valve closed
12/4/2012	7:40:01 PM	PH3 valve closed
12/4/2012	7:40:01 PM	SiCl4 pre valve closed
12/4/2012	7:40:01 PM	SiCl4 post valve closed
12/4/2012	7:40:01 PM	Bypass valve closed
12/4/2012	7:40:01 PM	Bubbler valve closed
12/4/2012	7:40:01 PM	Helium valve opened
12/4/2012	7:40:02 PM	Main Vac valve opened
12/4/2012	7:40:02 PM	Helium MFC set to  20.000000
12/4/2012	7:40:02 PM	H2 MFC set to  0.000000
12/4/2012	7:40:02 PM	BCl3 MFC set to  0.000000
12/4/2012	7:40:02 PM	PH3 MFC set to  0.000000
12/4/2012	7:40:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:40:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:40:02 PM	Tube furnace set to 0
12/4/2012	7:40:32 PM	Helium valve closed
12/4/2012	7:40:32 PM	H2 valve closed
12/4/2012	7:40:32 PM	BCl3 valve closed
12/4/2012	7:40:32 PM	PH3 valve closed
12/4/2012	7:40:32 PM	SiCl4 pre valve closed
12/4/2012	7:40:32 PM	SiCl4 post valve closed
12/4/2012	7:40:32 PM	Bypass valve closed
12/4/2012	7:40:32 PM	Bubbler valve closed
12/4/2012	7:40:32 PM	Main Vac valve opened
12/4/2012	7:40:32 PM	Helium MFC set to  0.000000
12/4/2012	7:40:32 PM	H2 MFC set to  0.000000
12/4/2012	7:40:32 PM	BCl3 MFC set to  0.000000
12/4/2012	7:40:32 PM	PH3 MFC set to  0.000000
12/4/2012	7:40:32 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:40:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:40:32 PM	Tube furnace set to 0
12/4/2012	7:41:02 PM	H2 valve closed
12/4/2012	7:41:02 PM	BCl3 valve closed
12/4/2012	7:41:02 PM	PH3 valve closed
12/4/2012	7:41:02 PM	SiCl4 pre valve closed
12/4/2012	7:41:02 PM	SiCl4 post valve closed
12/4/2012	7:41:02 PM	Bypass valve closed
12/4/2012	7:41:02 PM	Bubbler valve closed
12/4/2012	7:41:02 PM	Helium valve opened
12/4/2012	7:41:02 PM	Main Vac valve opened
12/4/2012	7:41:02 PM	Helium MFC set to  20.000000
12/4/2012	7:41:02 PM	H2 MFC set to  0.000000
12/4/2012	7:41:02 PM	BCl3 MFC set to  0.000000
12/4/2012	7:41:02 PM	PH3 MFC set to  0.000000
12/4/2012	7:41:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:41:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:41:02 PM	Tube furnace set to 0
12/4/2012	7:41:32 PM	Helium valve closed
12/4/2012	7:41:32 PM	H2 valve closed
12/4/2012	7:41:32 PM	BCl3 valve closed
12/4/2012	7:41:32 PM	PH3 valve closed
12/4/2012	7:41:32 PM	SiCl4 pre valve closed
12/4/2012	7:41:32 PM	SiCl4 post valve closed
12/4/2012	7:41:32 PM	Bypass valve closed
12/4/2012	7:41:32 PM	Bubbler valve closed
12/4/2012	7:41:32 PM	Main Vac valve opened
12/4/2012	7:41:32 PM	Helium MFC set to  0.000000
12/4/2012	7:41:32 PM	H2 MFC set to  0.000000
12/4/2012	7:41:32 PM	BCl3 MFC set to  0.000000
12/4/2012	7:41:32 PM	PH3 MFC set to  0.000000
12/4/2012	7:41:32 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:41:32 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:41:32 PM	Tube furnace set to 0
12/4/2012	7:42:02 PM	H2 valve closed
12/4/2012	7:42:02 PM	BCl3 valve closed
12/4/2012	7:42:02 PM	PH3 valve closed
12/4/2012	7:42:02 PM	SiCl4 pre valve closed
12/4/2012	7:42:02 PM	SiCl4 post valve closed
12/4/2012	7:42:03 PM	Bypass valve closed
12/4/2012	7:42:03 PM	Bubbler valve closed
12/4/2012	7:42:03 PM	Helium valve opened
12/4/2012	7:42:03 PM	Main Vac valve opened
12/4/2012	7:42:03 PM	Helium MFC set to  20.000000
12/4/2012	7:42:03 PM	H2 MFC set to  0.000000
12/4/2012	7:42:03 PM	BCl3 MFC set to  0.000000
12/4/2012	7:42:03 PM	PH3 MFC set to  0.000000
12/4/2012	7:42:03 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:42:03 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:42:03 PM	Tube furnace set to 0
12/4/2012	7:42:33 PM	Helium valve closed
12/4/2012	7:42:33 PM	H2 valve closed
12/4/2012	7:42:33 PM	BCl3 valve closed
12/4/2012	7:42:33 PM	PH3 valve closed
12/4/2012	7:42:33 PM	SiCl4 pre valve closed
12/4/2012	7:42:33 PM	SiCl4 post valve closed
12/4/2012	7:42:33 PM	Bypass valve closed
12/4/2012	7:42:33 PM	Bubbler valve closed
12/4/2012	7:42:33 PM	Main Vac valve opened
12/4/2012	7:42:33 PM	Helium MFC set to  0.000000
12/4/2012	7:42:33 PM	H2 MFC set to  0.000000
12/4/2012	7:42:33 PM	BCl3 MFC set to  0.000000
12/4/2012	7:42:33 PM	PH3 MFC set to  0.000000
12/4/2012	7:42:33 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:42:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:42:33 PM	Tube furnace set to 0
12/4/2012	7:43:03 PM	H2 valve closed
12/4/2012	7:43:03 PM	BCl3 valve closed
12/4/2012	7:43:03 PM	PH3 valve closed
12/4/2012	7:43:03 PM	SiCl4 pre valve closed
12/4/2012	7:43:03 PM	SiCl4 post valve closed
12/4/2012	7:43:03 PM	Bypass valve closed
12/4/2012	7:43:03 PM	Bubbler valve closed
12/4/2012	7:43:03 PM	Helium valve opened
12/4/2012	7:43:03 PM	Main Vac valve opened
12/4/2012	7:43:03 PM	Helium MFC set to  20.000000
12/4/2012	7:43:03 PM	H2 MFC set to  0.000000
12/4/2012	7:43:03 PM	BCl3 MFC set to  0.000000
12/4/2012	7:43:03 PM	PH3 MFC set to  0.000000
12/4/2012	7:43:03 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:43:03 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:43:03 PM	Tube furnace set to 0
12/4/2012	7:43:33 PM	Helium valve closed
12/4/2012	7:43:33 PM	H2 valve closed
12/4/2012	7:43:33 PM	BCl3 valve closed
12/4/2012	7:43:33 PM	PH3 valve closed
12/4/2012	7:43:33 PM	SiCl4 pre valve closed
12/4/2012	7:43:33 PM	SiCl4 post valve closed
12/4/2012	7:43:33 PM	Bypass valve closed
12/4/2012	7:43:33 PM	Bubbler valve closed
12/4/2012	7:43:33 PM	Main Vac valve opened
12/4/2012	7:43:33 PM	Helium MFC set to  0.000000
12/4/2012	7:43:33 PM	H2 MFC set to  0.000000
12/4/2012	7:43:33 PM	BCl3 MFC set to  0.000000
12/4/2012	7:43:33 PM	PH3 MFC set to  0.000000
12/4/2012	7:43:33 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:43:33 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:43:33 PM	Tube furnace set to 0
12/4/2012	7:44:04 PM	H2 valve closed
12/4/2012	7:44:04 PM	BCl3 valve closed
12/4/2012	7:44:04 PM	PH3 valve closed
12/4/2012	7:44:04 PM	SiCl4 pre valve closed
12/4/2012	7:44:04 PM	SiCl4 post valve closed
12/4/2012	7:44:04 PM	Bypass valve closed
12/4/2012	7:44:04 PM	Bubbler valve closed
12/4/2012	7:44:04 PM	Helium valve opened
12/4/2012	7:44:04 PM	Main Vac valve opened
12/4/2012	7:44:04 PM	Helium MFC set to  20.000000
12/4/2012	7:44:04 PM	H2 MFC set to  0.000000
12/4/2012	7:44:04 PM	BCl3 MFC set to  0.000000
12/4/2012	7:44:04 PM	PH3 MFC set to  0.000000
12/4/2012	7:44:04 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:44:04 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:44:04 PM	Tube furnace set to 0
12/4/2012	7:44:34 PM	Helium valve closed
12/4/2012	7:44:34 PM	H2 valve closed
12/4/2012	7:44:34 PM	BCl3 valve closed
12/4/2012	7:44:34 PM	PH3 valve closed
12/4/2012	7:44:34 PM	SiCl4 pre valve closed
12/4/2012	7:44:34 PM	SiCl4 post valve closed
12/4/2012	7:44:34 PM	Bypass valve closed
12/4/2012	7:44:34 PM	Bubbler valve closed
12/4/2012	7:44:34 PM	Main Vac valve opened
12/4/2012	7:44:34 PM	Helium MFC set to  0.000000
12/4/2012	7:44:34 PM	H2 MFC set to  0.000000
12/4/2012	7:44:34 PM	BCl3 MFC set to  0.000000
12/4/2012	7:44:34 PM	PH3 MFC set to  0.000000
12/4/2012	7:44:34 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:44:34 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:44:34 PM	Tube furnace set to 0
12/4/2012	7:45:04 PM	H2 valve closed
12/4/2012	7:45:04 PM	BCl3 valve closed
12/4/2012	7:45:04 PM	PH3 valve closed
12/4/2012	7:45:04 PM	SiCl4 pre valve closed
12/4/2012	7:45:04 PM	SiCl4 post valve closed
12/4/2012	7:45:04 PM	Bypass valve closed
12/4/2012	7:45:04 PM	Bubbler valve closed
12/4/2012	7:45:04 PM	Helium valve opened
12/4/2012	7:45:04 PM	Main Vac valve opened
12/4/2012	7:45:04 PM	Helium MFC set to  20.000000
12/4/2012	7:45:04 PM	H2 MFC set to  0.000000
12/4/2012	7:45:04 PM	BCl3 MFC set to  0.000000
12/4/2012	7:45:04 PM	PH3 MFC set to  0.000000
12/4/2012	7:45:04 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:45:04 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:45:04 PM	Tube furnace set to 0
12/4/2012	7:45:34 PM	Helium valve closed
12/4/2012	7:45:34 PM	H2 valve closed
12/4/2012	7:45:34 PM	BCl3 valve closed
12/4/2012	7:45:34 PM	PH3 valve closed
12/4/2012	7:45:34 PM	SiCl4 pre valve closed
12/4/2012	7:45:34 PM	SiCl4 post valve closed
12/4/2012	7:45:34 PM	Bypass valve closed
12/4/2012	7:45:34 PM	Bubbler valve closed
12/4/2012	7:45:34 PM	Main Vac valve opened
12/4/2012	7:45:34 PM	Helium MFC set to  0.000000
12/4/2012	7:45:34 PM	H2 MFC set to  0.000000
12/4/2012	7:45:34 PM	BCl3 MFC set to  0.000000
12/4/2012	7:45:34 PM	PH3 MFC set to  0.000000
12/4/2012	7:45:34 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:45:34 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:45:34 PM	Tube furnace set to 0
12/4/2012	7:46:05 PM	H2 valve closed
12/4/2012	7:46:05 PM	BCl3 valve closed
12/4/2012	7:46:05 PM	PH3 valve closed
12/4/2012	7:46:05 PM	SiCl4 pre valve closed
12/4/2012	7:46:05 PM	SiCl4 post valve closed
12/4/2012	7:46:05 PM	Bypass valve closed
12/4/2012	7:46:05 PM	Bubbler valve closed
12/4/2012	7:46:05 PM	Helium valve opened
12/4/2012	7:46:05 PM	Main Vac valve opened
12/4/2012	7:46:05 PM	Helium MFC set to  20.000000
12/4/2012	7:46:05 PM	H2 MFC set to  0.000000
12/4/2012	7:46:05 PM	BCl3 MFC set to  0.000000
12/4/2012	7:46:05 PM	PH3 MFC set to  0.000000
12/4/2012	7:46:05 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:46:05 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:46:05 PM	Tube furnace set to 0
12/4/2012	7:46:35 PM	Helium valve closed
12/4/2012	7:46:35 PM	H2 valve closed
12/4/2012	7:46:35 PM	BCl3 valve closed
12/4/2012	7:46:35 PM	PH3 valve closed
12/4/2012	7:46:35 PM	SiCl4 pre valve closed
12/4/2012	7:46:35 PM	SiCl4 post valve closed
12/4/2012	7:46:35 PM	Bypass valve closed
12/4/2012	7:46:35 PM	Bubbler valve closed
12/4/2012	7:46:35 PM	Main Vac valve opened
12/4/2012	7:46:35 PM	Helium MFC set to  0.000000
12/4/2012	7:46:35 PM	H2 MFC set to  0.000000
12/4/2012	7:46:35 PM	BCl3 MFC set to  0.000000
12/4/2012	7:46:35 PM	PH3 MFC set to  0.000000
12/4/2012	7:46:35 PM	SiCl4 MFC set to  0.000000
12/4/2012	7:46:35 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	7:46:35 PM	Tube furnace set to 0
12/4/2012	7:46:36 PM	Run finished at 7:46 PM
12/4/2012	7:46:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	8:01:37 PM	Main Vac valve closed
12/4/2012	8:01:50 PM	Main Vac valve opened
12/4/2012	8:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	8:02:06 PM	Recipe started at 8:02 PM
12/4/2012	8:02:06 PM	Helium valve closed
12/4/2012	8:02:06 PM	H2 valve closed
12/4/2012	8:02:06 PM	BCl3 valve closed
12/4/2012	8:02:06 PM	PH3 valve closed
12/4/2012	8:02:06 PM	SiCl4 pre valve closed
12/4/2012	8:02:06 PM	SiCl4 post valve closed
12/4/2012	8:02:06 PM	Main Vac valve closed
12/4/2012	8:02:06 PM	Bubbler valve closed
12/4/2012	8:02:06 PM	Bypass valve opened
12/4/2012	8:02:06 PM	Helium MFC set to  0.000000
12/4/2012	8:02:06 PM	H2 MFC set to  0.000000
12/4/2012	8:02:06 PM	BCl3 MFC set to  0.000000
12/4/2012	8:02:06 PM	PH3 MFC set to  0.000000
12/4/2012	8:02:06 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:02:06 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:02:06 PM	Tube furnace set to 0
12/4/2012	8:02:06 PM	Helium valve closed
12/4/2012	8:02:06 PM	H2 valve closed
12/4/2012	8:02:06 PM	BCl3 valve closed
12/4/2012	8:02:06 PM	PH3 valve closed
12/4/2012	8:02:06 PM	SiCl4 pre valve closed
12/4/2012	8:02:06 PM	SiCl4 post valve closed
12/4/2012	8:02:06 PM	Main Vac valve closed
12/4/2012	8:02:06 PM	Bubbler valve closed
12/4/2012	8:02:06 PM	Bypass valve opened
12/4/2012	8:02:06 PM	Helium MFC set to  0.000000
12/4/2012	8:02:06 PM	H2 MFC set to  0.000000
12/4/2012	8:02:06 PM	BCl3 MFC set to  0.000000
12/4/2012	8:02:06 PM	PH3 MFC set to  0.000000
12/4/2012	8:02:06 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:02:06 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:02:07 PM	Tube furnace set to 0
12/4/2012	8:02:07 PM	Helium valve closed
12/4/2012	8:02:07 PM	H2 valve closed
12/4/2012	8:02:07 PM	BCl3 valve closed
12/4/2012	8:02:07 PM	PH3 valve closed
12/4/2012	8:02:07 PM	SiCl4 pre valve closed
12/4/2012	8:02:07 PM	SiCl4 post valve closed
12/4/2012	8:02:07 PM	Bypass valve closed
12/4/2012	8:02:07 PM	Bubbler valve closed
12/4/2012	8:02:07 PM	Main Vac valve opened
12/4/2012	8:02:07 PM	Helium MFC set to  0.000000
12/4/2012	8:02:07 PM	H2 MFC set to  0.000000
12/4/2012	8:02:07 PM	BCl3 MFC set to  0.000000
12/4/2012	8:02:07 PM	PH3 MFC set to  0.000000
12/4/2012	8:02:07 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:02:07 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:02:07 PM	Tube furnace set to 0
12/4/2012	8:02:37 PM	H2 valve closed
12/4/2012	8:02:37 PM	BCl3 valve closed
12/4/2012	8:02:37 PM	PH3 valve closed
12/4/2012	8:02:37 PM	SiCl4 pre valve closed
12/4/2012	8:02:37 PM	SiCl4 post valve closed
12/4/2012	8:02:37 PM	Bypass valve closed
12/4/2012	8:02:37 PM	Bubbler valve closed
12/4/2012	8:02:37 PM	Helium valve opened
12/4/2012	8:02:37 PM	Main Vac valve opened
12/4/2012	8:02:37 PM	Helium MFC set to  20.000000
12/4/2012	8:02:37 PM	H2 MFC set to  0.000000
12/4/2012	8:02:37 PM	BCl3 MFC set to  0.000000
12/4/2012	8:02:37 PM	PH3 MFC set to  0.000000
12/4/2012	8:02:37 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:02:37 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:02:37 PM	Tube furnace set to 0
12/4/2012	8:03:07 PM	Helium valve closed
12/4/2012	8:03:07 PM	H2 valve closed
12/4/2012	8:03:07 PM	BCl3 valve closed
12/4/2012	8:03:07 PM	PH3 valve closed
12/4/2012	8:03:07 PM	SiCl4 pre valve closed
12/4/2012	8:03:07 PM	SiCl4 post valve closed
12/4/2012	8:03:07 PM	Bypass valve closed
12/4/2012	8:03:07 PM	Bubbler valve closed
12/4/2012	8:03:07 PM	Main Vac valve opened
12/4/2012	8:03:07 PM	Helium MFC set to  0.000000
12/4/2012	8:03:07 PM	H2 MFC set to  0.000000
12/4/2012	8:03:07 PM	BCl3 MFC set to  0.000000
12/4/2012	8:03:07 PM	PH3 MFC set to  0.000000
12/4/2012	8:03:07 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:03:07 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:03:08 PM	Tube furnace set to 0
12/4/2012	8:03:38 PM	H2 valve closed
12/4/2012	8:03:38 PM	BCl3 valve closed
12/4/2012	8:03:38 PM	PH3 valve closed
12/4/2012	8:03:38 PM	SiCl4 pre valve closed
12/4/2012	8:03:38 PM	SiCl4 post valve closed
12/4/2012	8:03:38 PM	Bypass valve closed
12/4/2012	8:03:38 PM	Bubbler valve closed
12/4/2012	8:03:38 PM	Helium valve opened
12/4/2012	8:03:38 PM	Main Vac valve opened
12/4/2012	8:03:38 PM	Helium MFC set to  20.000000
12/4/2012	8:03:38 PM	H2 MFC set to  0.000000
12/4/2012	8:03:38 PM	BCl3 MFC set to  0.000000
12/4/2012	8:03:38 PM	PH3 MFC set to  0.000000
12/4/2012	8:03:38 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:03:38 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:03:38 PM	Tube furnace set to 0
12/4/2012	8:04:08 PM	Helium valve closed
12/4/2012	8:04:08 PM	H2 valve closed
12/4/2012	8:04:08 PM	BCl3 valve closed
12/4/2012	8:04:08 PM	PH3 valve closed
12/4/2012	8:04:08 PM	SiCl4 pre valve closed
12/4/2012	8:04:08 PM	SiCl4 post valve closed
12/4/2012	8:04:08 PM	Bypass valve closed
12/4/2012	8:04:08 PM	Bubbler valve closed
12/4/2012	8:04:08 PM	Main Vac valve opened
12/4/2012	8:04:08 PM	Helium MFC set to  0.000000
12/4/2012	8:04:08 PM	H2 MFC set to  0.000000
12/4/2012	8:04:08 PM	BCl3 MFC set to  0.000000
12/4/2012	8:04:08 PM	PH3 MFC set to  0.000000
12/4/2012	8:04:08 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:04:08 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:04:08 PM	Tube furnace set to 0
12/4/2012	8:04:38 PM	H2 valve closed
12/4/2012	8:04:38 PM	BCl3 valve closed
12/4/2012	8:04:38 PM	PH3 valve closed
12/4/2012	8:04:38 PM	SiCl4 pre valve closed
12/4/2012	8:04:38 PM	SiCl4 post valve closed
12/4/2012	8:04:38 PM	Bypass valve closed
12/4/2012	8:04:38 PM	Bubbler valve closed
12/4/2012	8:04:38 PM	Helium valve opened
12/4/2012	8:04:38 PM	Main Vac valve opened
12/4/2012	8:04:38 PM	Helium MFC set to  20.000000
12/4/2012	8:04:38 PM	H2 MFC set to  0.000000
12/4/2012	8:04:38 PM	BCl3 MFC set to  0.000000
12/4/2012	8:04:38 PM	PH3 MFC set to  0.000000
12/4/2012	8:04:38 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:04:38 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:04:38 PM	Tube furnace set to 0
12/4/2012	8:05:08 PM	Helium valve closed
12/4/2012	8:05:08 PM	H2 valve closed
12/4/2012	8:05:08 PM	BCl3 valve closed
12/4/2012	8:05:08 PM	PH3 valve closed
12/4/2012	8:05:08 PM	SiCl4 pre valve closed
12/4/2012	8:05:08 PM	SiCl4 post valve closed
12/4/2012	8:05:08 PM	Bypass valve closed
12/4/2012	8:05:08 PM	Bubbler valve closed
12/4/2012	8:05:08 PM	Main Vac valve opened
12/4/2012	8:05:08 PM	Helium MFC set to  0.000000
12/4/2012	8:05:08 PM	H2 MFC set to  0.000000
12/4/2012	8:05:08 PM	BCl3 MFC set to  0.000000
12/4/2012	8:05:08 PM	PH3 MFC set to  0.000000
12/4/2012	8:05:08 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:05:08 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:05:09 PM	Tube furnace set to 0
12/4/2012	8:05:39 PM	H2 valve closed
12/4/2012	8:05:39 PM	BCl3 valve closed
12/4/2012	8:05:39 PM	PH3 valve closed
12/4/2012	8:05:39 PM	SiCl4 pre valve closed
12/4/2012	8:05:39 PM	SiCl4 post valve closed
12/4/2012	8:05:39 PM	Bypass valve closed
12/4/2012	8:05:39 PM	Bubbler valve closed
12/4/2012	8:05:39 PM	Helium valve opened
12/4/2012	8:05:39 PM	Main Vac valve opened
12/4/2012	8:05:39 PM	Helium MFC set to  20.000000
12/4/2012	8:05:39 PM	H2 MFC set to  0.000000
12/4/2012	8:05:39 PM	BCl3 MFC set to  0.000000
12/4/2012	8:05:39 PM	PH3 MFC set to  0.000000
12/4/2012	8:05:39 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:05:39 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:05:39 PM	Tube furnace set to 0
12/4/2012	8:06:09 PM	Helium valve closed
12/4/2012	8:06:09 PM	H2 valve closed
12/4/2012	8:06:09 PM	BCl3 valve closed
12/4/2012	8:06:09 PM	PH3 valve closed
12/4/2012	8:06:09 PM	SiCl4 pre valve closed
12/4/2012	8:06:09 PM	SiCl4 post valve closed
12/4/2012	8:06:09 PM	Bypass valve closed
12/4/2012	8:06:09 PM	Bubbler valve closed
12/4/2012	8:06:09 PM	Main Vac valve opened
12/4/2012	8:06:09 PM	Helium MFC set to  0.000000
12/4/2012	8:06:09 PM	H2 MFC set to  0.000000
12/4/2012	8:06:09 PM	BCl3 MFC set to  0.000000
12/4/2012	8:06:09 PM	PH3 MFC set to  0.000000
12/4/2012	8:06:09 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:06:09 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:06:09 PM	Tube furnace set to 0
12/4/2012	8:06:39 PM	H2 valve closed
12/4/2012	8:06:39 PM	BCl3 valve closed
12/4/2012	8:06:39 PM	PH3 valve closed
12/4/2012	8:06:39 PM	SiCl4 pre valve closed
12/4/2012	8:06:39 PM	SiCl4 post valve closed
12/4/2012	8:06:39 PM	Bypass valve closed
12/4/2012	8:06:39 PM	Bubbler valve closed
12/4/2012	8:06:39 PM	Helium valve opened
12/4/2012	8:06:39 PM	Main Vac valve opened
12/4/2012	8:06:39 PM	Helium MFC set to  20.000000
12/4/2012	8:06:39 PM	H2 MFC set to  0.000000
12/4/2012	8:06:39 PM	BCl3 MFC set to  0.000000
12/4/2012	8:06:39 PM	PH3 MFC set to  0.000000
12/4/2012	8:06:39 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:06:39 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:06:39 PM	Tube furnace set to 0
12/4/2012	8:07:09 PM	Helium valve closed
12/4/2012	8:07:09 PM	H2 valve closed
12/4/2012	8:07:09 PM	BCl3 valve closed
12/4/2012	8:07:09 PM	PH3 valve closed
12/4/2012	8:07:09 PM	SiCl4 pre valve closed
12/4/2012	8:07:09 PM	SiCl4 post valve closed
12/4/2012	8:07:09 PM	Bypass valve closed
12/4/2012	8:07:09 PM	Bubbler valve closed
12/4/2012	8:07:09 PM	Main Vac valve opened
12/4/2012	8:07:09 PM	Helium MFC set to  0.000000
12/4/2012	8:07:09 PM	H2 MFC set to  0.000000
12/4/2012	8:07:09 PM	BCl3 MFC set to  0.000000
12/4/2012	8:07:09 PM	PH3 MFC set to  0.000000
12/4/2012	8:07:09 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:07:09 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:07:10 PM	Tube furnace set to 0
12/4/2012	8:07:40 PM	H2 valve closed
12/4/2012	8:07:40 PM	BCl3 valve closed
12/4/2012	8:07:40 PM	PH3 valve closed
12/4/2012	8:07:40 PM	SiCl4 pre valve closed
12/4/2012	8:07:40 PM	SiCl4 post valve closed
12/4/2012	8:07:40 PM	Bypass valve closed
12/4/2012	8:07:40 PM	Bubbler valve closed
12/4/2012	8:07:40 PM	Helium valve opened
12/4/2012	8:07:40 PM	Main Vac valve opened
12/4/2012	8:07:40 PM	Helium MFC set to  20.000000
12/4/2012	8:07:40 PM	H2 MFC set to  0.000000
12/4/2012	8:07:40 PM	BCl3 MFC set to  0.000000
12/4/2012	8:07:40 PM	PH3 MFC set to  0.000000
12/4/2012	8:07:40 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:07:40 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:07:40 PM	Tube furnace set to 0
12/4/2012	8:08:10 PM	Helium valve closed
12/4/2012	8:08:10 PM	H2 valve closed
12/4/2012	8:08:10 PM	BCl3 valve closed
12/4/2012	8:08:10 PM	PH3 valve closed
12/4/2012	8:08:10 PM	SiCl4 pre valve closed
12/4/2012	8:08:10 PM	SiCl4 post valve closed
12/4/2012	8:08:10 PM	Bypass valve closed
12/4/2012	8:08:10 PM	Bubbler valve closed
12/4/2012	8:08:10 PM	Main Vac valve opened
12/4/2012	8:08:10 PM	Helium MFC set to  0.000000
12/4/2012	8:08:10 PM	H2 MFC set to  0.000000
12/4/2012	8:08:10 PM	BCl3 MFC set to  0.000000
12/4/2012	8:08:10 PM	PH3 MFC set to  0.000000
12/4/2012	8:08:10 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:08:10 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:08:10 PM	Tube furnace set to 0
12/4/2012	8:08:40 PM	H2 valve closed
12/4/2012	8:08:40 PM	BCl3 valve closed
12/4/2012	8:08:40 PM	PH3 valve closed
12/4/2012	8:08:40 PM	SiCl4 pre valve closed
12/4/2012	8:08:40 PM	SiCl4 post valve closed
12/4/2012	8:08:40 PM	Bypass valve closed
12/4/2012	8:08:40 PM	Bubbler valve closed
12/4/2012	8:08:40 PM	Helium valve opened
12/4/2012	8:08:40 PM	Main Vac valve opened
12/4/2012	8:08:40 PM	Helium MFC set to  20.000000
12/4/2012	8:08:40 PM	H2 MFC set to  0.000000
12/4/2012	8:08:40 PM	BCl3 MFC set to  0.000000
12/4/2012	8:08:40 PM	PH3 MFC set to  0.000000
12/4/2012	8:08:40 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:08:40 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:08:40 PM	Tube furnace set to 0
12/4/2012	8:09:10 PM	Helium valve closed
12/4/2012	8:09:10 PM	H2 valve closed
12/4/2012	8:09:10 PM	BCl3 valve closed
12/4/2012	8:09:10 PM	PH3 valve closed
12/4/2012	8:09:10 PM	SiCl4 pre valve closed
12/4/2012	8:09:10 PM	SiCl4 post valve closed
12/4/2012	8:09:10 PM	Bypass valve closed
12/4/2012	8:09:10 PM	Bubbler valve closed
12/4/2012	8:09:10 PM	Main Vac valve opened
12/4/2012	8:09:10 PM	Helium MFC set to  0.000000
12/4/2012	8:09:10 PM	H2 MFC set to  0.000000
12/4/2012	8:09:10 PM	BCl3 MFC set to  0.000000
12/4/2012	8:09:10 PM	PH3 MFC set to  0.000000
12/4/2012	8:09:10 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:09:10 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:09:11 PM	Tube furnace set to 0
12/4/2012	8:09:41 PM	H2 valve closed
12/4/2012	8:09:41 PM	BCl3 valve closed
12/4/2012	8:09:41 PM	PH3 valve closed
12/4/2012	8:09:41 PM	SiCl4 pre valve closed
12/4/2012	8:09:41 PM	SiCl4 post valve closed
12/4/2012	8:09:41 PM	Bypass valve closed
12/4/2012	8:09:41 PM	Bubbler valve closed
12/4/2012	8:09:41 PM	Helium valve opened
12/4/2012	8:09:41 PM	Main Vac valve opened
12/4/2012	8:09:41 PM	Helium MFC set to  20.000000
12/4/2012	8:09:41 PM	H2 MFC set to  0.000000
12/4/2012	8:09:41 PM	BCl3 MFC set to  0.000000
12/4/2012	8:09:41 PM	PH3 MFC set to  0.000000
12/4/2012	8:09:41 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:09:41 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:09:41 PM	Tube furnace set to 0
12/4/2012	8:10:11 PM	Helium valve closed
12/4/2012	8:10:11 PM	H2 valve closed
12/4/2012	8:10:11 PM	BCl3 valve closed
12/4/2012	8:10:11 PM	PH3 valve closed
12/4/2012	8:10:11 PM	SiCl4 pre valve closed
12/4/2012	8:10:11 PM	SiCl4 post valve closed
12/4/2012	8:10:11 PM	Bypass valve closed
12/4/2012	8:10:11 PM	Bubbler valve closed
12/4/2012	8:10:11 PM	Main Vac valve opened
12/4/2012	8:10:11 PM	Helium MFC set to  0.000000
12/4/2012	8:10:11 PM	H2 MFC set to  0.000000
12/4/2012	8:10:11 PM	BCl3 MFC set to  0.000000
12/4/2012	8:10:11 PM	PH3 MFC set to  0.000000
12/4/2012	8:10:11 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:10:11 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:10:11 PM	Tube furnace set to 0
12/4/2012	8:10:41 PM	H2 valve closed
12/4/2012	8:10:41 PM	BCl3 valve closed
12/4/2012	8:10:41 PM	PH3 valve closed
12/4/2012	8:10:41 PM	SiCl4 pre valve closed
12/4/2012	8:10:41 PM	SiCl4 post valve closed
12/4/2012	8:10:41 PM	Bypass valve closed
12/4/2012	8:10:41 PM	Bubbler valve closed
12/4/2012	8:10:41 PM	Helium valve opened
12/4/2012	8:10:41 PM	Main Vac valve opened
12/4/2012	8:10:41 PM	Helium MFC set to  20.000000
12/4/2012	8:10:41 PM	H2 MFC set to  0.000000
12/4/2012	8:10:41 PM	BCl3 MFC set to  0.000000
12/4/2012	8:10:41 PM	PH3 MFC set to  0.000000
12/4/2012	8:10:41 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:10:41 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:10:41 PM	Tube furnace set to 0
12/4/2012	8:11:11 PM	Helium valve closed
12/4/2012	8:11:11 PM	H2 valve closed
12/4/2012	8:11:11 PM	BCl3 valve closed
12/4/2012	8:11:11 PM	PH3 valve closed
12/4/2012	8:11:11 PM	SiCl4 pre valve closed
12/4/2012	8:11:11 PM	SiCl4 post valve closed
12/4/2012	8:11:11 PM	Bypass valve closed
12/4/2012	8:11:11 PM	Bubbler valve closed
12/4/2012	8:11:11 PM	Main Vac valve opened
12/4/2012	8:11:11 PM	Helium MFC set to  0.000000
12/4/2012	8:11:11 PM	H2 MFC set to  0.000000
12/4/2012	8:11:11 PM	BCl3 MFC set to  0.000000
12/4/2012	8:11:12 PM	PH3 MFC set to  0.000000
12/4/2012	8:11:12 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:11:12 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:11:12 PM	Tube furnace set to 0
12/4/2012	8:11:42 PM	H2 valve closed
12/4/2012	8:11:42 PM	BCl3 valve closed
12/4/2012	8:11:42 PM	PH3 valve closed
12/4/2012	8:11:42 PM	SiCl4 pre valve closed
12/4/2012	8:11:42 PM	SiCl4 post valve closed
12/4/2012	8:11:42 PM	Bypass valve closed
12/4/2012	8:11:42 PM	Bubbler valve closed
12/4/2012	8:11:42 PM	Helium valve opened
12/4/2012	8:11:42 PM	Main Vac valve opened
12/4/2012	8:11:42 PM	Helium MFC set to  20.000000
12/4/2012	8:11:42 PM	H2 MFC set to  0.000000
12/4/2012	8:11:42 PM	BCl3 MFC set to  0.000000
12/4/2012	8:11:42 PM	PH3 MFC set to  0.000000
12/4/2012	8:11:42 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:11:42 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:11:42 PM	Tube furnace set to 0
12/4/2012	8:12:12 PM	Helium valve closed
12/4/2012	8:12:12 PM	H2 valve closed
12/4/2012	8:12:12 PM	BCl3 valve closed
12/4/2012	8:12:12 PM	PH3 valve closed
12/4/2012	8:12:12 PM	SiCl4 pre valve closed
12/4/2012	8:12:12 PM	SiCl4 post valve closed
12/4/2012	8:12:12 PM	Bypass valve closed
12/4/2012	8:12:12 PM	Bubbler valve closed
12/4/2012	8:12:12 PM	Main Vac valve opened
12/4/2012	8:12:12 PM	Helium MFC set to  0.000000
12/4/2012	8:12:12 PM	H2 MFC set to  0.000000
12/4/2012	8:12:12 PM	BCl3 MFC set to  0.000000
12/4/2012	8:12:12 PM	PH3 MFC set to  0.000000
12/4/2012	8:12:12 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:12:12 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:12:12 PM	Tube furnace set to 0
12/4/2012	8:12:13 PM	Run finished at 8:12 PM
12/4/2012	8:12:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	8:17:42 PM	Main Vac valve closed
12/4/2012	8:17:55 PM	Main Vac valve opened
12/4/2012	8:19:02 PM	Recipe started at 8:19 PM
12/4/2012	8:19:02 PM	Helium valve closed
12/4/2012	8:19:02 PM	H2 valve closed
12/4/2012	8:19:02 PM	BCl3 valve closed
12/4/2012	8:19:02 PM	PH3 valve closed
12/4/2012	8:19:02 PM	SiCl4 pre valve closed
12/4/2012	8:19:02 PM	SiCl4 post valve closed
12/4/2012	8:19:02 PM	Main Vac valve closed
12/4/2012	8:19:02 PM	Bypass valve closed
12/4/2012	8:19:02 PM	Bubbler valve closed
12/4/2012	8:19:02 PM	Helium MFC set to  0.000000
12/4/2012	8:19:02 PM	H2 MFC set to  0.000000
12/4/2012	8:19:02 PM	BCl3 MFC set to  0.000000
12/4/2012	8:19:02 PM	PH3 MFC set to  0.000000
12/4/2012	8:19:02 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:19:02 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:19:02 PM	Tube furnace set to 0
12/4/2012	8:19:05 PM	Helium valve closed
12/4/2012	8:19:05 PM	BCl3 valve closed
12/4/2012	8:19:05 PM	PH3 valve closed
12/4/2012	8:19:05 PM	SiCl4 pre valve closed
12/4/2012	8:19:05 PM	SiCl4 post valve closed
12/4/2012	8:19:05 PM	Main Vac valve closed
12/4/2012	8:19:05 PM	Bypass valve closed
12/4/2012	8:19:05 PM	Bubbler valve closed
12/4/2012	8:19:05 PM	H2 valve opened
12/4/2012	8:19:05 PM	Helium MFC set to  0.000000
12/4/2012	8:19:05 PM	H2 MFC set to  500.000000
12/4/2012	8:19:05 PM	BCl3 MFC set to  0.000000
12/4/2012	8:19:05 PM	PH3 MFC set to  0.000000
12/4/2012	8:19:05 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:19:05 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:19:05 PM	Tube furnace set to 0
12/4/2012	8:20:18 PM	Helium valve closed
12/4/2012	8:20:18 PM	BCl3 valve closed
12/4/2012	8:20:18 PM	PH3 valve closed
12/4/2012	8:20:18 PM	SiCl4 pre valve closed
12/4/2012	8:20:18 PM	SiCl4 post valve closed
12/4/2012	8:20:18 PM	Main Vac valve closed
12/4/2012	8:20:18 PM	Bypass valve closed
12/4/2012	8:20:18 PM	H2 valve opened
12/4/2012	8:20:18 PM	Bubbler valve opened
12/4/2012	8:20:18 PM	Helium MFC set to  0.000000
12/4/2012	8:20:18 PM	H2 MFC set to  500.000000
12/4/2012	8:20:18 PM	BCl3 MFC set to  0.000000
12/4/2012	8:20:18 PM	PH3 MFC set to  0.000000
12/4/2012	8:20:18 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:20:18 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:20:18 PM	Tube furnace set to 0
12/4/2012	8:20:19 PM	Helium valve closed
12/4/2012	8:20:19 PM	BCl3 valve closed
12/4/2012	8:20:19 PM	PH3 valve closed
12/4/2012	8:20:19 PM	SiCl4 pre valve closed
12/4/2012	8:20:19 PM	SiCl4 post valve closed
12/4/2012	8:20:19 PM	Main Vac valve closed
12/4/2012	8:20:19 PM	Bypass valve closed
12/4/2012	8:20:19 PM	H2 valve opened
12/4/2012	8:20:19 PM	Bubbler valve opened
12/4/2012	8:20:19 PM	Helium MFC set to  0.000000
12/4/2012	8:20:19 PM	H2 MFC set to  500.000000
12/4/2012	8:20:19 PM	BCl3 MFC set to  0.000000
12/4/2012	8:20:19 PM	PH3 MFC set to  0.000000
12/4/2012	8:20:19 PM	SiCl4 MFC set to  0.000000
12/4/2012	8:20:19 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:20:19 PM	Tube furnace set to 1000
12/4/2012	8:50:19 PM	Helium valve closed
12/4/2012	8:50:19 PM	PH3 valve closed
12/4/2012	8:50:19 PM	Main Vac valve closed
12/4/2012	8:50:19 PM	Bypass valve closed
12/4/2012	8:50:19 PM	H2 valve opened
12/4/2012	8:50:19 PM	BCl3 valve opened
12/4/2012	8:50:19 PM	SiCl4 pre valve opened
12/4/2012	8:50:19 PM	SiCl4 post valve opened
12/4/2012	8:50:19 PM	Bubbler valve opened
12/4/2012	8:50:19 PM	Helium MFC set to  0.000000
12/4/2012	8:50:19 PM	H2 MFC set to  500.000000
12/4/2012	8:50:19 PM	BCl3 MFC set to  1.000000
12/4/2012	8:50:19 PM	PH3 MFC set to  0.000000
12/4/2012	8:50:19 PM	SiCl4 MFC set to  50.000000
12/4/2012	8:50:19 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	8:50:20 PM	Tube furnace set to 1000
12/4/2012	9:01:20 PM	Helium valve closed
12/4/2012	9:01:20 PM	BCl3 valve closed
12/4/2012	9:01:20 PM	PH3 valve closed
12/4/2012	9:01:20 PM	SiCl4 pre valve closed
12/4/2012	9:01:20 PM	SiCl4 post valve closed
12/4/2012	9:01:20 PM	Main Vac valve closed
12/4/2012	9:01:20 PM	Bypass valve closed
12/4/2012	9:01:20 PM	H2 valve opened
12/4/2012	9:01:20 PM	Bubbler valve opened
12/4/2012	9:01:20 PM	Helium MFC set to  0.000000
12/4/2012	9:01:20 PM	H2 MFC set to  500.000000
12/4/2012	9:01:20 PM	BCl3 MFC set to  0.000000
12/4/2012	9:01:20 PM	PH3 MFC set to  0.000000
12/4/2012	9:01:20 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:01:20 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:01:20 PM	Tube furnace set to 750
12/4/2012	9:06:20 PM	H2 valve closed
12/4/2012	9:06:20 PM	BCl3 valve closed
12/4/2012	9:06:20 PM	PH3 valve closed
12/4/2012	9:06:20 PM	SiCl4 pre valve closed
12/4/2012	9:06:20 PM	SiCl4 post valve closed
12/4/2012	9:06:20 PM	Main Vac valve closed
12/4/2012	9:06:20 PM	Bypass valve closed
12/4/2012	9:06:20 PM	Helium valve opened
12/4/2012	9:06:20 PM	Bubbler valve opened
12/4/2012	9:06:20 PM	Helium MFC set to  500.000000
12/4/2012	9:06:20 PM	H2 MFC set to  0.000000
12/4/2012	9:06:20 PM	BCl3 MFC set to  0.000000
12/4/2012	9:06:20 PM	PH3 MFC set to  0.000000
12/4/2012	9:06:20 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:06:20 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:06:20 PM	Tube furnace set to 0
12/4/2012	9:13:23 PM	Helium valve closed
12/4/2012	9:13:23 PM	H2 valve closed
12/4/2012	9:13:24 PM	BCl3 valve closed
12/4/2012	9:13:24 PM	PH3 valve closed
12/4/2012	9:13:24 PM	SiCl4 pre valve closed
12/4/2012	9:13:24 PM	SiCl4 post valve closed
12/4/2012	9:13:24 PM	Main Vac valve closed
12/4/2012	9:13:24 PM	Bypass valve closed
12/4/2012	9:13:24 PM	Bubbler valve closed
12/4/2012	9:13:24 PM	Helium MFC set to  0.000000
12/4/2012	9:13:24 PM	H2 MFC set to  0.000000
12/4/2012	9:13:24 PM	BCl3 MFC set to  0.000000
12/4/2012	9:13:24 PM	PH3 MFC set to  0.000000
12/4/2012	9:13:24 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:13:24 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:13:24 PM	Tube furnace set to 0
12/4/2012	9:13:25 PM	Run finished at 9:13 PM
12/4/2012	9:15:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	9:15:58 PM	Recipe started at 9:15 PM
12/4/2012	9:15:58 PM	Helium valve closed
12/4/2012	9:15:58 PM	H2 valve closed
12/4/2012	9:15:59 PM	BCl3 valve closed
12/4/2012	9:15:59 PM	PH3 valve closed
12/4/2012	9:15:59 PM	SiCl4 pre valve closed
12/4/2012	9:15:59 PM	SiCl4 post valve closed
12/4/2012	9:15:59 PM	Main Vac valve closed
12/4/2012	9:15:59 PM	Bubbler valve closed
12/4/2012	9:15:59 PM	Bypass valve opened
12/4/2012	9:15:59 PM	Helium MFC set to  0.000000
12/4/2012	9:15:59 PM	H2 MFC set to  0.000000
12/4/2012	9:15:59 PM	BCl3 MFC set to  0.000000
12/4/2012	9:15:59 PM	PH3 MFC set to  0.000000
12/4/2012	9:15:59 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:15:59 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:15:59 PM	Tube furnace set to 0
12/4/2012	9:17:12 PM	Helium valve closed
12/4/2012	9:17:12 PM	H2 valve closed
12/4/2012	9:17:12 PM	BCl3 valve closed
12/4/2012	9:17:12 PM	PH3 valve closed
12/4/2012	9:17:12 PM	SiCl4 pre valve closed
12/4/2012	9:17:12 PM	SiCl4 post valve closed
12/4/2012	9:17:12 PM	Main Vac valve closed
12/4/2012	9:17:12 PM	Bubbler valve closed
12/4/2012	9:17:12 PM	Bypass valve opened
12/4/2012	9:17:12 PM	Helium MFC set to  0.000000
12/4/2012	9:17:12 PM	H2 MFC set to  0.000000
12/4/2012	9:17:12 PM	BCl3 MFC set to  0.000000
12/4/2012	9:17:12 PM	PH3 MFC set to  0.000000
12/4/2012	9:17:12 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:17:12 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:17:12 PM	Tube furnace set to 0
12/4/2012	9:17:18 PM	Helium valve closed
12/4/2012	9:17:18 PM	H2 valve closed
12/4/2012	9:17:18 PM	BCl3 valve closed
12/4/2012	9:17:18 PM	PH3 valve closed
12/4/2012	9:17:18 PM	SiCl4 pre valve closed
12/4/2012	9:17:18 PM	SiCl4 post valve closed
12/4/2012	9:17:18 PM	Bypass valve closed
12/4/2012	9:17:18 PM	Bubbler valve closed
12/4/2012	9:17:18 PM	Main Vac valve opened
12/4/2012	9:17:18 PM	Helium MFC set to  0.000000
12/4/2012	9:17:18 PM	H2 MFC set to  0.000000
12/4/2012	9:17:18 PM	BCl3 MFC set to  0.000000
12/4/2012	9:17:18 PM	PH3 MFC set to  0.000000
12/4/2012	9:17:18 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:17:18 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:17:18 PM	Tube furnace set to 0
12/4/2012	9:17:19 PM	Run finished at 9:17 PM
12/4/2012	9:17:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/4/2012	9:17:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
12/4/2012	9:17:44 PM	Recipe started at 9:17 PM
12/4/2012	9:17:44 PM	Helium valve closed
12/4/2012	9:17:44 PM	H2 valve closed
12/4/2012	9:17:44 PM	BCl3 valve closed
12/4/2012	9:17:44 PM	PH3 valve closed
12/4/2012	9:17:44 PM	SiCl4 pre valve closed
12/4/2012	9:17:44 PM	SiCl4 post valve closed
12/4/2012	9:17:44 PM	Main Vac valve closed
12/4/2012	9:17:44 PM	Bubbler valve closed
12/4/2012	9:17:44 PM	Bypass valve opened
12/4/2012	9:17:44 PM	Helium MFC set to  0.000000
12/4/2012	9:17:44 PM	H2 MFC set to  0.000000
12/4/2012	9:17:44 PM	BCl3 MFC set to  0.000000
12/4/2012	9:17:44 PM	PH3 MFC set to  0.000000
12/4/2012	9:17:44 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:17:44 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:17:45 PM	Tube furnace set to 0
12/4/2012	9:17:45 PM	Helium valve closed
12/4/2012	9:17:45 PM	H2 valve closed
12/4/2012	9:17:45 PM	BCl3 valve closed
12/4/2012	9:17:45 PM	PH3 valve closed
12/4/2012	9:17:45 PM	SiCl4 pre valve closed
12/4/2012	9:17:45 PM	SiCl4 post valve closed
12/4/2012	9:17:45 PM	Main Vac valve closed
12/4/2012	9:17:45 PM	Bubbler valve closed
12/4/2012	9:17:45 PM	Bypass valve opened
12/4/2012	9:17:45 PM	Helium MFC set to  0.000000
12/4/2012	9:17:45 PM	H2 MFC set to  0.000000
12/4/2012	9:17:45 PM	BCl3 MFC set to  0.000000
12/4/2012	9:17:45 PM	PH3 MFC set to  0.000000
12/4/2012	9:17:45 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:17:45 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:17:45 PM	Tube furnace set to 0
12/4/2012	9:17:49 PM	Helium valve closed
12/4/2012	9:17:49 PM	H2 valve closed
12/4/2012	9:17:49 PM	BCl3 valve closed
12/4/2012	9:17:49 PM	PH3 valve closed
12/4/2012	9:17:49 PM	SiCl4 pre valve closed
12/4/2012	9:17:49 PM	SiCl4 post valve closed
12/4/2012	9:17:49 PM	Bypass valve closed
12/4/2012	9:17:49 PM	Bubbler valve closed
12/4/2012	9:17:49 PM	Main Vac valve opened
12/4/2012	9:17:49 PM	Helium MFC set to  0.000000
12/4/2012	9:17:49 PM	H2 MFC set to  0.000000
12/4/2012	9:17:49 PM	BCl3 MFC set to  0.000000
12/4/2012	9:17:49 PM	PH3 MFC set to  0.000000
12/4/2012	9:17:49 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:17:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:17:49 PM	Tube furnace set to 0
12/4/2012	9:18:19 PM	H2 valve closed
12/4/2012	9:18:19 PM	BCl3 valve closed
12/4/2012	9:18:19 PM	PH3 valve closed
12/4/2012	9:18:19 PM	SiCl4 pre valve closed
12/4/2012	9:18:19 PM	SiCl4 post valve closed
12/4/2012	9:18:19 PM	Bypass valve closed
12/4/2012	9:18:19 PM	Bubbler valve closed
12/4/2012	9:18:19 PM	Helium valve opened
12/4/2012	9:18:19 PM	Main Vac valve opened
12/4/2012	9:18:19 PM	Helium MFC set to  20.000000
12/4/2012	9:18:19 PM	H2 MFC set to  0.000000
12/4/2012	9:18:19 PM	BCl3 MFC set to  0.000000
12/4/2012	9:18:19 PM	PH3 MFC set to  0.000000
12/4/2012	9:18:19 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:18:19 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:18:19 PM	Tube furnace set to 0
12/4/2012	9:18:49 PM	Helium valve closed
12/4/2012	9:18:49 PM	H2 valve closed
12/4/2012	9:18:49 PM	BCl3 valve closed
12/4/2012	9:18:49 PM	PH3 valve closed
12/4/2012	9:18:49 PM	SiCl4 pre valve closed
12/4/2012	9:18:49 PM	SiCl4 post valve closed
12/4/2012	9:18:49 PM	Bypass valve closed
12/4/2012	9:18:49 PM	Bubbler valve closed
12/4/2012	9:18:49 PM	Main Vac valve opened
12/4/2012	9:18:49 PM	Helium MFC set to  0.000000
12/4/2012	9:18:49 PM	H2 MFC set to  0.000000
12/4/2012	9:18:49 PM	BCl3 MFC set to  0.000000
12/4/2012	9:18:49 PM	PH3 MFC set to  0.000000
12/4/2012	9:18:49 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:18:49 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:18:50 PM	Tube furnace set to 0
12/4/2012	9:19:20 PM	H2 valve closed
12/4/2012	9:19:20 PM	BCl3 valve closed
12/4/2012	9:19:20 PM	PH3 valve closed
12/4/2012	9:19:20 PM	SiCl4 pre valve closed
12/4/2012	9:19:20 PM	SiCl4 post valve closed
12/4/2012	9:19:20 PM	Bypass valve closed
12/4/2012	9:19:20 PM	Bubbler valve closed
12/4/2012	9:19:20 PM	Helium valve opened
12/4/2012	9:19:20 PM	Main Vac valve opened
12/4/2012	9:19:20 PM	Helium MFC set to  20.000000
12/4/2012	9:19:20 PM	H2 MFC set to  0.000000
12/4/2012	9:19:20 PM	BCl3 MFC set to  0.000000
12/4/2012	9:19:20 PM	PH3 MFC set to  0.000000
12/4/2012	9:19:20 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:19:20 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:19:20 PM	Tube furnace set to 0
12/4/2012	9:19:50 PM	Helium valve closed
12/4/2012	9:19:50 PM	H2 valve closed
12/4/2012	9:19:50 PM	BCl3 valve closed
12/4/2012	9:19:50 PM	PH3 valve closed
12/4/2012	9:19:50 PM	SiCl4 pre valve closed
12/4/2012	9:19:50 PM	SiCl4 post valve closed
12/4/2012	9:19:50 PM	Bypass valve closed
12/4/2012	9:19:50 PM	Bubbler valve closed
12/4/2012	9:19:50 PM	Main Vac valve opened
12/4/2012	9:19:50 PM	Helium MFC set to  0.000000
12/4/2012	9:19:50 PM	H2 MFC set to  0.000000
12/4/2012	9:19:50 PM	BCl3 MFC set to  0.000000
12/4/2012	9:19:50 PM	PH3 MFC set to  0.000000
12/4/2012	9:19:50 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:19:50 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:19:50 PM	Tube furnace set to 0
12/4/2012	9:20:20 PM	H2 valve closed
12/4/2012	9:20:20 PM	BCl3 valve closed
12/4/2012	9:20:20 PM	PH3 valve closed
12/4/2012	9:20:20 PM	SiCl4 pre valve closed
12/4/2012	9:20:20 PM	SiCl4 post valve closed
12/4/2012	9:20:20 PM	Bypass valve closed
12/4/2012	9:20:20 PM	Bubbler valve closed
12/4/2012	9:20:20 PM	Helium valve opened
12/4/2012	9:20:20 PM	Main Vac valve opened
12/4/2012	9:20:20 PM	Helium MFC set to  20.000000
12/4/2012	9:20:20 PM	H2 MFC set to  0.000000
12/4/2012	9:20:20 PM	BCl3 MFC set to  0.000000
12/4/2012	9:20:20 PM	PH3 MFC set to  0.000000
12/4/2012	9:20:20 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:20:20 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:20:20 PM	Tube furnace set to 0
12/4/2012	9:20:50 PM	Helium valve closed
12/4/2012	9:20:50 PM	H2 valve closed
12/4/2012	9:20:50 PM	BCl3 valve closed
12/4/2012	9:20:50 PM	PH3 valve closed
12/4/2012	9:20:50 PM	SiCl4 pre valve closed
12/4/2012	9:20:50 PM	SiCl4 post valve closed
12/4/2012	9:20:50 PM	Bypass valve closed
12/4/2012	9:20:50 PM	Bubbler valve closed
12/4/2012	9:20:50 PM	Main Vac valve opened
12/4/2012	9:20:50 PM	Helium MFC set to  0.000000
12/4/2012	9:20:50 PM	H2 MFC set to  0.000000
12/4/2012	9:20:50 PM	BCl3 MFC set to  0.000000
12/4/2012	9:20:50 PM	PH3 MFC set to  0.000000
12/4/2012	9:20:50 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:20:50 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:20:51 PM	Tube furnace set to 0
12/4/2012	9:21:21 PM	H2 valve closed
12/4/2012	9:21:21 PM	BCl3 valve closed
12/4/2012	9:21:21 PM	PH3 valve closed
12/4/2012	9:21:21 PM	SiCl4 pre valve closed
12/4/2012	9:21:21 PM	SiCl4 post valve closed
12/4/2012	9:21:21 PM	Bypass valve closed
12/4/2012	9:21:21 PM	Bubbler valve closed
12/4/2012	9:21:21 PM	Helium valve opened
12/4/2012	9:21:21 PM	Main Vac valve opened
12/4/2012	9:21:21 PM	Helium MFC set to  20.000000
12/4/2012	9:21:21 PM	H2 MFC set to  0.000000
12/4/2012	9:21:21 PM	BCl3 MFC set to  0.000000
12/4/2012	9:21:21 PM	PH3 MFC set to  0.000000
12/4/2012	9:21:21 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:21:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:21:21 PM	Tube furnace set to 0
12/4/2012	9:21:51 PM	Helium valve closed
12/4/2012	9:21:51 PM	H2 valve closed
12/4/2012	9:21:51 PM	BCl3 valve closed
12/4/2012	9:21:51 PM	PH3 valve closed
12/4/2012	9:21:51 PM	SiCl4 pre valve closed
12/4/2012	9:21:51 PM	SiCl4 post valve closed
12/4/2012	9:21:51 PM	Bypass valve closed
12/4/2012	9:21:51 PM	Bubbler valve closed
12/4/2012	9:21:51 PM	Main Vac valve opened
12/4/2012	9:21:51 PM	Helium MFC set to  0.000000
12/4/2012	9:21:51 PM	H2 MFC set to  0.000000
12/4/2012	9:21:51 PM	BCl3 MFC set to  0.000000
12/4/2012	9:21:51 PM	PH3 MFC set to  0.000000
12/4/2012	9:21:51 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:21:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:21:51 PM	Tube furnace set to 0
12/4/2012	9:22:21 PM	H2 valve closed
12/4/2012	9:22:21 PM	BCl3 valve closed
12/4/2012	9:22:21 PM	PH3 valve closed
12/4/2012	9:22:21 PM	SiCl4 pre valve closed
12/4/2012	9:22:21 PM	SiCl4 post valve closed
12/4/2012	9:22:21 PM	Bypass valve closed
12/4/2012	9:22:21 PM	Bubbler valve closed
12/4/2012	9:22:21 PM	Helium valve opened
12/4/2012	9:22:21 PM	Main Vac valve opened
12/4/2012	9:22:21 PM	Helium MFC set to  20.000000
12/4/2012	9:22:21 PM	H2 MFC set to  0.000000
12/4/2012	9:22:21 PM	BCl3 MFC set to  0.000000
12/4/2012	9:22:21 PM	PH3 MFC set to  0.000000
12/4/2012	9:22:21 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:22:21 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:22:21 PM	Tube furnace set to 0
12/4/2012	9:22:51 PM	Helium valve closed
12/4/2012	9:22:51 PM	H2 valve closed
12/4/2012	9:22:51 PM	BCl3 valve closed
12/4/2012	9:22:51 PM	PH3 valve closed
12/4/2012	9:22:51 PM	SiCl4 pre valve closed
12/4/2012	9:22:51 PM	SiCl4 post valve closed
12/4/2012	9:22:51 PM	Bypass valve closed
12/4/2012	9:22:51 PM	Bubbler valve closed
12/4/2012	9:22:51 PM	Main Vac valve opened
12/4/2012	9:22:51 PM	Helium MFC set to  0.000000
12/4/2012	9:22:51 PM	H2 MFC set to  0.000000
12/4/2012	9:22:51 PM	BCl3 MFC set to  0.000000
12/4/2012	9:22:51 PM	PH3 MFC set to  0.000000
12/4/2012	9:22:51 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:22:51 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:22:52 PM	Tube furnace set to 0
12/4/2012	9:23:22 PM	H2 valve closed
12/4/2012	9:23:22 PM	BCl3 valve closed
12/4/2012	9:23:22 PM	PH3 valve closed
12/4/2012	9:23:22 PM	SiCl4 pre valve closed
12/4/2012	9:23:22 PM	SiCl4 post valve closed
12/4/2012	9:23:22 PM	Bypass valve closed
12/4/2012	9:23:22 PM	Bubbler valve closed
12/4/2012	9:23:22 PM	Helium valve opened
12/4/2012	9:23:22 PM	Main Vac valve opened
12/4/2012	9:23:22 PM	Helium MFC set to  20.000000
12/4/2012	9:23:22 PM	H2 MFC set to  0.000000
12/4/2012	9:23:22 PM	BCl3 MFC set to  0.000000
12/4/2012	9:23:22 PM	PH3 MFC set to  0.000000
12/4/2012	9:23:22 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:23:22 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:23:22 PM	Tube furnace set to 0
12/4/2012	9:23:52 PM	Helium valve closed
12/4/2012	9:23:52 PM	H2 valve closed
12/4/2012	9:23:52 PM	BCl3 valve closed
12/4/2012	9:23:52 PM	PH3 valve closed
12/4/2012	9:23:52 PM	SiCl4 pre valve closed
12/4/2012	9:23:52 PM	SiCl4 post valve closed
12/4/2012	9:23:52 PM	Bypass valve closed
12/4/2012	9:23:52 PM	Bubbler valve closed
12/4/2012	9:23:52 PM	Main Vac valve opened
12/4/2012	9:23:52 PM	Helium MFC set to  0.000000
12/4/2012	9:23:52 PM	H2 MFC set to  0.000000
12/4/2012	9:23:52 PM	BCl3 MFC set to  0.000000
12/4/2012	9:23:52 PM	PH3 MFC set to  0.000000
12/4/2012	9:23:52 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:23:52 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:23:52 PM	Tube furnace set to 0
12/4/2012	9:24:22 PM	H2 valve closed
12/4/2012	9:24:22 PM	BCl3 valve closed
12/4/2012	9:24:22 PM	PH3 valve closed
12/4/2012	9:24:22 PM	SiCl4 pre valve closed
12/4/2012	9:24:22 PM	SiCl4 post valve closed
12/4/2012	9:24:22 PM	Bypass valve closed
12/4/2012	9:24:22 PM	Bubbler valve closed
12/4/2012	9:24:22 PM	Helium valve opened
12/4/2012	9:24:22 PM	Main Vac valve opened
12/4/2012	9:24:22 PM	Helium MFC set to  20.000000
12/4/2012	9:24:22 PM	H2 MFC set to  0.000000
12/4/2012	9:24:22 PM	BCl3 MFC set to  0.000000
12/4/2012	9:24:22 PM	PH3 MFC set to  0.000000
12/4/2012	9:24:22 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:24:22 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:24:22 PM	Tube furnace set to 0
12/4/2012	9:24:52 PM	Helium valve closed
12/4/2012	9:24:52 PM	H2 valve closed
12/4/2012	9:24:52 PM	BCl3 valve closed
12/4/2012	9:24:52 PM	PH3 valve closed
12/4/2012	9:24:52 PM	SiCl4 pre valve closed
12/4/2012	9:24:52 PM	SiCl4 post valve closed
12/4/2012	9:24:52 PM	Bypass valve closed
12/4/2012	9:24:52 PM	Bubbler valve closed
12/4/2012	9:24:52 PM	Main Vac valve opened
12/4/2012	9:24:52 PM	Helium MFC set to  0.000000
12/4/2012	9:24:52 PM	H2 MFC set to  0.000000
12/4/2012	9:24:52 PM	BCl3 MFC set to  0.000000
12/4/2012	9:24:52 PM	PH3 MFC set to  0.000000
12/4/2012	9:24:52 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:24:52 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:24:53 PM	Tube furnace set to 0
12/4/2012	9:25:23 PM	H2 valve closed
12/4/2012	9:25:23 PM	BCl3 valve closed
12/4/2012	9:25:23 PM	PH3 valve closed
12/4/2012	9:25:23 PM	SiCl4 pre valve closed
12/4/2012	9:25:23 PM	SiCl4 post valve closed
12/4/2012	9:25:23 PM	Bypass valve closed
12/4/2012	9:25:23 PM	Bubbler valve closed
12/4/2012	9:25:23 PM	Helium valve opened
12/4/2012	9:25:23 PM	Main Vac valve opened
12/4/2012	9:25:23 PM	Helium MFC set to  20.000000
12/4/2012	9:25:23 PM	H2 MFC set to  0.000000
12/4/2012	9:25:23 PM	BCl3 MFC set to  0.000000
12/4/2012	9:25:23 PM	PH3 MFC set to  0.000000
12/4/2012	9:25:23 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:25:23 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:25:23 PM	Tube furnace set to 0
12/4/2012	9:25:53 PM	Helium valve closed
12/4/2012	9:25:53 PM	H2 valve closed
12/4/2012	9:25:53 PM	BCl3 valve closed
12/4/2012	9:25:53 PM	PH3 valve closed
12/4/2012	9:25:53 PM	SiCl4 pre valve closed
12/4/2012	9:25:53 PM	SiCl4 post valve closed
12/4/2012	9:25:53 PM	Bypass valve closed
12/4/2012	9:25:53 PM	Bubbler valve closed
12/4/2012	9:25:53 PM	Main Vac valve opened
12/4/2012	9:25:53 PM	Helium MFC set to  0.000000
12/4/2012	9:25:53 PM	H2 MFC set to  0.000000
12/4/2012	9:25:53 PM	BCl3 MFC set to  0.000000
12/4/2012	9:25:53 PM	PH3 MFC set to  0.000000
12/4/2012	9:25:53 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:25:53 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:25:53 PM	Tube furnace set to 0
12/4/2012	9:26:23 PM	H2 valve closed
12/4/2012	9:26:23 PM	BCl3 valve closed
12/4/2012	9:26:23 PM	PH3 valve closed
12/4/2012	9:26:23 PM	SiCl4 pre valve closed
12/4/2012	9:26:23 PM	SiCl4 post valve closed
12/4/2012	9:26:23 PM	Bypass valve closed
12/4/2012	9:26:23 PM	Bubbler valve closed
12/4/2012	9:26:23 PM	Helium valve opened
12/4/2012	9:26:23 PM	Main Vac valve opened
12/4/2012	9:26:23 PM	Helium MFC set to  20.000000
12/4/2012	9:26:23 PM	H2 MFC set to  0.000000
12/4/2012	9:26:23 PM	BCl3 MFC set to  0.000000
12/4/2012	9:26:23 PM	PH3 MFC set to  0.000000
12/4/2012	9:26:23 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:26:23 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:26:23 PM	Tube furnace set to 0
12/4/2012	9:26:53 PM	Helium valve closed
12/4/2012	9:26:53 PM	H2 valve closed
12/4/2012	9:26:53 PM	BCl3 valve closed
12/4/2012	9:26:53 PM	PH3 valve closed
12/4/2012	9:26:53 PM	SiCl4 pre valve closed
12/4/2012	9:26:53 PM	SiCl4 post valve closed
12/4/2012	9:26:53 PM	Bypass valve closed
12/4/2012	9:26:53 PM	Bubbler valve closed
12/4/2012	9:26:53 PM	Main Vac valve opened
12/4/2012	9:26:53 PM	Helium MFC set to  0.000000
12/4/2012	9:26:53 PM	H2 MFC set to  0.000000
12/4/2012	9:26:53 PM	BCl3 MFC set to  0.000000
12/4/2012	9:26:53 PM	PH3 MFC set to  0.000000
12/4/2012	9:26:53 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:26:54 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:26:54 PM	Tube furnace set to 0
12/4/2012	9:27:24 PM	H2 valve closed
12/4/2012	9:27:24 PM	BCl3 valve closed
12/4/2012	9:27:24 PM	PH3 valve closed
12/4/2012	9:27:24 PM	SiCl4 pre valve closed
12/4/2012	9:27:24 PM	SiCl4 post valve closed
12/4/2012	9:27:24 PM	Bypass valve closed
12/4/2012	9:27:24 PM	Bubbler valve closed
12/4/2012	9:27:24 PM	Helium valve opened
12/4/2012	9:27:24 PM	Main Vac valve opened
12/4/2012	9:27:24 PM	Helium MFC set to  20.000000
12/4/2012	9:27:24 PM	H2 MFC set to  0.000000
12/4/2012	9:27:24 PM	BCl3 MFC set to  0.000000
12/4/2012	9:27:24 PM	PH3 MFC set to  0.000000
12/4/2012	9:27:24 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:27:24 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:27:24 PM	Tube furnace set to 0
12/4/2012	9:27:54 PM	Helium valve closed
12/4/2012	9:27:54 PM	H2 valve closed
12/4/2012	9:27:54 PM	BCl3 valve closed
12/4/2012	9:27:54 PM	PH3 valve closed
12/4/2012	9:27:54 PM	SiCl4 pre valve closed
12/4/2012	9:27:54 PM	SiCl4 post valve closed
12/4/2012	9:27:54 PM	Bypass valve closed
12/4/2012	9:27:54 PM	Bubbler valve closed
12/4/2012	9:27:54 PM	Main Vac valve opened
12/4/2012	9:27:54 PM	Helium MFC set to  0.000000
12/4/2012	9:27:54 PM	H2 MFC set to  0.000000
12/4/2012	9:27:54 PM	BCl3 MFC set to  0.000000
12/4/2012	9:27:54 PM	PH3 MFC set to  0.000000
12/4/2012	9:27:54 PM	SiCl4 MFC set to  0.000000
12/4/2012	9:27:54 PM	Bypass solenoid MFC set to  0.000000
12/4/2012	9:27:54 PM	Tube furnace set to 0
12/4/2012	9:27:55 PM	Run finished at 9:27 PM
12/4/2012	9:27:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
